DE3170488D1 - Capacitive sensor and method of making it - Google Patents

Capacitive sensor and method of making it

Info

Publication number
DE3170488D1
DE3170488D1 DE8181401086T DE3170488T DE3170488D1 DE 3170488 D1 DE3170488 D1 DE 3170488D1 DE 8181401086 T DE8181401086 T DE 8181401086T DE 3170488 T DE3170488 T DE 3170488T DE 3170488 D1 DE3170488 D1 DE 3170488D1
Authority
DE
Germany
Prior art keywords
making
capacitive sensor
capacitive
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181401086T
Other languages
German (de)
English (en)
Inventor
Bernard Chambaz
Gilles Delapierre
Louis Destannes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE3170488D1 publication Critical patent/DE3170488D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
DE8181401086T 1980-07-09 1981-07-07 Capacitive sensor and method of making it Expired DE3170488D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8015263A FR2486656A1 (fr) 1980-07-09 1980-07-09 Hygrometre capacitif

Publications (1)

Publication Number Publication Date
DE3170488D1 true DE3170488D1 (en) 1985-06-20

Family

ID=9244028

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181401086T Expired DE3170488D1 (en) 1980-07-09 1981-07-07 Capacitive sensor and method of making it

Country Status (6)

Country Link
US (2) US4438480A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0043775B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5782760A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3170488D1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FI (1) FI71998C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2486656A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0070551B1 (en) * 1981-07-21 1987-02-04 Hitachi, Ltd. Method of manufacturing a gas sensor
US4465229A (en) * 1982-10-25 1984-08-14 Honeywell, Inc. Humidity comfort offset circuit
JPS6046455A (ja) * 1983-08-25 1985-03-13 Chino Works Ltd 湿度素子
DE3339276A1 (de) * 1983-10-28 1985-05-09 Endress U. Hauser Gmbh U. Co, 7867 Maulburg Kapazitiver feuchtefuehler und verfahren zu seiner herstellung
JPS60140609A (ja) * 1983-12-27 1985-07-25 シャープ株式会社 透湿性導電膜の製造方法
JPS6486053A (en) * 1987-09-29 1989-03-30 Toshiba Corp Sensitive element
US4942364A (en) * 1988-02-19 1990-07-17 Asahi Kasei Kogyo Kabushiki Kaisha Moisture and dew-detection sensor
FI82554C (fi) * 1988-11-02 1991-03-11 Vaisala Oy Kalibreringsfoerfarande foer maetning av den relativa halten av gas eller aonga.
NL8803223A (nl) * 1988-12-30 1990-07-16 Flucon Bv Capacitieve vochtsensor.
FI84862C (fi) * 1989-08-11 1992-01-27 Vaisala Oy Kapacitiv fuktighetsgivarkonstruktion och foerfarande foer framstaellning daerav.
US4965698A (en) * 1989-09-27 1990-10-23 Johnson Service Company Capacitance humidity sensor
ES2069784T3 (es) * 1990-09-12 1995-05-16 Endress Hauser Gmbh Co Procedimiento para fabricar un sensor capacitivo de humedad.
FR2687834B1 (fr) * 1992-02-24 1996-09-27 Coreci Condensateur plan ajustable.
FI98568C (fi) * 1994-12-28 1997-07-10 Vaisala Oy Sähköisesti ilmaistu impedanssianturi fysikaalisten suureiden, etenkin lämpötilan tai kosteuden, mittaamiseksi sekä menetelmä kyseisten anturien valmistamiseksi
WO2001088523A1 (fr) * 2000-05-15 2001-11-22 Yamatake Corporation Detecteur d'humidite
US6908663B1 (en) * 2000-11-15 2005-06-21 Awi Licensing Company Pigmented radiation cured wear layer
US20110301569A1 (en) 2001-01-20 2011-12-08 Gordon Wayne Dyer Methods and apparatus for the CVCS
US6724612B2 (en) 2002-07-09 2004-04-20 Honeywell International Inc. Relative humidity sensor with integrated signal conditioning
DE102004041620A1 (de) * 2004-08-27 2006-03-02 Testo Ag Gassensor und Herstellungsverfahren für einen Gassensor
WO2007098774A1 (de) * 2006-02-22 2007-09-07 Testo Ag Gassensor und verfahren zu dessen herstellung
FR2934051B1 (fr) 2008-07-16 2011-12-09 Commissariat Energie Atomique Detecteur d'humidite capacitif a dielectrique hydrophile nanoporeux
JP5385657B2 (ja) * 2009-03-27 2014-01-08 株式会社堀場製作所 ガスセンサ
US20120167392A1 (en) 2010-12-30 2012-07-05 Stmicroelectronics Pte. Ltd. Razor with chemical and biological sensor
DE102011086479A1 (de) * 2011-11-16 2013-05-16 Robert Bosch Gmbh Integrierter Feuchtesensor und Verfahren zu dessen Herstellung
US9027400B2 (en) * 2011-12-02 2015-05-12 Stmicroelectronics Pte Ltd. Tunable humidity sensor with integrated heater
US9019688B2 (en) 2011-12-02 2015-04-28 Stmicroelectronics Pte Ltd. Capacitance trimming with an integrated heater
WO2017011008A1 (en) * 2015-07-15 2017-01-19 Hewlett-Packard Development Company, L.P. Powering a power monitor
PT3664925T (pt) 2017-08-11 2024-04-16 Gcp Applied Tech Inc Medição de água cinzenta
JP7231501B2 (ja) * 2019-06-26 2023-03-01 ルビコン株式会社 湿度センサ及びその製造方法
CN114424043B (zh) 2019-08-01 2025-06-06 Gcp应用技术有限公司 旋转混凝土体积确定

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3257592A (en) 1966-06-21 Silicon monoxide
FR1264142A (fr) * 1959-06-23 1961-06-19 élément sensible à l'humidité, utilisable dans un hygromètre
NL252982A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1959-06-23
US3234442A (en) * 1962-03-23 1966-02-08 Ibm Method for fabricating thin film circuit elements and resulting elements
US3470018A (en) * 1964-08-24 1969-09-30 Melpar Inc Thin film capacitor
FR1480606A (fr) * 1965-05-20 1967-05-12 Johnson Service Co élément sensible à l'humidité
US3522732A (en) 1967-10-19 1970-08-04 Atmos Fritzsching & Co Gmbh Sensing element for hygrometers
US4164868A (en) 1972-10-12 1979-08-21 Vaisala Oy Capacitive humidity transducer
GB1577724A (en) * 1976-06-24 1980-10-29 Molecular Controls Ltd Humidity sensors
CH609774A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-01-21 1979-03-15 Semperit Ag
US4156268A (en) * 1977-08-29 1979-05-22 Longwood Machine Works, Inc. Humidity sensing element and method of manufacture thereof
GB1570054A (en) * 1978-03-23 1980-06-25 Rockliff P Sensor or detector element for an electrical hygrometer

Also Published As

Publication number Publication date
FI71998B (fi) 1986-11-28
FI812148L (fi) 1982-01-10
US4438480A (en) 1984-03-20
JPS5782760A (en) 1982-05-24
FR2486656A1 (fr) 1982-01-15
EP0043775A1 (fr) 1982-01-13
FR2486656B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-05-11
EP0043775B1 (fr) 1985-05-15
US4532016A (en) 1985-07-30
FI71998C (fi) 1989-06-27
JPS6348304B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-09-28

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