Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
Einrichtung zum Abtragen von Verunrei nigungen einer auf einem Halbleiterkörper aufgebrachten metallischen Schicht im Be reich von kleinen Offnungen einer Isolier schicht durch Kathodenzerstäubung