DE3167758D1 - Method for the manufacture of a temperature sensitive platinum thin film resistance element - Google Patents

Method for the manufacture of a temperature sensitive platinum thin film resistance element

Info

Publication number
DE3167758D1
DE3167758D1 DE8282102641T DE3167758T DE3167758D1 DE 3167758 D1 DE3167758 D1 DE 3167758D1 DE 8282102641 T DE8282102641 T DE 8282102641T DE 3167758 T DE3167758 T DE 3167758T DE 3167758 D1 DE3167758 D1 DE 3167758D1
Authority
DE
Germany
Prior art keywords
manufacture
thin film
resistance element
temperature sensitive
film resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8282102641T
Other languages
German (de)
Inventor
Ohno Yoshio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kirk KK
Original Assignee
Kirk KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4920480A external-priority patent/JPS56146205A/en
Priority claimed from JP4920880A external-priority patent/JPS56147050A/en
Priority claimed from JP4920580A external-priority patent/JPS56147048A/en
Priority claimed from JP4920680A external-priority patent/JPS56147049A/en
Priority claimed from JP4920780A external-priority patent/JPS56150339A/en
Priority claimed from JP17722080A external-priority patent/JPS57101750A/en
Application filed by Kirk KK filed Critical Kirk KK
Priority claimed from EP19810102856 external-priority patent/EP0038078B1/en
Application granted granted Critical
Publication of DE3167758D1 publication Critical patent/DE3167758D1/en
Expired legal-status Critical Current

Links

DE8282102641T 1980-04-16 1981-04-14 Method for the manufacture of a temperature sensitive platinum thin film resistance element Expired DE3167758D1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP4920480A JPS56146205A (en) 1980-04-16 1980-04-16 Method of manufacturing stable platinum thin film resistance element using transparent quartz tube and platinum film temperature measuring element
JP4920880A JPS56147050A (en) 1980-04-16 1980-04-16 Ammonia exclusive element uning thin platinum film resistor and automatic toilet ventilation fan using said element
JP4920580A JPS56147048A (en) 1980-04-16 1980-04-16 Inflamable gas detecting element using thin platinum film
JP4920680A JPS56147049A (en) 1980-04-16 1980-04-16 Stable and high-sensitivity carbon monoxide detecting element using thin platinum film resistor
JP4920780A JPS56150339A (en) 1980-04-16 1980-04-16 Nitrogen oxide detecting element using thin film of platinum
JP17722080A JPS57101750A (en) 1980-12-17 1980-12-17 Detecting element for combustible gas
EP19810102856 EP0038078B1 (en) 1980-04-16 1981-04-14 Gas sensor

Publications (1)

Publication Number Publication Date
DE3167758D1 true DE3167758D1 (en) 1985-01-24

Family

ID=27561858

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8282102641T Expired DE3167758D1 (en) 1980-04-16 1981-04-14 Method for the manufacture of a temperature sensitive platinum thin film resistance element

Country Status (1)

Country Link
DE (1) DE3167758D1 (en)

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee