DE3162741D1 - Plasma generator - Google Patents

Plasma generator

Info

Publication number
DE3162741D1
DE3162741D1 DE8181400557T DE3162741T DE3162741D1 DE 3162741 D1 DE3162741 D1 DE 3162741D1 DE 8181400557 T DE8181400557 T DE 8181400557T DE 3162741 T DE3162741 T DE 3162741T DE 3162741 D1 DE3162741 D1 DE 3162741D1
Authority
DE
Germany
Prior art keywords
plasma generator
plasma
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181400557T
Other languages
English (en)
Inventor
Emile Bloyet
Philippe Leprince
Jean Marec
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bpifrance Financement SA
Original Assignee
Agence National de Valorisation de la Recherche ANVAR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agence National de Valorisation de la Recherche ANVAR filed Critical Agence National de Valorisation de la Recherche ANVAR
Application granted granted Critical
Publication of DE3162741D1 publication Critical patent/DE3162741D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
DE8181400557T 1980-04-10 1981-04-07 Plasma generator Expired DE3162741D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8008073A FR2480552A1 (fr) 1980-04-10 1980-04-10 Generateur de plasmaŸ

Publications (1)

Publication Number Publication Date
DE3162741D1 true DE3162741D1 (en) 1984-04-26

Family

ID=9240714

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181400557T Expired DE3162741D1 (en) 1980-04-10 1981-04-07 Plasma generator

Country Status (6)

Country Link
US (2) US4473736A (de)
EP (1) EP0043740B1 (de)
JP (1) JPS575299A (de)
CA (1) CA1177543A (de)
DE (1) DE3162741D1 (de)
FR (1) FR2480552A1 (de)

