DE3368982D1 - Device for monitoring the thickness of thin, hardly absorbing films - Google Patents

Device for monitoring the thickness of thin, hardly absorbing films

Info

Publication number
DE3368982D1
DE3368982D1 DE8383107845T DE3368982T DE3368982D1 DE 3368982 D1 DE3368982 D1 DE 3368982D1 DE 8383107845 T DE8383107845 T DE 8383107845T DE 3368982 T DE3368982 T DE 3368982T DE 3368982 D1 DE3368982 D1 DE 3368982D1
Authority
DE
Germany
Prior art keywords
electrical signal
directed
thickness
supplying
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383107845T
Other languages
English (en)
Inventor
Jean Canteloup
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9276824&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3368982(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Application granted granted Critical
Publication of DE3368982D1 publication Critical patent/DE3368982D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0683—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating measurement during deposition or removal of the layer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Drying Of Semiconductors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
DE8383107845T 1982-08-12 1983-08-09 Device for monitoring the thickness of thin, hardly absorbing films Expired DE3368982D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8214034A FR2531774A1 (fr) 1982-08-12 1982-08-12 Dispositif de controle d'epaisseur de couches minces faiblement absorbantes

Publications (1)

Publication Number Publication Date
DE3368982D1 true DE3368982D1 (en) 1987-02-12

Family

ID=9276824

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383107845T Expired DE3368982D1 (en) 1982-08-12 1983-08-09 Device for monitoring the thickness of thin, hardly absorbing films

Country Status (5)

Country Link
EP (1) EP0101049B1 (de)
JP (1) JPS5948928A (de)
AT (1) ATE24761T1 (de)
DE (1) DE3368982D1 (de)
FR (1) FR2531774A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6168506A (ja) * 1984-09-12 1986-04-08 Tokyo Denshi Kagaku Kabushiki エツチング深さ測定装置
DE3578582D1 (de) * 1985-12-24 1990-08-09 Barco Automation Nv Verfahren zum messen einer physikalischen groesse mit numerischen daten unter verwendung einer analogen messvorrichtung und messapparat fuer dieses verfahren.
CA1302803C (en) * 1986-02-15 1992-06-09 Hiroji Kawai Method and apparatus for vapor deposition
US5200021A (en) * 1986-02-15 1993-04-06 Sony Corporation Method and apparatus for vapor deposition
JPH0751478B2 (ja) * 1989-11-24 1995-06-05 新技術事業団 化合物結晶のエピタキシャル成長方法
WO1997037379A1 (en) * 1996-04-03 1997-10-09 Advanced Micro Devices, Inc. In-situ sensor for the measurement of deposition on etching chamber walls

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5255864A (en) * 1975-11-04 1977-05-07 Toshiba Corp Dry etching device
GB2029017B (en) * 1978-08-18 1982-10-13 Holland L Control of deposition of thin films
US4208240A (en) * 1979-01-26 1980-06-17 Gould Inc. Method and apparatus for controlling plasma etching
JPS55157233A (en) * 1979-05-28 1980-12-06 Hitachi Ltd Method and apparatus for monitoring etching
JPS6058793B2 (ja) * 1980-03-24 1985-12-21 日電アネルバ株式会社 プラズマ分光監視装置
US4367044A (en) * 1980-12-31 1983-01-04 International Business Machines Corp. Situ rate and depth monitor for silicon etching

Also Published As

Publication number Publication date
FR2531774B1 (de) 1985-01-25
ATE24761T1 (de) 1987-01-15
JPS5948928A (ja) 1984-03-21
EP0101049B1 (de) 1987-01-07
FR2531774A1 (fr) 1984-02-17
EP0101049A1 (de) 1984-02-22

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation