DE3364873D1 - Process for manufacturing boron-doped gallium arsenide single crystal - Google Patents

Process for manufacturing boron-doped gallium arsenide single crystal

Info

Publication number
DE3364873D1
DE3364873D1 DE8383302165T DE3364873T DE3364873D1 DE 3364873 D1 DE3364873 D1 DE 3364873D1 DE 8383302165 T DE8383302165 T DE 8383302165T DE 3364873 T DE3364873 T DE 3364873T DE 3364873 D1 DE3364873 D1 DE 3364873D1
Authority
DE
Germany
Prior art keywords
single crystal
gallium arsenide
doped gallium
arsenide single
manufacturing boron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383302165T
Other languages
German (de)
English (en)
Inventor
Shintaro Miyazawa
Kohji C O Osaka Works Tada
Yasushi Nanishi
Akihisa C O Osaka Wor Kawasaki
Toshihiro C O Osaka Wor Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Sumitomo Electric Industries Ltd
Original Assignee
Nippon Telegraph and Telephone Corp
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Sumitomo Electric Industries Ltd filed Critical Nippon Telegraph and Telephone Corp
Application granted granted Critical
Publication of DE3364873D1 publication Critical patent/DE3364873D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B27/00—Single-crystal growth under a protective fluid
    • C30B27/02—Single-crystal growth under a protective fluid by pulling from a melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/42—Gallium arsenide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DE8383302165T 1982-04-16 1983-04-18 Process for manufacturing boron-doped gallium arsenide single crystal Expired DE3364873D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57064508A JPS58181799A (ja) 1982-04-16 1982-04-16 硼素を添加したＧａＡｓ単結晶の製造方法

Publications (1)

Publication Number Publication Date
DE3364873D1 true DE3364873D1 (en) 1986-09-04

Family

ID=13260205

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383302165T Expired DE3364873D1 (en) 1982-04-16 1983-04-18 Process for manufacturing boron-doped gallium arsenide single crystal

Country Status (5)

Country Link
US (1) US4528061A (ja)
EP (1) EP0092409B1 (ja)
JP (1) JPS58181799A (ja)
CA (1) CA1212599A (ja)
DE (1) DE3364873D1 (ja)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59232995A (ja) * 1983-06-10 1984-12-27 Sumitomo Electric Ind Ltd 引上単結晶の冷却方法
CA1214381A (en) * 1983-07-20 1986-11-25 Roelof P. Bult Method of growing gallium arsenide crystals using boron oxide encapsulant
US4585511A (en) * 1983-07-22 1986-04-29 Cominco Ltd. Method of growing gallium arsenide crystals using boron oxide encapsulant
US4697202A (en) * 1984-02-02 1987-09-29 Sri International Integrated circuit having dislocation free substrate
JP2529934B2 (ja) * 1984-02-21 1996-09-04 住友電気工業株式会社 単結晶の製造方法
JPS61222911A (ja) * 1985-03-28 1986-10-03 Toshiba Corp 燐化化合物の合成方法
JPS6270291A (ja) * 1985-09-19 1987-03-31 Toshiba Corp ＧａＡｓ単結晶の製造方法及び装置
US4721539A (en) * 1986-07-15 1988-01-26 The United States Of America As Represented By The United States Department Of Energy Large single crystal quaternary alloys of IB-IIIA-SE2 and methods of synthesizing the same
KR880009419A (ko) * 1987-01-26 1988-09-15 이찌하라 시로 반도체소자의 제조방법 및 그 방법에 의해 제조된 반도체 소자
US4923561A (en) * 1988-09-23 1990-05-08 American Telephone And Telegraph Company Crystal growth method
US5186784A (en) * 1989-06-20 1993-02-16 Texas Instruments Incorporated Process for improved doping of semiconductor crystals
US5431125A (en) * 1991-06-14 1995-07-11 The United States Of America As Represented By The Secretary Of The Air Force Twin-free crystal growth of III-V semiconductor material
JP3015656B2 (ja) * 1994-03-23 2000-03-06 株式会社東芝 半絶縁性ＧａＡｓ単結晶の製造方法および製造装置
JP4135239B2 (ja) * 1997-12-26 2008-08-20 住友電気工業株式会社 半導体結晶およびその製造方法ならびに製造装置
WO2006019098A1 (ja) * 2004-08-20 2006-02-23 Mitsubishi Chemical Corporation 金属窒化物および金属窒化物の製造方法
JP2013026540A (ja) * 2011-07-25 2013-02-04 Renesas Electronics Corp 半導体集積回路装置
CN104900758B (zh) * 2015-05-25 2017-03-15 连云港市产品质量监督检验中心 一种准单晶硅片微缺陷的检测方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2133875A1 (de) * 1971-07-07 1973-01-18 Siemens Ag Verfahren zum ziehen von einkristallen, insbesondere fuer keimkristalle
JPS6028800B2 (ja) * 1977-10-17 1985-07-06 住友電気工業株式会社 低欠陥密度りん化ガリウム単結晶
US4200621A (en) * 1978-07-18 1980-04-29 Motorola, Inc. Sequential purification and crystal growth

Also Published As

Publication number Publication date
EP0092409A1 (en) 1983-10-26
CA1212599A (en) 1986-10-14
JPS6129919B2 (ja) 1986-07-10
JPS58181799A (ja) 1983-10-24
EP0092409B1 (en) 1986-07-30
US4528061A (en) 1985-07-09

Similar Documents

Publication Publication Date Title
PT79287A (en) Process for preparing carboxyalkenamidocephalosporins
DE3277154D1 (en) Method for producing single crystal semiconductor areas
HUT34758A (en) Process for preparing n-/phosphone-methyl/-glycine
RO87533B (ro) Procedeu pentru prepararea unor n-(biciclicheterociclil)-4-piperidinamine
DE3364873D1 (en) Process for manufacturing boron-doped gallium arsenide single crystal
GB2132680B (en) Clasp for ornaments
DE3472249D1 (en) Process for preparing di-amino-polyalkenyl-ethers
GB8408563D0 (en) Iii-v group compound semiconductor crystal
GB2140929B (en) Process for making semiconductors devices
GB2162369B (en) Apparatus for forming semiconductor crystal
GB2136310B (en) Apparatus for manufacturing semiconductor single crystal
PT79519A (en) Process for preparing protease inhibitors based on egline compounds
DE3364653D1 (en) Method for producing crystals
PT78292B (en) Process for preparing benzoquinolizines
DE3470993D1 (en) Process for preparing single crystal
EP0148396A3 (en) Apparatus for producing gallium arsenide single crystal and gallium arsenide single crystal produced by said apparatus
DE3260469D1 (en) Method for manufacturing gallium phosphide single crystals
PL243972A1 (en) Process for preparing l-phenylalanine
IL73242A0 (en) Process for transforming seeds
PT78734B (en) Process for preparing thiazolo-and thiazinobenzimidazoles
DE3469524D1 (en) Process for preparing 2-alkyl-4-amino-5-aminomethylpyrimidine
HU35634A (en) Process for preparing cyanohydrines
IL72092A0 (en) Process for preparing 3-substituted-3-aminonitrile
DE3470316D1 (en) Process for preparing 6-fluorine-steroids
ZA843320B (en) Process for preparing aminoalkylureas

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee