DE3425468A1 - Verfahren zur herstellung von goldfarbenen titannitrid-schichten - Google Patents
Verfahren zur herstellung von goldfarbenen titannitrid-schichtenInfo
- Publication number
- DE3425468A1 DE3425468A1 DE19843425468 DE3425468A DE3425468A1 DE 3425468 A1 DE3425468 A1 DE 3425468A1 DE 19843425468 DE19843425468 DE 19843425468 DE 3425468 A DE3425468 A DE 3425468A DE 3425468 A1 DE3425468 A1 DE 3425468A1
- Authority
- DE
- Germany
- Prior art keywords
- gold
- titanium nitride
- nitride layers
- flow rate
- volatile
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- ZNKMCMOJCDFGFT-UHFFFAOYSA-N gold titanium Chemical compound [Ti].[Au] ZNKMCMOJCDFGFT-UHFFFAOYSA-N 0.000 title 1
- 229910001258 titanium gold Inorganic materials 0.000 title 1
- 238000000034 method Methods 0.000 claims abstract description 22
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims abstract description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 16
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 12
- 150000002344 gold compounds Chemical class 0.000 claims abstract description 10
- 239000007789 gas Substances 0.000 claims abstract description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 8
- 238000000576 coating method Methods 0.000 claims abstract description 7
- 229910052786 argon Inorganic materials 0.000 claims abstract description 6
- -1 derivatives of gold halides Chemical class 0.000 claims abstract description 5
- 239000010931 gold Substances 0.000 claims description 23
- 229910052737 gold Inorganic materials 0.000 claims description 23
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 22
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 229910052756 noble gas Inorganic materials 0.000 claims description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 2
- 125000000217 alkyl group Chemical group 0.000 claims description 2
- 125000004432 carbon atom Chemical group C* 0.000 claims description 2
- 239000000460 chlorine Substances 0.000 claims description 2
- 229910052801 chlorine Inorganic materials 0.000 claims description 2
- 238000010348 incorporation Methods 0.000 claims description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims 1
- 238000005137 deposition process Methods 0.000 claims 1
- 229910052740 iodine Inorganic materials 0.000 claims 1
- 239000011630 iodine Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 4
- 229910003771 Gold(I) chloride Inorganic materials 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- FDWREHZXQUYJFJ-UHFFFAOYSA-M gold monochloride Chemical compound [Cl-].[Au+] FDWREHZXQUYJFJ-UHFFFAOYSA-M 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- JZATUBTWKJSEKE-UHFFFAOYSA-N ClCCP(CC)CC.[Au] Chemical compound ClCCP(CC)CC.[Au] JZATUBTWKJSEKE-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- QYVRKYLTJXNDSW-UHFFFAOYSA-N [Au].C(CCC)P(CCCC)CCCC.[I] Chemical compound [Au].C(CCC)P(CCCC)CCCC.[I] QYVRKYLTJXNDSW-UHFFFAOYSA-N 0.000 description 1
- PNEHLLRFPWIGDM-UHFFFAOYSA-N [Au].ClCCCCP(CCCC)CCCC Chemical compound [Au].ClCCCCP(CCCC)CCCC PNEHLLRFPWIGDM-UHFFFAOYSA-N 0.000 description 1
- MKNZGBSDMVPEGV-UHFFFAOYSA-N [Au].ClCCCP(CCC)CCC Chemical compound [Au].ClCCCP(CCC)CCC MKNZGBSDMVPEGV-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 239000003049 inorganic solvent Substances 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000007770 physical coating process Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
-
- G—PHYSICS
- G04—HOROLOGY
- G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
- G04B37/00—Cases
- G04B37/22—Materials or processes of manufacturing pocket watch or wrist watch cases
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Catalysts (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19843425468 DE3425468A1 (de) | 1984-07-11 | 1984-07-11 | Verfahren zur herstellung von goldfarbenen titannitrid-schichten |
