DE3345189C2 - - Google Patents
Info
- Publication number
- DE3345189C2 DE3345189C2 DE3345189A DE3345189A DE3345189C2 DE 3345189 C2 DE3345189 C2 DE 3345189C2 DE 3345189 A DE3345189 A DE 3345189A DE 3345189 A DE3345189 A DE 3345189A DE 3345189 C2 DE3345189 C2 DE 3345189C2
- Authority
- DE
- Germany
- Prior art keywords
- gate
- region
- area
- source
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 description 9
- 238000005036 potential barrier Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 230000003321 amplification Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/202—FETs having static field-induced regions, e.g. static-induction transistors [SIT] or permeable base transistors [PBT]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/28—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices being characterised by field-effect operation, e.g. junction field-effect phototransistors
- H10F30/282—Insulated-gate field-effect transistors [IGFET], e.g. MISFET [metal-insulator-semiconductor field-effect transistor] phototransistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/28—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices being characterised by field-effect operation, e.g. junction field-effect phototransistors
- H10F30/285—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices being characterised by field-effect operation, e.g. junction field-effect phototransistors the devices having PN homojunction gates
- H10F30/2863—Field-effect phototransistors having PN homojunction gates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/196—Junction field effect transistor [JFET] image sensors; Static induction transistor [SIT] image sensors
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57217755A JPS59108461A (ja) | 1982-12-14 | 1982-12-14 | 固体撮像装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3345189A1 DE3345189A1 (de) | 1984-06-14 |
DE3345189C2 true DE3345189C2 (en, 2012) | 1989-05-18 |
Family
ID=16709234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19833345189 Granted DE3345189A1 (de) | 1982-12-14 | 1983-12-14 | Festkoerper-bildaufnahmewandler |
Country Status (3)
Country | Link |
---|---|
US (1) | US4686555A (en, 2012) |
JP (1) | JPS59108461A (en, 2012) |
DE (1) | DE3345189A1 (en, 2012) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0666446B2 (ja) * | 1984-03-29 | 1994-08-24 | オリンパス光学工業株式会社 | 固体撮像素子 |
EP0167810A1 (en) * | 1984-06-08 | 1986-01-15 | Eaton Corporation | Power JFET with plural lateral pinching |
US4635084A (en) * | 1984-06-08 | 1987-01-06 | Eaton Corporation | Split row power JFET |
US4633281A (en) * | 1984-06-08 | 1986-12-30 | Eaton Corporation | Dual stack power JFET with buried field shaping depletion regions |
US4670764A (en) * | 1984-06-08 | 1987-06-02 | Eaton Corporation | Multi-channel power JFET with buried field shaping regions |
JPS61136388A (ja) * | 1984-11-21 | 1986-06-24 | Olympus Optical Co Ltd | 固体撮像装置 |
GB2170675B (en) * | 1984-12-28 | 1989-12-13 | Canon Kk | Image sensing apparatus |
JPS6312161A (ja) * | 1986-07-03 | 1988-01-19 | Olympus Optical Co Ltd | 半導体撮像装置 |
EP0296371B1 (de) * | 1987-06-22 | 1992-12-23 | Landis & Gyr Business Support AG | Photodetektor für Ultraviolett und Verfahren zur Herstellung |
JPS6442992A (en) * | 1987-08-08 | 1989-02-15 | Olympus Optical Co | Solid-state image pickup device |
US5331164A (en) * | 1991-03-19 | 1994-07-19 | California Institute Of Technology | Particle sensor array |
JP2713205B2 (ja) * | 1995-02-21 | 1998-02-16 | 日本電気株式会社 | 半導体装置 |
US5828101A (en) * | 1995-03-30 | 1998-10-27 | Kabushiki Kaisha Toshiba | Three-terminal semiconductor device and related semiconductor devices |
US7005637B2 (en) * | 2003-01-31 | 2006-02-28 | Intevac, Inc. | Backside thinning of image array devices |
US7042060B2 (en) * | 2003-01-31 | 2006-05-09 | Intevac, Inc. | Backside thinning of image array devices |
US20040169248A1 (en) * | 2003-01-31 | 2004-09-02 | Intevac, Inc. | Backside thinning of image array devices |
EP1652237B1 (en) * | 2003-01-31 | 2011-06-01 | Intevac, Inc. | Backside thinning of image array devices |
US20080099797A1 (en) * | 2006-10-31 | 2008-05-01 | Douglas Kerns | Method and device for sensing radiation |
JP6227010B2 (ja) * | 2013-12-25 | 2017-11-08 | キヤノン株式会社 | 撮像装置、撮像システム、および、撮像装置の製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5515229A (en) * | 1978-07-18 | 1980-02-02 | Semiconductor Res Found | Semiconductor photograph device |
JPS55124259A (en) * | 1979-03-19 | 1980-09-25 | Semiconductor Res Found | Semiconductor device |
JPS5689174A (en) * | 1979-12-21 | 1981-07-20 | Toshiba Corp | Solid image pickup device |
-
1982
- 1982-12-14 JP JP57217755A patent/JPS59108461A/ja active Granted
-
1983
- 1983-11-30 US US06/556,347 patent/US4686555A/en not_active Expired - Lifetime
- 1983-12-14 DE DE19833345189 patent/DE3345189A1/de active Granted
Also Published As
Publication number | Publication date |
---|---|
US4686555A (en) | 1987-08-11 |
DE3345189A1 (de) | 1984-06-14 |
JPS59108461A (ja) | 1984-06-22 |
JPH0370436B2 (en, 2012) | 1991-11-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition |