DE3323426A1 - Mit elastischen oberflaechenwellen arbeitender beschleunigungsmesser - Google Patents
Mit elastischen oberflaechenwellen arbeitender beschleunigungsmesserInfo
- Publication number
- DE3323426A1 DE3323426A1 DE19833323426 DE3323426A DE3323426A1 DE 3323426 A1 DE3323426 A1 DE 3323426A1 DE 19833323426 DE19833323426 DE 19833323426 DE 3323426 A DE3323426 A DE 3323426A DE 3323426 A1 DE3323426 A1 DE 3323426A1
- Authority
- DE
- Germany
- Prior art keywords
- accelerometer according
- accelerometer
- surface waves
- deformable structure
- elastic surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 230000001133 acceleration Effects 0.000 claims description 18
- 238000005452 bending Methods 0.000 claims description 17
- 230000035945 sensitivity Effects 0.000 claims description 10
- 238000004873 anchoring Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 5
- 238000013016 damping Methods 0.000 claims description 4
- 230000035882 stress Effects 0.000 description 22
- 230000010355 oscillation Effects 0.000 description 9
- 241000446313 Lamella Species 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000008901 benefit Effects 0.000 description 5
- 230000005520 electrodynamics Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 210000001520 comb Anatomy 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
- G01P15/0975—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements by acoustic surface wave resonators or delay lines
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Geophysics And Detection Of Objects (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Electrophonic Musical Instruments (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8211657A FR2529681A1 (fr) | 1982-07-02 | 1982-07-02 | Accelerometre a ondes elastiques de surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE3323426A1 true DE3323426A1 (de) | 1984-01-05 |
Family
ID=9275636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19833323426 Ceased DE3323426A1 (de) | 1982-07-02 | 1983-06-29 | Mit elastischen oberflaechenwellen arbeitender beschleunigungsmesser |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4515016A (enExample) |
| JP (1) | JPS5923258A (enExample) |
| DE (1) | DE3323426A1 (enExample) |
| FR (1) | FR2529681A1 (enExample) |
| GB (1) | GB2123953B (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2546303B1 (fr) * | 1983-05-20 | 1985-07-05 | Thomson Csf | Capteur de forces a ondes elastiques de surface |
| GB2144546B (en) * | 1983-08-04 | 1987-05-28 | Standard Telephones Cables Ltd | Surface acoustic wave accelerometer |
| FR2558955B1 (fr) * | 1984-01-27 | 1986-05-02 | Thomson Csf | Capteur de forces vectoriel a ondes elastiques de surface |
| US4676104A (en) * | 1985-08-06 | 1987-06-30 | United Technologies Corporation | Surface skimming bulk acoustic wave accelerometer |
| US4803883A (en) * | 1987-11-09 | 1989-02-14 | Rockwell International Corporation | Accelerometer |
| FR2682766B1 (fr) * | 1991-10-21 | 1995-07-13 | Asulab Sa | Capteur de mesure d'une grandeur physique. |
| RU2139546C1 (ru) * | 1998-01-12 | 1999-10-10 | Военный инженерно-космический университет им.А.Ф.Можайского | Акселерометр с преобразователями на поверхностной акустической волне |
| DE10221420A1 (de) * | 2002-05-14 | 2003-12-11 | Enocean Gmbh | Vorrichtung zur Umwandlung mechanischer Energie in elektrische Energie |
| JP4213540B2 (ja) * | 2003-08-20 | 2009-01-21 | 株式会社日立製作所 | 振動発電用振動子 |
| RU2290647C1 (ru) * | 2005-04-25 | 2006-12-27 | Российская Федерация, от имени которой выступает государственный заказчик - Федеральное агентство по атомной энергии (Росатом) | Узел крепления датчика ускорения к объекту и устройство для приклеивания датчика ускорения к узлу крепления |
| JP4345984B2 (ja) * | 2005-11-11 | 2009-10-14 | Ｎｅｃトーキン株式会社 | 振動検知方法、振動検知システム、バッテリレス振動センサ及び質問器 |
| JP5424379B2 (ja) * | 2007-11-30 | 2014-02-26 | セイコーインスツル株式会社 | 振動電流変換装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2757577B2 (de) * | 1977-12-23 | 1981-05-27 | Gould Inc., Cleveland, Ohio | Kraftmeßfühler mit einem einseitig eingespannten Körper mit piezoelektrischer Oberflächenwellenerzeugung |
| US4301683A (en) * | 1978-11-30 | 1981-11-24 | Thomson-Csf | Elastic surface wave accelerometer |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3233465A (en) * | 1962-07-16 | 1966-02-08 | Cons Electrodynamics Corp | Accelerometer |
| US3304773A (en) * | 1964-03-26 | 1967-02-21 | Vernon L Rogallo | Force transducer |
| US3848144A (en) * | 1973-04-11 | 1974-11-12 | Sperry Rand Corp | Acoustic delay surface wave motion transducer systems |
| DE2618759C3 (de) * | 1976-04-28 | 1979-05-23 | Meisei Electric Co., Ltd. | Beschleunigungsmesser |
| FR2396306A1 (fr) * | 1977-07-01 | 1979-01-26 | Thomson Csf | Accelerometre a ondes elastiques de surface |
| US4186324A (en) * | 1978-05-11 | 1980-01-29 | Schaevitz Engineering | Linear accelerometer with piezoelectric suspension |
-
1982
- 1982-07-02 FR FR8211657A patent/FR2529681A1/fr active Granted
-
1983
- 1983-06-17 US US06/505,174 patent/US4515016A/en not_active Expired - Fee Related
- 1983-06-29 DE DE19833323426 patent/DE3323426A1/de not_active Ceased
- 1983-06-30 GB GB08317811A patent/GB2123953B/en not_active Expired
- 1983-07-01 JP JP58118373A patent/JPS5923258A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2757577B2 (de) * | 1977-12-23 | 1981-05-27 | Gould Inc., Cleveland, Ohio | Kraftmeßfühler mit einem einseitig eingespannten Körper mit piezoelektrischer Oberflächenwellenerzeugung |
| US4301683A (en) * | 1978-11-30 | 1981-11-24 | Thomson-Csf | Elastic surface wave accelerometer |
Also Published As
| Publication number | Publication date |
|---|---|
| GB8317811D0 (en) | 1983-08-03 |
| JPS5923258A (ja) | 1984-02-06 |
| GB2123953A (en) | 1984-02-08 |
| US4515016A (en) | 1985-05-07 |
| FR2529681A1 (fr) | 1984-01-06 |
| FR2529681B1 (enExample) | 1984-12-14 |
| GB2123953B (en) | 1985-12-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8131 | Rejection |