DE3474563D1 - Polishing composition based on cerium, and process for making the same - Google Patents

Polishing composition based on cerium, and process for making the same

Info

Publication number
DE3474563D1
DE3474563D1 DE8484400920T DE3474563T DE3474563D1 DE 3474563 D1 DE3474563 D1 DE 3474563D1 DE 8484400920 T DE8484400920 T DE 8484400920T DE 3474563 T DE3474563 T DE 3474563T DE 3474563 D1 DE3474563 D1 DE 3474563D1
Authority
DE
Germany
Prior art keywords
cerium
making
same
polishing composition
composition based
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484400920T
Other languages
English (en)
Inventor
Pierre Melard
Francis Lotissement Les Tastu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rhodia Chimie SAS
Original Assignee
Rhone Poulenc Chimie SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rhone Poulenc Chimie SA filed Critical Rhone Poulenc Chimie SA
Application granted granted Critical
Publication of DE3474563D1 publication Critical patent/DE3474563D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
    • C03C1/002—Use of waste materials, e.g. slags
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Catalysts (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Glass Compositions (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
DE8484400920T 1983-05-13 1984-05-04 Polishing composition based on cerium, and process for making the same Expired DE3474563D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8308003A FR2545830B1 (fr) 1983-05-13 1983-05-13 Nouvelle composition de polissage a base de cerium et son procede de fabrication

Publications (1)

Publication Number Publication Date
DE3474563D1 true DE3474563D1 (en) 1988-11-17

Family

ID=9288843

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484400920T Expired DE3474563D1 (en) 1983-05-13 1984-05-04 Polishing composition based on cerium, and process for making the same

Country Status (8)

Country Link
US (1) US4786325A (de)
EP (1) EP0126675B1 (de)
JP (1) JPS6035075A (de)
AT (1) ATE37896T1 (de)
AU (1) AU571518B2 (de)
BR (1) BR8402229A (de)
DE (1) DE3474563D1 (de)
FR (1) FR2545830B1 (de)

Families Citing this family (49)

