DE3377037D1 - Cylindrical cathode for magnetically-enhanced sputtering - Google Patents

Cylindrical cathode for magnetically-enhanced sputtering

Info

Publication number
DE3377037D1
DE3377037D1 DE8383810239T DE3377037T DE3377037D1 DE 3377037 D1 DE3377037 D1 DE 3377037D1 DE 8383810239 T DE8383810239 T DE 8383810239T DE 3377037 T DE3377037 T DE 3377037T DE 3377037 D1 DE3377037 D1 DE 3377037D1
Authority
DE
Germany
Prior art keywords
target
magnetically
conductor
generated
electric current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383810239T
Other languages
English (en)
Inventor
Bogdan Zega
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Battelle Development Corp
Original Assignee
Battelle Development Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23534299&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3377037(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Battelle Development Corp filed Critical Battelle Development Corp
Application granted granted Critical
Publication of DE3377037D1 publication Critical patent/DE3377037D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE8383810239T 1982-06-14 1983-06-06 Cylindrical cathode for magnetically-enhanced sputtering Expired DE3377037D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/388,482 US4376025A (en) 1982-06-14 1982-06-14 Cylindrical cathode for magnetically-enhanced sputtering

Publications (1)

Publication Number Publication Date
DE3377037D1 true DE3377037D1 (en) 1988-07-14

Family

ID=23534299

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383810239T Expired DE3377037D1 (en) 1982-06-14 1983-06-06 Cylindrical cathode for magnetically-enhanced sputtering

Country Status (6)

Country Link
US (1) US4376025A (de)
EP (1) EP0097117B1 (de)
JP (1) JPS596375A (de)
AT (1) ATE35066T1 (de)
CA (1) CA1181362A (de)
DE (1) DE3377037D1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4500408A (en) * 1983-07-19 1985-02-19 Varian Associates, Inc. Apparatus for and method of controlling sputter coating
US4445997A (en) * 1983-08-17 1984-05-01 Shatterproof Glass Corporation Rotatable sputtering apparatus
US4443318A (en) * 1983-08-17 1984-04-17 Shatterproof Glass Corporation Cathodic sputtering apparatus
NL8602759A (nl) * 1986-10-31 1988-05-16 Bekaert Sa Nv Werkwijze en inrichting voor het behandelen van een langwerpig substraat, dat van een deklaag voorzien is; alsmede volgens die werkwijze behandelde substraten en met deze substraten versterkte voorwerpen uit polymeermateriaal.
US5219668A (en) * 1986-10-31 1993-06-15 N.V. Bekaert S.A. Process and apparatus for the treatment of coated, elongated substrate, as well as substrates thus treated and articles of polymeric material reinforced with these substrates
JPH06508001A (ja) * 1991-04-19 1994-09-08 サーフィス　ソリューションズ　インコーポレーテッド 線形磁電管スパッタリング方法及び装置
US5685961A (en) * 1992-03-27 1997-11-11 P & D Medical Coatings, Inc. Method for fabrication of metallized medical devices
US5922176A (en) * 1992-06-12 1999-07-13 Donnelly Corporation Spark eliminating sputtering target and method for using and making same
US5272735A (en) * 1992-08-03 1993-12-21 Combustion Engineering, Inc. Sputtering process burnable poison coating
EP0665304B1 (de) * 1994-01-31 1997-08-13 Nissin Electric Company, Limited Verfahren zur Herstellung einer Röhre mit einem Filmbelag auf der inneren peripheren Oberfläche und Vorrichtung zu seiner Herstellung
AU2379295A (en) * 1994-03-28 1995-10-17 Surface Solutions, Inc. Method and apparatus for coating inside surface of nuclear fuel rod cladding tubes
US5591313A (en) * 1995-06-30 1997-01-07 Tabco Technologies, Inc. Apparatus and method for localized ion sputtering
DE19652633A1 (de) * 1996-09-13 1998-03-19 Euromat Gmbh Verfahren und Vorrichtung zum Innenbeschichten metallischer Bauteile
US6193853B1 (en) 1999-02-25 2001-02-27 Cametoid Limited Magnetron sputtering method and apparatus
US6352626B1 (en) 1999-04-19 2002-03-05 Von Zweck Heimart Sputter ion source for boron and other targets
US6436252B1 (en) 2000-04-07 2002-08-20 Surface Engineered Products Corp. Method and apparatus for magnetron sputtering
US7351480B2 (en) * 2002-06-11 2008-04-01 Southwest Research Institute Tubular structures with coated interior surfaces
US7790003B2 (en) * 2004-10-12 2010-09-07 Southwest Research Institute Method for magnetron sputter deposition
US20060076231A1 (en) * 2004-10-12 2006-04-13 Southwest Research Institute Method for magnetron sputter deposition
US7520965B2 (en) * 2004-10-12 2009-04-21 Southwest Research Institute Magnetron sputtering apparatus and method for depositing a coating using same
US7592051B2 (en) * 2005-02-09 2009-09-22 Southwest Research Institute Nanostructured low-Cr Cu-Cr coatings for high temperature oxidation resistance
US20060207871A1 (en) * 2005-03-16 2006-09-21 Gennady Yumshtyk Sputtering devices and methods
US8940140B2 (en) * 2007-09-05 2015-01-27 Uchicago Argonne, Llc Thin film application device and method for coating small aperture vacuum vessels
US9368330B2 (en) 2014-05-02 2016-06-14 Bh5773 Ltd Sputtering targets and methods
KR102037065B1 (ko) 2015-08-21 2019-10-28 한국과학기술연구원 금속관의 내벽 코팅 장치 및 방법

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4031424A (en) * 1971-09-07 1977-06-21 Telic Corporation Electrode type glow discharge apparatus
US3995187A (en) * 1971-09-07 1976-11-30 Telic Corporation Electrode type glow discharge apparatus
US4030996A (en) * 1971-09-07 1977-06-21 Telic Corporation Electrode type glow discharge method and apparatus
US3884793A (en) * 1971-09-07 1975-05-20 Telic Corp Electrode type glow discharge apparatus
US3838031A (en) * 1972-09-15 1974-09-24 A Snaper Means and method for depositing recrystallized ferroelectric material
US3919678A (en) * 1974-04-01 1975-11-11 Telic Corp Magnetic field generation apparatus
JPS51117933A (en) * 1975-04-10 1976-10-16 Tokuda Seisakusho Spattering apparatus
US4179351A (en) * 1976-09-09 1979-12-18 Hewlett-Packard Company Cylindrical magnetron sputtering source
US4198283A (en) * 1978-11-06 1980-04-15 Materials Research Corporation Magnetron sputtering target and cathode assembly
EP0045822B1 (de) * 1980-08-08 1985-05-29 Battelle Development Corporation Zylindrische Magnetron-Zerstäuberkathode
US4290877A (en) * 1980-09-08 1981-09-22 The United States Of America As Represented By The Secretary Of The Interior Sputtering apparatus for coating elongated tubes and strips

Also Published As

Publication number Publication date
JPH0369992B2 (de) 1991-11-06
ATE35066T1 (de) 1988-06-15
US4376025A (en) 1983-03-08
EP0097117B1 (de) 1988-06-08
EP0097117A3 (en) 1985-08-14
CA1181362A (en) 1985-01-22
EP0097117A2 (de) 1983-12-28
JPS596375A (ja) 1984-01-13

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation