DE3230727C2 - - Google Patents

Info

Publication number
DE3230727C2
DE3230727C2 DE3230727A DE3230727A DE3230727C2 DE 3230727 C2 DE3230727 C2 DE 3230727C2 DE 3230727 A DE3230727 A DE 3230727A DE 3230727 A DE3230727 A DE 3230727A DE 3230727 C2 DE3230727 C2 DE 3230727C2
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3230727A
Other languages
German (de)
Other versions
DE3230727A1 (de
Inventor
Guenther Dipl.-Phys. Dr. 8520 Erlangen De Ziegler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19823230727 priority Critical patent/DE3230727A1/de
Priority to JP58150122A priority patent/JPS5954697A/ja
Publication of DE3230727A1 publication Critical patent/DE3230727A1/de
Application granted granted Critical
Publication of DE3230727C2 publication Critical patent/DE3230727C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE19823230727 1982-08-18 1982-08-18 Verfahren zum herstellen von siliziumkarbid Granted DE3230727A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19823230727 DE3230727A1 (de) 1982-08-18 1982-08-18 Verfahren zum herstellen von siliziumkarbid
JP58150122A JPS5954697A (ja) 1982-08-18 1983-08-17 炭化ケイ素単結晶の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19823230727 DE3230727A1 (de) 1982-08-18 1982-08-18 Verfahren zum herstellen von siliziumkarbid

Publications (2)

Publication Number Publication Date
DE3230727A1 DE3230727A1 (de) 1984-02-23
DE3230727C2 true DE3230727C2 (US06262066-20010717-C00315.png) 1987-02-19

Family

ID=6171140

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19823230727 Granted DE3230727A1 (de) 1982-08-18 1982-08-18 Verfahren zum herstellen von siliziumkarbid

Country Status (2)

Country Link
JP (1) JPS5954697A (US06262066-20010717-C00315.png)
DE (1) DE3230727A1 (US06262066-20010717-C00315.png)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0389533A1 (en) * 1987-10-26 1990-10-03 Univ North Carolina State GROWTH OF SILICON CARBIDE MONOCRYSTALS BY SUBLIMATION.
DE3915053A1 (de) * 1989-05-08 1990-11-15 Siemens Ag Verfahren zum herstellen von einkristallinem siliziumkarbid sic
WO1997013011A1 (en) * 1995-10-04 1997-04-10 Abb Research Limited A device for heat treatment of objects and a method for producing a susceptor
DE19931332A1 (de) * 1999-07-07 2001-01-18 Siemens Ag Vorrichtung zur Herstellung eines SiC-Einkristalls mit einem doppelwandigen Tiegel
US6770136B2 (en) 1999-07-07 2004-08-03 Siemens Aktiengesellschaft Device having a foil-lined crucible for the sublimation growth of an SiC single crystal
US6773505B2 (en) 1999-07-07 2004-08-10 Siemens Aktiengesellschaft Method for the sublimation growth of an SiC single crystal, involving heating under growth pressure

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0788274B2 (ja) * 1985-09-18 1995-09-27 三洋電機株式会社 ＳｉＣ単結晶の成長方法
DE59001292D1 (de) * 1989-06-20 1993-06-03 Siemens Ag Verfahren zum herstellen von einkristallinem siliziumkarbid.
DE4310744A1 (de) * 1993-04-01 1994-10-06 Siemens Ag Vorrichtung zum Herstellen von SiC-Einkristallen
RU2094547C1 (ru) * 1996-01-22 1997-10-27 Юрий Александрович Водаков Сублимационный способ выращивания монокристаллов карбида кремния и источник карбида кремния для осуществления способа
US6547877B2 (en) 1996-01-22 2003-04-15 The Fox Group, Inc. Tantalum crucible fabrication and treatment
JP3491436B2 (ja) * 1996-03-29 2004-01-26 株式会社デンソー 炭化珪素単結晶の製造方法
US6562130B2 (en) 1997-01-22 2003-05-13 The Fox Group, Inc. Low defect axially grown single crystal silicon carbide
US6537371B2 (en) 1997-01-22 2003-03-25 The Fox Group, Inc. Niobium crucible fabrication and treatment
ATE217368T1 (de) 1997-01-22 2002-05-15 Yury Alexandrovich Vodakov Züchtung von siliziumkarbid einkristallen
DE69705545T2 (de) * 1997-01-31 2001-10-25 Northrop Grumman Corp Vorrichtung zur züchtung von grossen siliziumkarbideinkristallen
JP4574852B2 (ja) 1998-07-13 2010-11-04 エスアイクリスタル アクチエンゲゼルシャフト ＳｉＣ単結晶の成長方法
US6063185A (en) * 1998-10-09 2000-05-16 Cree, Inc. Production of bulk single crystals of aluminum nitride, silicon carbide and aluminum nitride: silicon carbide alloy
DE69940385D1 (de) * 1998-12-25 2009-03-19 Showa Denko Kk Verfahren zur Züchtung eines Einkristalls von Siliziumcarbid
WO2001004390A1 (de) 1999-07-07 2001-01-18 Siemens Aktiengesellschaft Keimkristallhalter mit seitlicher einfassung eines sic-keimkristalls
US6562131B2 (en) 1999-07-20 2003-05-13 The Fox Group, Inc. Method for growing single crystal silicon carbide
US6824611B1 (en) 1999-10-08 2004-11-30 Cree, Inc. Method and apparatus for growing silicon carbide crystals
US7056383B2 (en) 2004-02-13 2006-06-06 The Fox Group, Inc. Tantalum based crucible
JP5779171B2 (ja) 2009-03-26 2015-09-16 トゥー‐シックス・インコーポレイテッド ＳｉＣ単結晶の昇華成長方法及び装置
JP4888548B2 (ja) * 2009-12-24 2012-02-29 株式会社デンソー 炭化珪素単結晶の製造装置および製造方法
WO2017053883A1 (en) 2015-09-24 2017-03-30 Melior Innovations, Inc. Vapor deposition apparatus and techniques using high purity polymer derived silicon carbide

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0389533A1 (en) * 1987-10-26 1990-10-03 Univ North Carolina State GROWTH OF SILICON CARBIDE MONOCRYSTALS BY SUBLIMATION.
EP0389533B1 (en) * 1987-10-26 1996-09-11 North Carolina State University Sublimation growth of silicon carbide single crystals
DE3915053A1 (de) * 1989-05-08 1990-11-15 Siemens Ag Verfahren zum herstellen von einkristallinem siliziumkarbid sic
WO1997013011A1 (en) * 1995-10-04 1997-04-10 Abb Research Limited A device for heat treatment of objects and a method for producing a susceptor
DE19931332A1 (de) * 1999-07-07 2001-01-18 Siemens Ag Vorrichtung zur Herstellung eines SiC-Einkristalls mit einem doppelwandigen Tiegel
DE19931332C2 (de) * 1999-07-07 2002-06-06 Siemens Ag Vorrichtung zur Herstellung eines SiC-Einkristalls mit einem doppelwandigen Tiegel
US6770136B2 (en) 1999-07-07 2004-08-03 Siemens Aktiengesellschaft Device having a foil-lined crucible for the sublimation growth of an SiC single crystal
US6773505B2 (en) 1999-07-07 2004-08-10 Siemens Aktiengesellschaft Method for the sublimation growth of an SiC single crystal, involving heating under growth pressure

Also Published As

Publication number Publication date
DE3230727A1 (de) 1984-02-23
JPS6357400B2 (US06262066-20010717-C00315.png) 1988-11-11
JPS5954697A (ja) 1984-03-29

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)