DE3322481A1 - Duennschicht-gassensor zum nachweis und zur messung von gasfoermigen kohlenwasserstoff-verunreinigungen mit doppel- und dreifachbindungen, insbesondere von acetylen, in luft sowie ein verfahren zu seiner herstellung - Google Patents
Duennschicht-gassensor zum nachweis und zur messung von gasfoermigen kohlenwasserstoff-verunreinigungen mit doppel- und dreifachbindungen, insbesondere von acetylen, in luft sowie ein verfahren zu seiner herstellungInfo
- Publication number
- DE3322481A1 DE3322481A1 DE19833322481 DE3322481A DE3322481A1 DE 3322481 A1 DE3322481 A1 DE 3322481A1 DE 19833322481 DE19833322481 DE 19833322481 DE 3322481 A DE3322481 A DE 3322481A DE 3322481 A1 DE3322481 A1 DE 3322481A1
- Authority
- DE
- Germany
- Prior art keywords
- gas sensor
- thin
- tungsten oxide
- substrate
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- HSFWRNGVRCDJHI-UHFFFAOYSA-N Acetylene Chemical compound C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 title claims abstract description 14
- 238000000034 method Methods 0.000 title claims abstract description 10
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000012535 impurity Substances 0.000 title claims description 5
- 239000001257 hydrogen Substances 0.000 title description 4
- 229910052739 hydrogen Inorganic materials 0.000 title description 4
- -1 CARBON HYDROGEN Chemical class 0.000 title description 2
- 229910052799 carbon Inorganic materials 0.000 title 1
- 239000000758 substrate Substances 0.000 claims abstract description 20
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000010409 thin film Substances 0.000 claims abstract description 16
- 229910001930 tungsten oxide Inorganic materials 0.000 claims abstract description 16
- 150000002430 hydrocarbons Chemical class 0.000 claims abstract description 13
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims abstract description 11
- 229930195733 hydrocarbon Natural products 0.000 claims abstract description 11
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims abstract description 7
- 238000005259 measurement Methods 0.000 claims abstract description 7
- 239000004215 Carbon black (E152) Substances 0.000 claims abstract description 6
- 238000001514 detection method Methods 0.000 claims abstract description 5
- 239000007789 gas Substances 0.000 claims description 27
- 230000035945 sensitivity Effects 0.000 claims description 10
- 239000013078 crystal Substances 0.000 claims description 5
- 229910044991 metal oxide Inorganic materials 0.000 claims description 5
- 150000004706 metal oxides Chemical class 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 239000012190 activator Substances 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 239000012298 atmosphere Substances 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims description 2
- 229910000510 noble metal Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 238000001552 radio frequency sputter deposition Methods 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000000356 contaminant Substances 0.000 abstract description 2
- 230000004044 response Effects 0.000 abstract description 2
- 229930195734 saturated hydrocarbon Natural products 0.000 abstract description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000001273 butane Substances 0.000 description 2
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- IBXOPEGTOZQGQO-UHFFFAOYSA-N [Li].[Nb] Chemical compound [Li].[Nb] IBXOPEGTOZQGQO-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- RAOIDOHSFRTOEL-UHFFFAOYSA-N tetrahydrothiophene Chemical compound C1CCSC1 RAOIDOHSFRTOEL-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19833322481 DE3322481A1 (de) | 1983-06-22 | 1983-06-22 | Duennschicht-gassensor zum nachweis und zur messung von gasfoermigen kohlenwasserstoff-verunreinigungen mit doppel- und dreifachbindungen, insbesondere von acetylen, in luft sowie ein verfahren zu seiner herstellung |
| US06/593,875 US4581204A (en) | 1983-06-02 | 1984-03-27 | Thin film gas sensor |
| AT84106360T ATE41241T1 (de) | 1983-06-22 | 1984-06-04 | Duennschicht-gassensor zum nachweis und zur messung von gasfoermigen kohlenwasserstoffverunreinigungen mit doppel- und dreifachbindungen, insbesondere von acetylen, in luft sowie ein verfahren zu seiner herstellung. |
| DE8484106360T DE3477065D1 (en) | 1983-06-22 | 1984-06-04 | Thin layer gas sensing element for detecting and measuring hydrocarbon pollutants having two or three bonds, particularly acetylene, in air, and a process for its manufacture |
| EP84106360A EP0131731B1 (de) | 1983-06-22 | 1984-06-04 | Dünnschicht-Gassensor zum Nachweis und zur Messung von gasförmigen Kohlenwasserstoff-Verunreinigungen mit Doppel- und Dreifachbindungen, insbesondere von Acetylen, in Luft sowie ein Verfahren zu seiner Herstellung |
| JP59129029A JPS6015550A (ja) | 1983-06-22 | 1984-06-22 | 薄膜ガスセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19833322481 DE3322481A1 (de) | 1983-06-22 | 1983-06-22 | Duennschicht-gassensor zum nachweis und zur messung von gasfoermigen kohlenwasserstoff-verunreinigungen mit doppel- und dreifachbindungen, insbesondere von acetylen, in luft sowie ein verfahren zu seiner herstellung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE3322481A1 true DE3322481A1 (de) | 1985-01-03 |
Family
ID=6202092
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19833322481 Withdrawn DE3322481A1 (de) | 1983-06-02 | 1983-06-22 | Duennschicht-gassensor zum nachweis und zur messung von gasfoermigen kohlenwasserstoff-verunreinigungen mit doppel- und dreifachbindungen, insbesondere von acetylen, in luft sowie ein verfahren zu seiner herstellung |
| DE8484106360T Expired DE3477065D1 (en) | 1983-06-22 | 1984-06-04 | Thin layer gas sensing element for detecting and measuring hydrocarbon pollutants having two or three bonds, particularly acetylene, in air, and a process for its manufacture |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE8484106360T Expired DE3477065D1 (en) | 1983-06-22 | 1984-06-04 | Thin layer gas sensing element for detecting and measuring hydrocarbon pollutants having two or three bonds, particularly acetylene, in air, and a process for its manufacture |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4581204A (en:Method) |
| EP (1) | EP0131731B1 (en:Method) |
| JP (1) | JPS6015550A (en:Method) |
| AT (1) | ATE41241T1 (en:Method) |
| DE (2) | DE3322481A1 (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4428155A1 (de) * | 1994-08-09 | 1996-02-15 | Siemens Ag | Verfahren zur Herstellung eines Gassensors |
| DE19720007A1 (de) * | 1997-05-13 | 1998-11-26 | Siemens Ag | Kombinierter Gassensor zur Detektion von Gasen und Partikeln, mit Betriebsverfahren und Verwendungen |
| DE102017200156A1 (de) | 2017-01-09 | 2018-07-12 | Robert Bosch Gmbh | Herstellungsverfahren für eine mikromechanische Sensorvorrichtung und entsprechende mikromechanische Sensorvorrichtung |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3723052A1 (de) * | 1987-07-11 | 1989-01-19 | Kernforschungsz Karlsruhe | Herstellung von inerten, katalytisch wirksamen oder gassensitiven keramikschichten fuer gassensoren |
| JPH0375237A (ja) * | 1989-08-17 | 1991-03-29 | Ishizuka Glass Co Ltd | セラミック基板用グレーズ組成物 |
| GB9501461D0 (en) * | 1994-06-20 | 1995-03-15 | Capteur Sensors & Analysers | Detection of ozone |
| US6202471B1 (en) * | 1997-10-10 | 2001-03-20 | Nanomaterials Research Corporation | Low-cost multilaminate sensors |
| AU7563698A (en) * | 1997-04-30 | 1998-11-24 | T/J Technologies, Inc. | Chemical sensors and methods for their use |
| EP0936461A3 (en) * | 1998-02-11 | 2000-12-06 | Cbl Ceramics Limited | Gas sensor |
| US7113069B1 (en) | 1999-11-30 | 2006-09-26 | Smiths Detection Inc. | Aligned particle based sensor elements |
| EP1141690A4 (en) * | 1998-12-01 | 2002-08-07 | Cyrano Sciences Inc | SENSOR BASED ON LINES OF PARTICLES |
| CN1084302C (zh) * | 1998-12-12 | 2002-05-08 | 中国科学技术大学 | 一种乙炔酒精气敏材料及其制备方法 |
| US6423120B1 (en) | 2000-07-17 | 2002-07-23 | Agilent Technologies, Inc. | Sample introduction systems and methods |
| RU2194975C2 (ru) * | 2001-01-15 | 2002-12-20 | Михайлова Антонина Михайловна | Твердотельный электрохимический газоанализатор для определения ацетилена |
| TWI220455B (en) * | 2001-11-29 | 2004-08-21 | Ind Tech Res Inst | Method for preparing tungsten trioxide precursor and hydrogen sulfide gas sensor fabricated using the same |
| US20110124113A1 (en) * | 2009-11-25 | 2011-05-26 | Abdul-Majeed Azad | Methods and devices for detecting unsaturated compounds |
| US9146226B1 (en) | 2011-05-26 | 2015-09-29 | The University Of Toledo | Methods and devices for detecting unsaturated compounds |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1648913A1 (de) * | 1966-11-25 | 1971-05-13 | Gen Electric | Verfahren und Vorrichtung zur Messung des Gehaltes an Wasserstoff und Reduktionsgasen in einer Atmosphaere |
| DE2016388A1 (en) * | 1970-04-06 | 1971-10-21 | Taguchi N | Gas detector using semi-conductor with gasre |
| US4197089A (en) * | 1975-12-22 | 1980-04-08 | Ambac Industries, Incorporated | Reducing gas sensor |
| DE3032476A1 (de) * | 1980-08-28 | 1982-04-01 | Siemens AG, 1000 Berlin und 8000 München | Selektiver duennschicht-gassensor hoher empfindlichkeit und stabilitaet zum nachweis und zur messung von gasfoermigen kohlenwasserstoff-verunreinigungen in der luft auf der basis von wolframoxid (wo(pfeil abwaerts)x(pfeil abwaerts))-halbleitern, sowie ein verfahren zu seiner herstellung |
| JPS5774647A (en) * | 1980-10-28 | 1982-05-10 | Matsushita Electric Ind Co Ltd | Detecting element for inflammable gas |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49103699A (en:Method) * | 1973-02-02 | 1974-10-01 | ||
| US4314996A (en) * | 1979-04-04 | 1982-02-09 | Matsushita Electric Industrial Company, Limited | Oxygen sensor |
| DE2933971C2 (de) * | 1979-08-22 | 1983-12-15 | Siemens AG, 1000 Berlin und 8000 München | Gassensor hoher Empfindlichkeit und Stabilität zum Nachweis und zur Messung des Verunreinigungsgehaltes von Luft auf der Basis von Metalloxidhalbleitern |
| JPS5720577A (en) * | 1980-07-10 | 1982-02-03 | Mayekawa Mfg Co Ltd | Speed controller with variable-frequency power source for electric motor for driving screw compressor |
-
1983
- 1983-06-22 DE DE19833322481 patent/DE3322481A1/de not_active Withdrawn
-
1984
- 1984-03-27 US US06/593,875 patent/US4581204A/en not_active Expired - Fee Related
- 1984-06-04 EP EP84106360A patent/EP0131731B1/de not_active Expired
- 1984-06-04 AT AT84106360T patent/ATE41241T1/de not_active IP Right Cessation
- 1984-06-04 DE DE8484106360T patent/DE3477065D1/de not_active Expired
- 1984-06-22 JP JP59129029A patent/JPS6015550A/ja active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1648913A1 (de) * | 1966-11-25 | 1971-05-13 | Gen Electric | Verfahren und Vorrichtung zur Messung des Gehaltes an Wasserstoff und Reduktionsgasen in einer Atmosphaere |
| DE2016388A1 (en) * | 1970-04-06 | 1971-10-21 | Taguchi N | Gas detector using semi-conductor with gasre |
| US4197089A (en) * | 1975-12-22 | 1980-04-08 | Ambac Industries, Incorporated | Reducing gas sensor |
| DE3032476A1 (de) * | 1980-08-28 | 1982-04-01 | Siemens AG, 1000 Berlin und 8000 München | Selektiver duennschicht-gassensor hoher empfindlichkeit und stabilitaet zum nachweis und zur messung von gasfoermigen kohlenwasserstoff-verunreinigungen in der luft auf der basis von wolframoxid (wo(pfeil abwaerts)x(pfeil abwaerts))-halbleitern, sowie ein verfahren zu seiner herstellung |
| JPS5774647A (en) * | 1980-10-28 | 1982-05-10 | Matsushita Electric Ind Co Ltd | Detecting element for inflammable gas |
Non-Patent Citations (2)
| Title |
|---|
| US-Z: Applied Physics Letters, Vol11, 1967, S.255-257 * |
