DE3426117C2 - - Google Patents
Info
- Publication number
- DE3426117C2 DE3426117C2 DE3426117A DE3426117A DE3426117C2 DE 3426117 C2 DE3426117 C2 DE 3426117C2 DE 3426117 A DE3426117 A DE 3426117A DE 3426117 A DE3426117 A DE 3426117A DE 3426117 C2 DE3426117 C2 DE 3426117C2
- Authority
- DE
- Germany
- Prior art keywords
- magnetic
- atomic
- content
- range
- hafnium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 claims description 119
- 239000010409 thin film Substances 0.000 claims description 31
- 229910045601 alloy Inorganic materials 0.000 claims description 25
- 239000000956 alloy Substances 0.000 claims description 25
- 229910052715 tantalum Inorganic materials 0.000 claims description 16
- 229910052735 hafnium Inorganic materials 0.000 claims description 15
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 15
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 14
- 239000000696 magnetic material Substances 0.000 claims description 11
- 229910000531 Co alloy Inorganic materials 0.000 claims description 6
- 229910017052 cobalt Inorganic materials 0.000 claims description 6
- 239000010941 cobalt Substances 0.000 claims description 6
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 6
- 229910001362 Ta alloys Inorganic materials 0.000 claims description 3
- CKLJLNWQHCFSME-UHFFFAOYSA-N [Ta].[Hf].[Co] Chemical compound [Ta].[Hf].[Co] CKLJLNWQHCFSME-UHFFFAOYSA-N 0.000 claims description 2
- 229910002058 ternary alloy Inorganic materials 0.000 claims 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 10
- 239000000463 material Substances 0.000 description 7
- 230000035699 permeability Effects 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 7
- 229910002624 Hf–Ta Inorganic materials 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 230000004907 flux Effects 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 239000008188 pellet Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910001029 Hf alloy Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910001093 Zr alloy Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- GNEMDYVJKXMKCS-UHFFFAOYSA-N cobalt zirconium Chemical compound [Co].[Zr] GNEMDYVJKXMKCS-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58128715A JPS6022714A (ja) | 1983-07-16 | 1983-07-16 | 垂直磁気記録用磁気ヘツド |
| JP12872183A JPS6022722A (ja) | 1983-07-16 | 1983-07-16 | 薄膜磁気ヘツド |
| JP12872483A JPS6022727A (ja) | 1983-07-16 | 1983-07-16 | 薄膜磁気再生ヘツド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3426117A1 DE3426117A1 (de) | 1985-01-31 |
| DE3426117C2 true DE3426117C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-05-05 |
Family
ID=27315802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19843426117 Granted DE3426117A1 (de) | 1983-07-16 | 1984-07-16 | Magnetkopf |
Country Status (3)
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR940004986B1 (ko) * | 1984-08-27 | 1994-06-09 | 가부시기가이샤 히다찌세이사꾸쇼 | 자성막의 제조방법 및 그것을 사용한 자기헤드 |
| US5045637A (en) * | 1988-01-14 | 1991-09-03 | Nippon Steel Corp. | Magnetic shielding material |
| US6724027B2 (en) * | 2002-04-18 | 2004-04-20 | Hewlett-Packard Development Company, L.P. | Magnetic shielding for MRAM devices |
| CN116180025A (zh) * | 2022-12-30 | 2023-05-30 | 东莞市昱懋纳米科技有限公司 | 一种TaCo二元非晶合金薄膜及其制备方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3656229A (en) * | 1968-11-08 | 1972-04-18 | Hitachi Ltd | Process for producing magnetic head |
| US4236946A (en) * | 1978-03-13 | 1980-12-02 | International Business Machines Corporation | Amorphous magnetic thin films with highly stable easy axis |
| DE2832731A1 (de) * | 1978-07-26 | 1980-02-07 | Vacuumschmelze Gmbh | Magnetkern aus einer weichmagnetischen amorphen legierung |
| US4317148A (en) * | 1980-01-24 | 1982-02-23 | Sperry Corporation | Transducer for perpendicular magnetic recording |
| JPS57155339A (en) * | 1981-03-20 | 1982-09-25 | Matsushita Electric Ind Co Ltd | Magnetic head and production thereof |
-
1984
- 1984-05-25 KR KR1019840002876A patent/KR890003043B1/ko not_active Expired
- 1984-07-16 DE DE19843426117 patent/DE3426117A1/de active Granted
- 1984-07-16 US US06/630,900 patent/US4641213A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| KR850001595A (ko) | 1985-03-30 |
| US4641213A (en) | 1987-02-03 |
| DE3426117A1 (de) | 1985-01-31 |
| KR890003043B1 (ko) | 1989-08-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE2924013C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| EP1105878B1 (de) | Speicherzellenanordnung und verfahren zu deren herstellung | |
| DE69631077T2 (de) | Plattenspeichersystem sowie Dünnfilmmagnetkopf und Herstellungsverfahren dafür | |
| DE69728920T2 (de) | Kopf mit magnetoresistivem Effekt | |
| DE4142052C2 (de) | Magnetaufzeichnungsmedium | |
| DE2422927C2 (de) | Integrierte Anordnung magnetischer Wiedergabeelemente | |
| DE69106334T2 (de) | Mehrsicht Film mit magnetoresistiven Effekt und magnetoresitives Element. | |
| DE4140983A1 (de) | Magnetkopf in duennschichttechnik und verfahren zu dessen herstellung | |
| DE69218711T2 (de) | Magnetowiderstandseffekt-Dünnfilmmagnetkopf | |
| DE69031453T2 (de) | Magnetischer Lese-/Schreibkopf und Herstellungsverfahren eines solchen Kopfes | |
| DE19700506A1 (de) | Magnetisches Speichermedium | |
| DE69114620T2 (de) | Magnetische Kodiereinrichtung. | |
| DE19848110A1 (de) | Magnetowiderstandselement | |
| DE69428227T2 (de) | Weichmagnetischer Mehrschichtfilm für einen Magnetkopf | |
| DE3886569T2 (de) | Magnetkopf. | |
| DE3888287T2 (de) | Film-Magnetkopf. | |
| DE3120549A1 (de) | Magnetisches aufzeichnungs- und wiedergabegeraet der art mit senkrechter aufzeichnung | |
| DE2440920A1 (de) | Anordnung zur herstellung eines magnetischen aufzeichnungstraegers mit magnetischer vorzugsrichtung | |
| DE3909313C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE10022372A1 (de) | Co-Fe-Ni-Magnetfilm mit hoher magnetischer Sättigungsflußdichte, den Film verwendender Dünnfilm-Verbundmagnetkopf und den Kopf verwendende Magnetspeichervorrichtung | |
| DE69510382T2 (de) | Dualer magnetoresistiver Wiedergabekopf mit magnetischer Abschirmung und Verfahren zu seiner Herstellung | |
| DE3622241A1 (de) | Magnet-widerstandssensor | |
| DE3833901C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE3426117C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE3440386A1 (de) | Aufzeichnungstraeger fuer quermagnetisierung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8128 | New person/name/address of the agent |
Representative=s name: KLUNKER, H., DIPL.-ING. DR.RER.NAT. SCHMITT-NILSON |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |