DE3421833C2 - - Google Patents

Info

Publication number
DE3421833C2
DE3421833C2 DE3421833A DE3421833A DE3421833C2 DE 3421833 C2 DE3421833 C2 DE 3421833C2 DE 3421833 A DE3421833 A DE 3421833A DE 3421833 A DE3421833 A DE 3421833A DE 3421833 C2 DE3421833 C2 DE 3421833C2
Authority
DE
Germany
Prior art keywords
silicon dioxide
membrane according
dioxide layer
membrane
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3421833A
Other languages
German (de)
English (en)
Other versions
DE3421833A1 (de
Inventor
Wolfgang Dr. 4300 Essen De Ansorge
Wolfram Dr. 2000 Hamburg De Krieger
Peter 6200 Wiesbaden De Wiesert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Battelle Institut eV
Original Assignee
Battelle Institut eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Institut eV filed Critical Battelle Institut eV
Priority to DE19843421833 priority Critical patent/DE3421833A1/de
Publication of DE3421833A1 publication Critical patent/DE3421833A1/de
Application granted granted Critical
Publication of DE3421833C2 publication Critical patent/DE3421833C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C01B23/0036—Physical processing only
    • C01B23/0042—Physical processing only by making use of membranes
    • C01B23/0047—Physical processing only by making use of membranes characterised by the membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/228—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion characterised by specific membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0046—Inorganic membrane manufacture by slurry techniques, e.g. die or slip-casting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0213—Silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen; Reversible storage of hydrogen
    • C01B3/50—Separation of hydrogen or hydrogen-containing gases from gaseous mixtures, e.g. purification
    • C01B3/501—Separation of hydrogen or hydrogen-containing gases from gaseous mixtures, e.g. purification by diffusion
    • C01B3/503—Separation of hydrogen or hydrogen-containing gases from gaseous mixtures, e.g. purification by diffusion characterised by membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/04—Characteristic thickness
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0029—Obtaining noble gases
    • C01B2210/0031—Helium
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0068—Organic compounds
    • C01B2210/007—Hydrocarbons

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Combustion & Propulsion (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
DE19843421833 1984-06-13 1984-06-13 Membran zur abtrennung von gasen aus gasgemischen und verfahren zu ihrer herstellung Granted DE3421833A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19843421833 DE3421833A1 (de) 1984-06-13 1984-06-13 Membran zur abtrennung von gasen aus gasgemischen und verfahren zu ihrer herstellung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19843421833 DE3421833A1 (de) 1984-06-13 1984-06-13 Membran zur abtrennung von gasen aus gasgemischen und verfahren zu ihrer herstellung

Publications (2)

Publication Number Publication Date
DE3421833A1 DE3421833A1 (de) 1985-12-19
DE3421833C2 true DE3421833C2 (enExample) 1991-07-11

Family

ID=6238201

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843421833 Granted DE3421833A1 (de) 1984-06-13 1984-06-13 Membran zur abtrennung von gasen aus gasgemischen und verfahren zu ihrer herstellung

Country Status (1)

Country Link
DE (1) DE3421833A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10010387A1 (de) * 2000-02-28 2001-09-06 Mannesmann Ag Kompositmembran und Kompositmembransystem sowie Verfahren zur Herstellung der Kompositmembranen

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4902307A (en) * 1988-11-18 1990-02-20 California Institute Of Technology Synthesis of SiO2 membrane on porous support and method of use of same
US5275726A (en) * 1992-07-29 1994-01-04 Exxon Research & Engineering Co. Spiral wound element for separation
ES2056016B1 (es) * 1992-10-22 1995-03-01 Consejo Superior Investigacion Membranas microporosas de silice, su utilizacion y fabricacion.
FR2800725B1 (fr) * 1999-11-08 2001-12-28 Air Liquide Procede et installation pour la production d'hydrogene pur a partir d'un gaz contenant de l'helium
EP1167284A3 (en) * 2000-06-27 2004-06-16 Nisshin Steel Co., Ltd. Device for recovery of hydrogen
US6432308B1 (en) * 2000-09-25 2002-08-13 Graver Technologies, Inc. Filter element with porous nickel-based alloy substrate and metal oxide membrane
JP2013075264A (ja) * 2011-09-30 2013-04-25 Fujifilm Corp ガス分離膜、その製造方法、それを用いたガス分離膜モジュール
US9623370B2 (en) 2015-02-10 2017-04-18 Praxair Technology, Inc. Integrated process and apparatus for recovery of helium rich streams

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3220037A1 (de) * 1982-05-27 1983-12-01 Sumitomo Electric Industries, Ltd., Osaka Selektiv gasdurchlaessige verbundmembranen und verfahren zu ihrer herstellung
DE3420373C2 (de) * 1984-06-01 1986-09-18 Gkss - Forschungszentrum Geesthacht Gmbh, 2054 Geesthacht Verfahren zur Herstellung einer integralasymmetrischen Membran zur Trennung von Gasen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10010387A1 (de) * 2000-02-28 2001-09-06 Mannesmann Ag Kompositmembran und Kompositmembransystem sowie Verfahren zur Herstellung der Kompositmembranen

Also Published As

Publication number Publication date
DE3421833A1 (de) 1985-12-19

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee