DE3246412C2 - - Google Patents
Info
- Publication number
- DE3246412C2 DE3246412C2 DE3246412A DE3246412A DE3246412C2 DE 3246412 C2 DE3246412 C2 DE 3246412C2 DE 3246412 A DE3246412 A DE 3246412A DE 3246412 A DE3246412 A DE 3246412A DE 3246412 C2 DE3246412 C2 DE 3246412C2
- Authority
- DE
- Germany
- Prior art keywords
- electrodes
- insulating
- layer
- insulating material
- heating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 19
- 239000004020 conductor Substances 0.000 claims abstract description 9
- 239000011810 insulating material Substances 0.000 claims abstract description 9
- 239000007788 liquid Substances 0.000 claims description 13
- 239000000126 substance Substances 0.000 claims description 13
- 239000003054 catalyst Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 238000001465 metallisation Methods 0.000 claims description 5
- 230000002441 reversible effect Effects 0.000 claims description 4
- 238000003475 lamination Methods 0.000 claims description 3
- 239000004071 soot Substances 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 239000012530 fluid Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 239000002245 particle Substances 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 239000011230 binding agent Substances 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 239000000945 filler Substances 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- -1 argon ions Chemical class 0.000 description 3
- 150000002736 metal compounds Chemical class 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000002296 pyrolytic carbon Substances 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- LRXTYHSAJDENHV-UHFFFAOYSA-H zinc phosphate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O LRXTYHSAJDENHV-UHFFFAOYSA-H 0.000 description 2
- 208000007101 Muscle Cramp Diseases 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 239000011354 acetal resin Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- ILRRQNADMUWWFW-UHFFFAOYSA-K aluminium phosphate Chemical compound O1[Al]2OP1(=O)O2 ILRRQNADMUWWFW-UHFFFAOYSA-K 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 244000052616 bacterial pathogen Species 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000012876 carrier material Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 229910001567 cementite Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- HGAZMNJKRQFZKS-UHFFFAOYSA-N chloroethene;ethenyl acetate Chemical compound ClC=C.CC(=O)OC=C HGAZMNJKRQFZKS-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 125000005442 diisocyanate group Chemical group 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000035784 germination Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- RJCRUVXAWQRZKQ-UHFFFAOYSA-N oxosilicon;silicon Chemical compound [Si].[Si]=O RJCRUVXAWQRZKQ-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Surface Heating Bodies (AREA)
- Resistance Heating (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19823246412 DE3246412A1 (de) | 1982-12-15 | 1982-12-15 | Fluessigkeitsempfindliches element |
| AT83111248T ATE32952T1 (de) | 1982-12-15 | 1983-11-11 | Fluessigkeitsempfindliches element. |
| EP83111248A EP0111733B1 (de) | 1982-12-15 | 1983-11-11 | Flüssigkeitsempfindliches Element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19823246412 DE3246412A1 (de) | 1982-12-15 | 1982-12-15 | Fluessigkeitsempfindliches element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3246412A1 DE3246412A1 (de) | 1984-06-20 |
| DE3246412C2 true DE3246412C2 (cg-RX-API-DMAC7.html) | 1988-03-17 |
Family
ID=6180731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19823246412 Granted DE3246412A1 (de) | 1982-12-15 | 1982-12-15 | Fluessigkeitsempfindliches element |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0111733B1 (cg-RX-API-DMAC7.html) |
| AT (1) | ATE32952T1 (cg-RX-API-DMAC7.html) |
| DE (1) | DE3246412A1 (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994001649A1 (en) * | 1992-07-09 | 1994-01-20 | V. Kann Rasmussen Industri A/S | Electric rain sensor and method of manufacturing a sensor member thereto |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3829517A1 (de) * | 1988-08-31 | 1990-03-08 | Bosch Gmbh Robert | Feuchtesensor |
| DE3916921C1 (cg-RX-API-DMAC7.html) * | 1989-05-24 | 1990-10-11 | Preh-Werke Gmbh & Co Kg, 8740 Bad Neustadt, De | |
| SE0102426D0 (sv) * | 2001-07-06 | 2001-07-06 | Bioett Ab | Fuktsensor |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5152005A (ja) * | 1974-09-12 | 1976-05-08 | Uop Inc | Denkiteikotaiinki |
| JPS51151176A (en) * | 1975-06-20 | 1976-12-25 | Asahi Glass Co Ltd | Dew condensation sensor |
| US4011538A (en) * | 1976-01-30 | 1977-03-08 | Illinois Tool Works Inc. | Fluid sensor |
| AT368811B (de) * | 1978-07-12 | 1982-11-10 | Siemens Ag Oesterreich | Feuchtigkeitsmesseinrichtung |
| DE2938434C2 (de) * | 1979-09-22 | 1981-07-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München | Kapazitiver Feuchtigkeitsfühler und Verfahren zur Herstellung des Fühlers |
| DE3045617A1 (de) * | 1979-12-03 | 1981-08-20 | Tokyo Cosmos Electric Co. Ltd.,, Hachioji, Tokyo | Feuchtigkeitsempfindlicher widerstand |
| DE3024297C2 (de) * | 1980-06-27 | 1985-08-14 | Endress U. Hauser Gmbh U. Co, 7867 Maulburg | Kapazitiver Feuchtigkeitsfühler und Verfahren zum Herstellen seiner feuchtigkeitsempfindlichen Schicht |
| DE8121939U1 (de) * | 1981-07-25 | 1982-01-14 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Regenfuehler fuer einen regensammler |
| DE3176700D1 (en) * | 1981-09-30 | 1988-05-05 | Mitsubishi Electric Corp | Humidity sensor |
| US4520341A (en) * | 1981-12-08 | 1985-05-28 | Sharp Kabushiki Kaisha | Moisture responsive element with crosslinked organic membrane and protective layering |
-
1982
- 1982-12-15 DE DE19823246412 patent/DE3246412A1/de active Granted
-
1983
- 1983-11-11 AT AT83111248T patent/ATE32952T1/de not_active IP Right Cessation
- 1983-11-11 EP EP83111248A patent/EP0111733B1/de not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994001649A1 (en) * | 1992-07-09 | 1994-01-20 | V. Kann Rasmussen Industri A/S | Electric rain sensor and method of manufacturing a sensor member thereto |
Also Published As
| Publication number | Publication date |
|---|---|
| ATE32952T1 (de) | 1988-03-15 |
| EP0111733B1 (de) | 1988-03-09 |
| DE3246412A1 (de) | 1984-06-20 |
| EP0111733A3 (en) | 1985-04-10 |
| EP0111733A2 (de) | 1984-06-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: PREH-WERKE GMBH & CO KG, 8740 BAD NEUSTADT, DE |
|
| 8339 | Ceased/non-payment of the annual fee |