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FR2584388B1 (fr) * 1985-07-03 1991-02-15 Rhone Poulenc Spec Chim Composition a base d'oxyde cerique, sa preparation et ses utilisations
FR2604443A1 (fr) * 1986-09-26 1988-04-01 Rhone Poulenc Chimie Composition de polissage a base de cerium destinee au polissage des verres organiques
FR2617153B1 (fr) * 1987-06-26 1991-04-05 Rhone Poulenc Chimie Procede d'obtention d'un oxyde cerique et oxyde cerique a nouvelles caracteristiques morphologiques
ATE67469T1 (de) * 1987-06-29 1991-10-15 Rhone Poulenc Chimie Verfahren zur gewinnung eines ceriumoxids.
FR2617154B1 (fr) * 1987-06-29 1990-11-30 Rhone Poulenc Chimie Procede d'obtention d'oxyde cerique et oxyde cerique a nouvelles caracteristiques morphologiques
FR2624519A1 (fr) * 1987-12-09 1989-06-16 Rhone Poulenc Chimie Composition de polissage perfectionnee a base de cerium et son procede de preparation
FR2631630B1 (fr) * 1988-05-18 1990-08-31 Rhone Poulenc Chimie Abrasifs a base de terres rares
JPH0359894U (de) * 1989-08-21 1991-06-12
US5106394A (en) * 1990-10-01 1992-04-21 The United States Of America As Represented By The Secretary Of The Navy Fiber optic polishing system
US5376222A (en) * 1991-09-04 1994-12-27 Fujitsu Limited Polishing method for polycrystalline silicon
US5264010A (en) * 1992-04-27 1993-11-23 Rodel, Inc. Compositions and methods for polishing and planarizing surfaces
US5654057A (en) * 1994-12-28 1997-08-05 Hoya Corporation Sheet glass flattening method, method of manufacturing glass substrate for an information recording disk using flattened glass, method of manufacturing a magnetic recording disk using glass substrate, and magnetic recording medium
JP2746861B2 (ja) * 1995-11-20 1998-05-06 三井金属鉱業株式会社 酸化セリウム超微粒子の製造方法
US6420269B2 (en) * 1996-02-07 2002-07-16 Hitachi Chemical Company, Ltd. Cerium oxide abrasive for polishing insulating films formed on substrate and methods for using the same
US5897675A (en) * 1996-04-26 1999-04-27 Degussa Aktiengesellschaft Cerium oxide-metal/metalloid oxide mixture
US5962343A (en) * 1996-07-30 1999-10-05 Nissan Chemical Industries, Ltd. Process for producing crystalline ceric oxide particles and abrasive
US6572449B2 (en) 1998-10-06 2003-06-03 Rodel Holdings, Inc. Dewatered CMP polishing compositions and methods for using same
US6241586B1 (en) * 1998-10-06 2001-06-05 Rodel Holdings Inc. CMP polishing slurry dewatering and reconstitution
US6447375B2 (en) 2000-04-19 2002-09-10 Rodel Holdings Inc. Polishing method using a reconstituted dry particulate polishing composition
US6454821B1 (en) 2000-06-21 2002-09-24 Praxair S. T. Technology, Inc. Polishing composition and method
US7887714B2 (en) * 2000-12-25 2011-02-15 Nissan Chemical Industries, Ltd. Cerium oxide sol and abrasive
US7666239B2 (en) * 2001-11-16 2010-02-23 Ferro Corporation Hydrothermal synthesis of cerium-titanium oxide for use in CMP
WO2003044123A1 (en) * 2001-11-16 2003-05-30 Ferro Corporation Particles for use in cmp slurries and method for producing them
US6596042B1 (en) 2001-11-16 2003-07-22 Ferro Corporation Method of forming particles for use in chemical-mechanical polishing slurries and the particles formed by the process
US20060032836A1 (en) * 2001-11-16 2006-02-16 Ferro Corporation Methods of controlling the properties of abrasive particles for use in chemical-mechanical polishing slurries
JP4236857B2 (ja) * 2002-03-22 2009-03-11 三井金属鉱業株式会社 セリウム系研摩材およびその製造方法
US7025943B2 (en) * 2002-05-15 2006-04-11 The Curators Of The University Of Missouri Method for preparation of nanometer cerium-based oxide particles
JP2004222009A (ja) * 2003-01-16 2004-08-05 Nec Corp 異種網接続ゲートウェイおよび異種網間通信課金システム
CN101104791B (zh) * 2003-06-30 2010-06-16 三井金属鉱业株式会社 铈系研磨材料及其原料
US7279036B2 (en) * 2004-12-23 2007-10-09 Council Of Scientific And Industrial Research Process for preparation of inorganic colorants from mixed rare earth compounds
AT502308B1 (de) * 2005-07-20 2010-03-15 Treibacher Ind Ag Glasschleifmittel auf ceroxidbasis und verfahren zu dessen herstellung
US10435639B2 (en) 2006-09-05 2019-10-08 Cerion, Llc Fuel additive containing lattice engineered cerium dioxide nanoparticles
US8883865B2 (en) 2006-09-05 2014-11-11 Cerion Technology, Inc. Cerium-containing nanoparticles
JP2010502820A (ja) 2006-09-05 2010-01-28 セリオン テクノロジー， インコーポレーテッド 二酸化セリウムナノ粒子含有燃料添加剤
JP5237542B2 (ja) * 2006-10-03 2013-07-17 三井金属鉱業株式会社 酸化セリウム系研摩材
US8349764B2 (en) 2007-10-31 2013-01-08 Molycorp Minerals, Llc Composition for treating a fluid
KR20100121636A (ko) * 2008-02-08 2010-11-18 유미코르 조절된 형태를 갖는 도핑된 세리아 연마제 및 이의 제조 방법
KR100873945B1 (ko) * 2008-07-16 2008-12-12 (주) 뉴웰 미세 산화세륨 분말 그 제조 방법 및 이를 포함하는 씨엠피슬러리
US9222009B2 (en) * 2011-01-25 2015-12-29 Konica Minolta, Inc. Fine abrasive particles and method for producing same
CN102391833B (zh) * 2011-09-08 2013-08-07 金华冠华水晶有限公司 一种再生应用于水晶玻璃的废弃稀土抛光粉的方法
CN102643614B (zh) * 2012-04-17 2014-02-12 江苏中晶科技有限公司 玻璃抛光粉及其制备方法
CN103253694B (zh) * 2013-05-19 2014-07-16 郭尧 一种制备氧化镧铈稀土抛光粉的煅烧工艺
WO2015058037A1 (en) 2013-10-17 2015-04-23 Cerion, Llc Malic acid stabilized nanoceria particles
JP2015120844A (ja) * 2013-12-24 2015-07-02 旭硝子株式会社 研磨剤の製造方法、研磨方法および半導体集積回路装置の製造方法
TWI635905B (zh) * 2014-06-24 2018-09-21 羅地亞經營管理公司 金屬摻雜氧化鈰組合物
JP6560155B2 (ja) * 2016-04-20 2019-08-14 信越化学工業株式会社 合成石英ガラス基板用研磨剤及び合成石英ガラス基板の研磨方法
JP6694653B2 (ja) * 2017-04-10 2020-05-20 信越化学工業株式会社 合成石英ガラス基板用研磨剤及びその製造方法並びに合成石英ガラス基板の研磨方法
JP2021183655A (ja) * 2020-05-21 2021-12-02 信越化学工業株式会社 合成石英ガラス基板用の研磨剤及びその研磨剤の製造方法、及び合成石英ガラス基板の研磨方法
JPWO2024014425A1 (de) * 2022-07-12 2024-01-18

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3097083A (en) * 1959-07-02 1963-07-09 American Potash & Chem Corp Polishing composition and process of forming same
US3240580A (en) * 1961-04-03 1966-03-15 Libbey Owens Ford Glass Co Glass polishing compositions of rare earth nitrates
DE1180723B (de) * 1963-06-28 1964-11-05 Degussa Verfahren und Vorrichtung zur Herstellung von feinteiliger amorpher Kieselsaeure
US3317293A (en) * 1964-04-20 1967-05-02 Libbey Owens Ford Glass Co Rare earth chlorides in a glass polishing composition
US3768989A (en) * 1968-08-19 1973-10-30 N Goetzinger Process for the preparation of a rare earth oxide polishing composition
FI46249C (fi) * 1970-09-15 1973-02-12 Kemira Oy Menetelmä ceriumoksidin valkoisuuden parantamiseksi
FR2472601A1 (fr) * 1979-12-27 1981-07-03 Rhone Poulenc Ind Procede de fabrication de compositions de polissage a base de cerium

Also Published As

Publication number Publication date
BR8402229A (pt) 1984-12-18
EP0126675B1 (de) 1988-10-12
US4786325A (en) 1988-11-22
ATE37896T1 (de) 1988-10-15
FR2545830B1 (fr) 1986-01-03
AU571518B2 (en) 1988-04-21
EP0126675A1 (de) 1984-11-28
JPS6327389B2 (de) 1988-06-02
FR2545830A1 (fr) 1984-11-16
JPS6035075A (ja) 1985-02-22
AU2795584A (en) 1984-11-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee