DE3380384D1 - Cmos device - Google Patents
Cmos deviceInfo
- Publication number
- DE3380384D1 DE3380384D1 DE8383301735T DE3380384T DE3380384D1 DE 3380384 D1 DE3380384 D1 DE 3380384D1 DE 8383301735 T DE8383301735 T DE 8383301735T DE 3380384 T DE3380384 T DE 3380384T DE 3380384 D1 DE3380384 D1 DE 3380384D1
- Authority
- DE
- Germany
- Prior art keywords
- cmos device
- cmos
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
- H01L21/2652—Through-implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823878—Complementary field-effect transistors, e.g. CMOS isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
- H01L27/0927—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors comprising a P-well only in the substrate
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57053072A JPS58170047A (ja) | 1982-03-31 | 1982-03-31 | 半導体装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3380384D1 true DE3380384D1 (en) | 1989-09-14 |
Family
ID=12932605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8383301735T Expired DE3380384D1 (en) | 1982-03-31 | 1983-03-28 | Cmos device |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0091256B1 (de) |
JP (1) | JPS58170047A (de) |
DE (1) | DE3380384D1 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4697332A (en) * | 1984-05-25 | 1987-10-06 | Gould Inc. | Method of making tri-well CMOS by self-aligned process |
WO1985005736A1 (en) * | 1984-05-25 | 1985-12-19 | American Microsystems, Inc. | Tri-well cmos technology |
JPS61111576A (ja) * | 1984-10-13 | 1986-05-29 | Fujitsu Ltd | 半導体装置 |
JPS63136661A (ja) * | 1986-11-28 | 1988-06-08 | Sony Corp | 半導体装置の製造方法 |
US5055903A (en) * | 1989-06-22 | 1991-10-08 | Siemens Aktiengesellschaft | Circuit for reducing the latch-up sensitivity of a cmos circuit |
US6406955B1 (en) | 1994-05-17 | 2002-06-18 | Samsung Electronics Co., Ltd | Method for manufacturing CMOS devices having transistors with mutually different punch-through voltage characteristics |
KR0144959B1 (ko) * | 1994-05-17 | 1998-07-01 | 김광호 | 반도체장치 및 제조방법 |
EP0730305A1 (de) * | 1995-02-28 | 1996-09-04 | STMicroelectronics S.r.l. | Hochspannungs-N-Kanal-MOSFET in CMOS-Typ-Technologie und Herstellungsverfahren |
JP3528350B2 (ja) * | 1995-08-25 | 2004-05-17 | ソニー株式会社 | 半導体装置の製造方法 |
JP3472476B2 (ja) * | 1998-04-17 | 2003-12-02 | 松下電器産業株式会社 | 半導体装置及びその駆動方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5513967A (en) * | 1978-07-17 | 1980-01-31 | Nec Corp | Semiconductor integrated circuit device |
JPS5787161A (en) * | 1980-11-20 | 1982-05-31 | Seiko Epson Corp | Mos integrated circuit |
-
1982
- 1982-03-31 JP JP57053072A patent/JPS58170047A/ja active Pending
-
1983
- 1983-03-28 DE DE8383301735T patent/DE3380384D1/de not_active Expired
- 1983-03-28 EP EP83301735A patent/EP0091256B1/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS58170047A (ja) | 1983-10-06 |
EP0091256B1 (de) | 1989-08-09 |
EP0091256A2 (de) | 1983-10-12 |
EP0091256A3 (en) | 1985-09-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |