DE3175345D1 - Coating insulating materials by glow discharge - Google Patents

Coating insulating materials by glow discharge

Info

Publication number
DE3175345D1
DE3175345D1 DE8181303327T DE3175345T DE3175345D1 DE 3175345 D1 DE3175345 D1 DE 3175345D1 DE 8181303327 T DE8181303327 T DE 8181303327T DE 3175345 T DE3175345 T DE 3175345T DE 3175345 D1 DE3175345 D1 DE 3175345D1
Authority
DE
Germany
Prior art keywords
insulating materials
glow discharge
coating insulating
coating
glow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181303327T
Other languages
English (en)
Inventor
Geoffrey William Green
Alan Harold Lettington
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Development Corp UK
Original Assignee
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=10515600&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3175345(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by National Research Development Corp UK filed Critical National Research Development Corp UK
Application granted granted Critical
Publication of DE3175345D1 publication Critical patent/DE3175345D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
DE8181303327T 1980-08-21 1981-07-21 Coating insulating materials by glow discharge Expired DE3175345D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8027277 1980-08-21

Publications (1)

Publication Number Publication Date
DE3175345D1 true DE3175345D1 (en) 1986-10-23

Family

ID=10515600

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181303327T Expired DE3175345D1 (en) 1980-08-21 1981-07-21 Coating insulating materials by glow discharge

Country Status (4)

Country Link
US (1) US4400410A (de)
EP (1) EP0049032B1 (de)
JP (1) JPS5773176A (de)
DE (1) DE3175345D1 (de)

Families Citing this family (51)

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DE3047888A1 (de) * 1980-12-19 1982-07-15 Philips Patentverwaltung Gmbh, 2000 Hamburg "schneidwerkzeug, verfahren zu seiner herstellung und seine verwendung"
FR2514743B1 (fr) * 1981-10-21 1986-05-09 Rca Corp Pellicule amorphe a base de carbone, du type diamant, et son procede de fabrication
JPS58117868A (ja) * 1981-12-28 1983-07-13 Toshiba Corp 皮膜形成装置
JPS594433A (ja) * 1982-06-30 1984-01-11 Toshiba Corp 薄膜形成装置
US4704339A (en) * 1982-10-12 1987-11-03 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Infra-red transparent optical components
JPS59207620A (ja) * 1983-05-10 1984-11-24 Zenko Hirose アモルフアスシリコン成膜装置
US4512284A (en) * 1983-12-19 1985-04-23 Rca Corporation Glow discharge apparatus for use in coating a disc-shaped substrate
US4554208A (en) * 1983-12-27 1985-11-19 General Motors Corporation Metal bearing surface having an adherent score-resistant coating
GB2162207B (en) * 1984-07-26 1989-05-10 Japan Res Dev Corp Semiconductor crystal growth apparatus
US4663183A (en) * 1984-09-10 1987-05-05 Energy Conversion Devices, Inc. Glow discharge method of applying a carbon coating onto a substrate
DE3442208C3 (de) * 1984-11-19 1998-06-10 Leybold Ag Verfahren und Vorrichtung zum Herstellen harter Kohlenstoffschichten
DE3609503A1 (de) * 1985-03-22 1986-10-02 Canon K.K., Tokio/Tokyo Heizwiderstandselement und heizwiderstand unter verwendung desselben
US4845513A (en) * 1985-03-23 1989-07-04 Canon Kabushiki Kaisha Thermal recording head
US4783369A (en) * 1985-03-23 1988-11-08 Canon Kabushiki Kaisha Heat-generating resistor and heat-generating resistance element using same
GB2174877B (en) * 1985-03-23 1989-03-15 Canon Kk Thermal recording head
DE3609975A1 (de) * 1985-03-25 1986-10-02 Canon K.K., Tokio/Tokyo Thermoaufzeichnungskopf
GB2176443B (en) * 1985-06-10 1990-11-14 Canon Kk Liquid jet recording head and recording system incorporating the same
US4626448A (en) * 1985-07-18 1986-12-02 The United States Of America As Represented By The United States Department Of Energy Plasma deposition of amorphous metal alloys
JPS62202899A (ja) * 1986-03-03 1987-09-07 Nippon Gakki Seizo Kk 装飾品の製法
US4753414A (en) * 1986-04-14 1988-06-28 Balzers Optical Corporation Carbon coatings in replicated optics art
US4995684A (en) * 1986-06-18 1991-02-26 Raytheon Company Impact resistant and tempered optical elements
GB2192733B (en) * 1986-06-18 1991-02-06 Raytheon Co Impact resistant and tempered optical elements
US4907846A (en) * 1987-11-20 1990-03-13 Raytheon Company Thick, impact resistant antireflection coatings for IR transparent optical elements
JP2572438B2 (ja) * 1989-01-30 1997-01-16 ホーヤ株式会社 ガラスプレス成形型の製造方法
US5183602A (en) * 1989-09-18 1993-02-02 Cornell Research Foundation, Inc. Infra red diamond composites
US5206083A (en) * 1989-09-18 1993-04-27 Cornell Research Foundation, Inc. Diamond and diamond-like films and coatings prepared by deposition on substrate that contain a dispersion of diamond particles
US5067781A (en) * 1989-11-21 1991-11-26 Raytheon Company Optical elements and method of manufacture
US5120602A (en) * 1990-02-02 1992-06-09 Raytheon Company Optical elements and method of manufacture
US5527596A (en) * 1990-09-27 1996-06-18 Diamonex, Incorporated Abrasion wear resistant coated substrate product
US5637353A (en) * 1990-09-27 1997-06-10 Monsanto Company Abrasion wear resistant coated substrate product
US5268217A (en) * 1990-09-27 1993-12-07 Diamonex, Incorporated Abrasion wear resistant coated substrate product
JP2929779B2 (ja) * 1991-02-15 1999-08-03 トヨタ自動車株式会社 炭素被膜付撥水ガラス
US5224441A (en) * 1991-09-27 1993-07-06 The Boc Group, Inc. Apparatus for rapid plasma treatments and method
US6835523B1 (en) 1993-05-09 2004-12-28 Semiconductor Energy Laboratory Co., Ltd. Apparatus for fabricating coating and method of fabricating the coating
US6183816B1 (en) * 1993-07-20 2001-02-06 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating the coating
US6113746A (en) 1996-11-27 2000-09-05 University Of Florida Methods for altering the magnetic properties of materials and the materials produced by these methods
US6071597A (en) * 1997-08-28 2000-06-06 3M Innovative Properties Company Flexible circuits and carriers and process for manufacture
US6475573B1 (en) 1999-05-03 2002-11-05 Guardian Industries Corp. Method of depositing DLC inclusive coating on substrate
US6461731B1 (en) 1999-05-03 2002-10-08 Guardian Industries Corp. Solar management coating system including protective DLC
US6280834B1 (en) 1999-05-03 2001-08-28 Guardian Industries Corporation Hydrophobic coating including DLC and/or FAS on substrate
US6312808B1 (en) 1999-05-03 2001-11-06 Guardian Industries Corporation Hydrophobic coating with DLC & FAS on substrate
US6261693B1 (en) 1999-05-03 2001-07-17 Guardian Industries Corporation Highly tetrahedral amorphous carbon coating on glass
US6335086B1 (en) 1999-05-03 2002-01-01 Guardian Industries Corporation Hydrophobic coating including DLC on substrate
US6447891B1 (en) 1999-05-03 2002-09-10 Guardian Industries Corp. Low-E coating system including protective DLC
US6277480B1 (en) 1999-05-03 2001-08-21 Guardian Industries Corporation Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method
US6368664B1 (en) 1999-05-03 2002-04-09 Guardian Industries Corp. Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon
US6316734B1 (en) 2000-03-07 2001-11-13 3M Innovative Properties Company Flexible circuits with static discharge protection and process for manufacture
US6815620B2 (en) 2001-03-29 2004-11-09 3M Innovative Properties Company Flexible circuit with electrostatic damage limiting feature
US6459043B1 (en) 2001-03-29 2002-10-01 3M Innovative Properties Company Flexible circuit with electrostatic damage limiting feature and method of manufacture
US6995954B1 (en) 2001-07-13 2006-02-07 Magnecomp Corporation ESD protected suspension interconnect
US7489493B2 (en) * 2003-12-01 2009-02-10 Magnecomp Corporation Method to form electrostatic discharge protection on flexible circuits using a diamond-like carbon material

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3473959A (en) * 1964-08-10 1969-10-21 Licentia Gmbh Method for coating semiconductors and apparatus
FR1582129A (de) * 1968-06-18 1969-09-26
JPS5132501B2 (de) * 1972-05-01 1976-09-13
JPS5123477A (ja) * 1974-07-25 1976-02-25 Kawasaki Heavy Ind Ltd Haienchunochitsusosankabutsunokyushuhohonarabini kyushusochi
US4060660A (en) * 1976-01-15 1977-11-29 Rca Corporation Deposition of transparent amorphous carbon films
US4142004A (en) * 1976-01-22 1979-02-27 Bell Telephone Laboratories, Incorporated Method of coating semiconductor substrates
GB1582231A (en) * 1976-08-13 1981-01-07 Nat Res Dev Application of a layer of carbonaceous material to a surface
FR2371524A1 (fr) * 1976-11-18 1978-06-16 Alsthom Atlantique Procede de depot d'une couche mince par decomposition d'un gaz dans un plasma
US4140814A (en) * 1977-12-01 1979-02-20 Texas Instruments Incorporated Plasma deposition of transparent conductive layers
GB2069008B (en) * 1980-01-16 1984-09-12 Secr Defence Coating in a glow discharge

Also Published As

Publication number Publication date
EP0049032A1 (de) 1982-04-07
EP0049032B1 (de) 1986-09-17
JPS5773176A (en) 1982-05-07
US4400410A (en) 1983-08-23
JPH0254429B2 (de) 1990-11-21

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8365 Fully valid after opposition proceedings