| PCT/EP1985/000318 WO1986000650A1 (fr) | 1984-07-11 | 1985-07-03 | Procede de preparation de couches de nitrure de titane de couleur doree |
| AT85903269T ATE39002T1 (de) | 1984-07-11 | 1985-07-03 | Verfahren zur herstellung von goldfarbenen titannitrid-schichten. |
| EP85903269A EP0201508B1 (de) | 1984-07-11 | 1985-07-03 | Verfahren zur herstellung von goldfarbenen titannitrid-schichten |
| DE8585903269T DE3566558D1 (en) | 1984-07-11 | 1985-07-03 | Method for the preparation of gold-coloured titanium nitride layers |
| ES545039A ES8605867A1 (es) | 1984-07-11 | 1985-07-10 | Procedimiento para la obtencion de capas de nitruro de tita-nio doradas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19843425468 DE3425468A1 (de) | 1984-07-11 | 1984-07-11 | Verfahren zur herstellung von goldfarbenen titannitrid-schichten |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3425468A1 true DE3425468A1 (de) | 1986-01-23 |
| DE3425468C2 DE3425468C2 (enExample) | 1988-04-14 |
Family
ID=6240324
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19843425468 Granted DE3425468A1 (de) | 1984-07-11 | 1984-07-11 | Verfahren zur herstellung von goldfarbenen titannitrid-schichten |
| DE8585903269T Expired DE3566558D1 (en) | 1984-07-11 | 1985-07-03 | Method for the preparation of gold-coloured titanium nitride layers |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE8585903269T Expired DE3566558D1 (en) | 1984-07-11 | 1985-07-03 | Method for the preparation of gold-coloured titanium nitride layers |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0201508B1 (enExample) |
| DE (2) | DE3425468A1 (enExample) |
| ES (1) | ES8605867A1 (enExample) |
| WO (1) | WO1986000650A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5510012A (en) * | 1992-02-19 | 1996-04-23 | Leybold Aktiengesellschaft | Method for producing a decorative gold alloy coating |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102274981B1 (ko) | 2013-06-26 | 2021-07-09 | 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 | 장식적 hipims 경질층 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4403014A (en) * | 1980-04-10 | 1983-09-06 | Asu Composants S.A. | Process of depositing a hard coating of a gold compound on a substrate for coating jewelry and the like |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL6507670A (enExample) * | 1964-06-30 | 1965-12-31 | ||
| US3767026A (en) * | 1971-10-29 | 1973-10-23 | Schlitz Brewing Co J | By pass mechanism for a conveyor system |
| DE3206421A1 (de) * | 1982-02-23 | 1983-09-01 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen von schichten aus hochschmelzenden metallen bzw. metallverbindungen durch abscheidung aus der dampfphase |
| JPS58153776A (ja) * | 1982-03-05 | 1983-09-12 | Citizen Watch Co Ltd | 装飾部品の製造方法およびそれに用いるイオンプレ−テイング装置 |
-
1984
- 1984-07-11 DE DE19843425468 patent/DE3425468A1/de active Granted
-
1985
- 1985-07-03 WO PCT/EP1985/000318 patent/WO1986000650A1/de not_active Ceased
- 1985-07-03 DE DE8585903269T patent/DE3566558D1/de not_active Expired
- 1985-07-03 EP EP85903269A patent/EP0201508B1/de not_active Expired
- 1985-07-10 ES ES545039A patent/ES8605867A1/es not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4403014A (en) * | 1980-04-10 | 1983-09-06 | Asu Composants S.A. | Process of depositing a hard coating of a gold compound on a substrate for coating jewelry and the like |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5510012A (en) * | 1992-02-19 | 1996-04-23 | Leybold Aktiengesellschaft | Method for producing a decorative gold alloy coating |
Also Published As
| Publication number | Publication date |
|---|---|
| ES545039A0 (es) | 1986-02-01 |
| EP0201508B1 (de) | 1988-11-30 |
| WO1986000650A1 (fr) | 1986-01-30 |
| ES8605867A1 (es) | 1986-02-01 |
| DE3566558D1 (en) | 1989-01-05 |
| DE3425468C2 (enExample) | 1988-04-14 |
| EP0201508A1 (de) | 1986-11-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |