JPS55121606A - Method of controlling resistance temperature coefficient of taalln thin film resistor - Google Patents

Method of controlling resistance temperature coefficient of taalln thin film resistor

Info

Publication number
JPS55121606A
JPS55121606A JP2876479A JP2876479A JPS55121606A JP S55121606 A JPS55121606 A JP S55121606A JP 2876479 A JP2876479 A JP 2876479A JP 2876479 A JP2876479 A JP 2876479A JP S55121606 A JPS55121606 A JP S55121606A
Authority
JP
Japan
Prior art keywords
taalln
thin film
temperature coefficient
film resistor
resistance temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2876479A
Other languages
Japanese (ja)
Other versions
JPS5724005B2 (en
Inventor
Minoru Terajima
Masataka Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2876479A priority Critical patent/JPS55121606A/en
Publication of JPS55121606A publication Critical patent/JPS55121606A/en
Publication of JPS5724005B2 publication Critical patent/JPS5724005B2/ja
Granted legal-status Critical Current

Links

JP2876479A 1979-03-14 1979-03-14 Method of controlling resistance temperature coefficient of taalln thin film resistor Granted JPS55121606A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2876479A JPS55121606A (en) 1979-03-14 1979-03-14 Method of controlling resistance temperature coefficient of taalln thin film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2876479A JPS55121606A (en) 1979-03-14 1979-03-14 Method of controlling resistance temperature coefficient of taalln thin film resistor

Publications (2)

Publication Number Publication Date
JPS55121606A true JPS55121606A (en) 1980-09-18
JPS5724005B2 JPS5724005B2 (en) 1982-05-21

Family

ID=12257465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2876479A Granted JPS55121606A (en) 1979-03-14 1979-03-14 Method of controlling resistance temperature coefficient of taalln thin film resistor

Country Status (1)

Country Link
JP (1) JPS55121606A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103971874A (en) * 2014-05-27 2014-08-06 广州天极电子科技有限公司 Method for regulating resistance of tantalum nitride thin-film resistor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS517825A (en) * 1974-07-01 1976-01-22 Shinshu Seiki Kk Purintano injishuryoshingo

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS517825A (en) * 1974-07-01 1976-01-22 Shinshu Seiki Kk Purintano injishuryoshingo

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103971874A (en) * 2014-05-27 2014-08-06 广州天极电子科技有限公司 Method for regulating resistance of tantalum nitride thin-film resistor

Also Published As

Publication number Publication date
JPS5724005B2 (en) 1982-05-21

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