JPS57101750A - Detecting element for combustible gas - Google Patents
Detecting element for combustible gasInfo
- Publication number
- JPS57101750A JPS57101750A JP17722080A JP17722080A JPS57101750A JP S57101750 A JPS57101750 A JP S57101750A JP 17722080 A JP17722080 A JP 17722080A JP 17722080 A JP17722080 A JP 17722080A JP S57101750 A JPS57101750 A JP S57101750A
- Authority
- JP
- Japan
- Prior art keywords
- film
- platinum
- semiconductor layer
- protecting film
- detecting element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
PURPOSE:To prevent the reaction between platinum and a semiconductor layer and to stabilize the resistance of the element by forming a protecting film on a platinum trimming film, and providing the semiconductor layer on said protecting film. CONSTITUTION:The protecting film of 10-15mu of aluminum cement or beryllia cement is formed on the platinum trimming film. The SnO2 series semiconductor layer is provided on the protecting film to detect the electric resistance of the platinum film. In this constitution of the element, the resistance value is stable, secular change does not occur, the sensitivity to alcohol or smoke is not found (characteristic 10 in the Figure), and the sensitivity to LNG, town gas, and LPG is high.
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17722080A JPS57101750A (en) | 1980-12-17 | 1980-12-17 | Detecting element for combustible gas |
US06/248,179 US4396899A (en) | 1980-04-16 | 1981-03-30 | Platinum thin film resistance element and production method therefor |
EP19820102641 EP0063264B1 (en) | 1980-04-16 | 1981-04-14 | Method for the manufacture of a temperature sensitive platinum thin film resistance element |
DE8282102641T DE3167758D1 (en) | 1980-04-16 | 1981-04-14 | Method for the manufacture of a temperature sensitive platinum thin film resistance element |
DE8181102856T DE3169227D1 (en) | 1980-04-16 | 1981-04-14 | Gas sensor |
EP19810102856 EP0038078B1 (en) | 1980-04-16 | 1981-04-14 | Gas sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17722080A JPS57101750A (en) | 1980-12-17 | 1980-12-17 | Detecting element for combustible gas |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57101750A true JPS57101750A (en) | 1982-06-24 |
Family
ID=16027253
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17722080A Pending JPS57101750A (en) | 1980-04-16 | 1980-12-17 | Detecting element for combustible gas |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57101750A (en) |
-
1980
- 1980-12-17 JP JP17722080A patent/JPS57101750A/en active Pending
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