| US-Z: Jap. Journal of Applied Physics, Vol.18, 1979, S.1937-1945 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4428155A1 (de) * | 1994-08-09 | 1996-02-15 | Siemens Ag | Verfahren zur Herstellung eines Gassensors |
| DE19720007A1 (de) * | 1997-05-13 | 1998-11-26 | Siemens Ag | Kombinierter Gassensor zur Detektion von Gasen und Partikeln, mit Betriebsverfahren und Verwendungen |
| DE19720007C2 (de) * | 1997-05-13 | 1999-06-02 | Siemens Ag | Gassensorsystem zur Detektion von mindestens einem Gas oder von Partikeln oder einer Kombination daraus mit zwei Gassensoren, Verfahren zu dessen Betrieb und Verwendung des Gassensorsystems |
| DE102017200156A1 (de) | 2017-01-09 | 2018-07-12 | Robert Bosch Gmbh | Herstellungsverfahren für eine mikromechanische Sensorvorrichtung und entsprechende mikromechanische Sensorvorrichtung |
| US10315917B2 (en) | 2017-01-09 | 2019-06-11 | Robert Bosch Gmbh | Method for manufacturing a micromechanical sensor device and corresponding micromechanical sensor device |
Also Published As
| Publication number | Publication date |
|---|---|
| ATE41241T1 (de) | 1989-03-15 |
| JPH0249656B2 (en:Method) | 1990-10-30 |
| JPS6015550A (ja) | 1985-01-26 |
| DE3477065D1 (en) | 1989-04-13 |
| EP0131731B1 (de) | 1989-03-08 |
| EP0131731A2 (de) | 1985-01-23 |
| US4581204A (en) | 1986-04-08 |
| EP0131731A3 (en) | 1986-09-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0131731B1 (de) | Dünnschicht-Gassensor zum Nachweis und zur Messung von gasförmigen Kohlenwasserstoff-Verunreinigungen mit Doppel- und Dreifachbindungen, insbesondere von Acetylen, in Luft sowie ein Verfahren zu seiner Herstellung | |
| Gardner | A non-linear diffusion-reaction model of electrical conduction in semiconductor gas sensors | |
| DE2407110C3 (de) | Sensor zum Nachweis einer in einem Gas oder einer Flüssigkeit einthaltenen Substanz | |
| Jones et al. | The effect of the physical form of the oxide on the conductivity changes produced by CH4, CO and H2O on ZnO | |
| DE69217431T2 (de) | Chemischer Sensor zum Nachweis von Kohlenmonoxid | |
| DE69422892T2 (de) | Verwendung von halbleitergassensoren | |
| DE4334672A1 (de) | Sensor zum Nachweis von Stickoxid | |
| EP1955051B1 (de) | Wasserstoffsensor | |
| EP0046989B1 (de) | Selektiver Dünnschicht-Gassensor hoher Empfindlichkeit und Stabilität zum Nachweis und zur Messung von gasförmigen Kohlenwasserstoff-Verunreinigungen in der Luft auf der Basis von Wolframoxid (WOx)-Halbleitern, sowie ein Verfahren zu seiner Herstellung | |
| EP0464244B1 (de) | Sensor zur Erfassung reduzierender Gase | |
| Hassan et al. | Fe dopants enhancing ethanol sensitivity of ZnO thin film deposited by RF magnetron sputtering | |
| Szklarski et al. | Thin oxide films as gas sensors | |
| DE68909386T2 (de) | Halbleitermessaufnehmer zur Feststellung der Konzentration von Wasserstoff und/oder von NOx und Verfahren zur dessen Herstellung. | |
| EP0643827B1 (de) | Methansensor | |
| DE19701418A1 (de) | Sensitive Schicht für den Einsatz in Halbleiter-Gassensoren | |
| DE2820858C2 (de) | Gas-Meßfühler | |
| EP0005480A1 (de) | Gassensoren | |
| Stankiewicz et al. | Pressure and temperature dependence of the energy Gap in CdxHg1− xTe | |
| DE4122408A1 (de) | Kapazitiv messendes chemisches sensorsystem | |
| DE3217883A1 (de) | Gassensor | |
| DE102004060103A1 (de) | Verfahren und Anordnung zur Erfassung brennbarer Gase, insbesondere zur Erfassung von Wasserstoff | |
| DE10019010B4 (de) | Verwendung eines chemisch sensitiven Halbleitermaterials zum Nachweis von gas- und/oder dampfförmigen Analyten in Gasen | |
| DE2831394A1 (de) | Kohlenmonoxid-sensor | |
| Göbel et al. | Properties of MnBi compounds partially substituted with Cu, Zn, Ti, Sb, and Te. II. Stability and magnetooptic properties of thin films | |
| Kim et al. | A quantitative ESR study of cadmium phosphorus chalcogenide (Cd2P2S6) intercalated with cobaltocene |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
| 8139 | Disposal/non-payment of the annual fee |