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FR2533397A2 (fr) * 1982-09-16 1984-03-23 Anvar Perfectionnements aux torches a plasma
US4965540A (en) * 1987-12-23 1990-10-23 Hewlett-Packard Company Microwave resonant cavity
JP2805009B2 (ja) * 1988-05-11 1998-09-30 株式会社日立製作所 プラズマ発生装置及びプラズマ元素分析装置
GB8821672D0 (en) * 1988-09-02 1988-10-19 Emi Plc Thorn Discharge tube arrangement
GB8821673D0 (en) * 1988-09-02 1988-10-19 Emi Plc Thorn Discharge tube arrangement
GB8821671D0 (en) * 1988-09-02 1988-10-19 Emi Plc Thorn Discharge tube arrangement
US5083004A (en) * 1989-05-09 1992-01-21 Varian Associates, Inc. Spectroscopic plasma torch for microwave induced plasmas
US4968142A (en) * 1989-06-02 1990-11-06 The United States Of America As Represented By The United States Department Of Energy Closed inductively coupled plasma cell
US5227695A (en) * 1989-06-05 1993-07-13 Centre National De La Recherche Scientifique Device for coupling microwave energy with an exciter and for distributing it therealong for the purpose of producing a plasma
US5051557A (en) * 1989-06-07 1991-09-24 The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services Microwave induced plasma torch with tantalum injector probe
US5081397A (en) * 1989-07-11 1992-01-14 University Of British Columbia Atmospheric pressure capacitively coupled plasma atomizer for atomic absorption and source for atomic emission spectroscopy
NL8901806A (nl) * 1989-07-13 1991-02-01 Philips Nv Vermogensgenerator voor het leveren van een hoogfrequente hoogspanning.
JP2922223B2 (ja) * 1989-09-08 1999-07-19 株式会社日立製作所 マイクロ波プラズマ発生装置
GB9025695D0 (en) * 1990-11-27 1991-01-09 Welding Inst Gas plasma generating system
US5273587A (en) * 1992-09-04 1993-12-28 United Solar Systems Corporation Igniter for microwave energized plasma processing apparatus
US5565118A (en) * 1994-04-04 1996-10-15 Asquith; Joseph G. Self starting plasma plume igniter for aircraft jet engine
US5617717A (en) * 1994-04-04 1997-04-08 Aero-Plasma, Inc. Flame stabilization system for aircraft jet engine augmentor using plasma plume ignitors
AU2003195A (en) * 1994-06-21 1996-01-04 Boc Group, Inc., The Improved power distribution for multiple electrode plasma systems using quarter wavelength transmission lines
GB9414561D0 (en) * 1994-07-19 1994-09-07 Ea Tech Ltd Method of and apparatus for microwave-plasma production
TW285746B (de) * 1994-10-26 1996-09-11 Matsushita Electric Ind Co Ltd
US5793013A (en) * 1995-06-07 1998-08-11 Physical Sciences, Inc. Microwave-driven plasma spraying apparatus and method for spraying
US5963169A (en) * 1997-09-29 1999-10-05 The United States Of America As Represented By The Secretary Of The Navy Multiple tube plasma antenna
DE19814812C2 (de) 1998-04-02 2000-05-11 Mut Mikrowellen Umwelt Technol Plasmabrenner mit einem Mikrowellensender
FR2797372B1 (fr) * 1999-08-04 2002-10-25 Metal Process Procede de production de plasmas elementaires en vue de creer un plasma uniforme pour une surface d'utilisation et dispositif de production d'un tel plasma
US6624719B1 (en) 2000-04-05 2003-09-23 Asi Technology Corporation Reconfigurable electromagnetic waveguide
US6812895B2 (en) 2000-04-05 2004-11-02 Markland Technologies, Inc. Reconfigurable electromagnetic plasma waveguide used as a phase shifter and a horn antenna
US6369763B1 (en) 2000-04-05 2002-04-09 Asi Technology Corporation Reconfigurable plasma antenna
US7053576B2 (en) * 2001-07-19 2006-05-30 Correa Paulo N Energy conversion systems
DE10215660B4 (de) * 2002-04-09 2008-01-17 Eads Space Transportation Gmbh Hochfrequenz-Elektronenquelle, insbesondere Neutralisator
US7465362B2 (en) 2002-05-08 2008-12-16 Btu International, Inc. Plasma-assisted nitrogen surface-treatment
US7445817B2 (en) 2002-05-08 2008-11-04 Btu International Inc. Plasma-assisted formation of carbon structures
US7560657B2 (en) 2002-05-08 2009-07-14 Btu International Inc. Plasma-assisted processing in a manufacturing line
CN100505975C (zh) 2002-05-08 2009-06-24 Btu国际公司 等离子体辅助涂覆
US7638727B2 (en) 2002-05-08 2009-12-29 Btu International Inc. Plasma-assisted heat treatment
US7497922B2 (en) 2002-05-08 2009-03-03 Btu International, Inc. Plasma-assisted gas production
US7494904B2 (en) 2002-05-08 2009-02-24 Btu International, Inc. Plasma-assisted doping
US7498066B2 (en) 2002-05-08 2009-03-03 Btu International Inc. Plasma-assisted enhanced coating
US7432470B2 (en) 2002-05-08 2008-10-07 Btu International, Inc. Surface cleaning and sterilization
US6876330B2 (en) * 2002-07-17 2005-04-05 Markland Technologies, Inc. Reconfigurable antennas
US6710746B1 (en) 2002-09-30 2004-03-23 Markland Technologies, Inc. Antenna having reconfigurable length
US7189940B2 (en) 2002-12-04 2007-03-13 Btu International Inc. Plasma-assisted melting
US7164095B2 (en) * 2004-07-07 2007-01-16 Noritsu Koki Co., Ltd. Microwave plasma nozzle with enhanced plume stability and heating efficiency
US7271363B2 (en) * 2004-09-01 2007-09-18 Noritsu Koki Co., Ltd. Portable microwave plasma systems including a supply line for gas and microwaves
US7189939B2 (en) * 2004-09-01 2007-03-13 Noritsu Koki Co., Ltd. Portable microwave plasma discharge unit
WO2007013875A2 (en) * 2004-09-01 2007-02-01 Amarante Technologies, Inc. A portable microwave plasma discharge unit
US20080093358A1 (en) * 2004-09-01 2008-04-24 Amarante Technologies, Inc. Portable Microwave Plasma Discharge Unit
US20060052883A1 (en) * 2004-09-08 2006-03-09 Lee Sang H System and method for optimizing data acquisition of plasma using a feedback control module
KR100689037B1 (ko) * 2005-08-24 2007-03-08 삼성전자주식회사 마이크로파 공명 플라즈마 발생장치 및 그것을 구비하는플라즈마 처리 시스템
US9681529B1 (en) * 2006-01-06 2017-06-13 The United States Of America As Represented By The Secretary Of The Air Force Microwave adapting plasma torch module
US7619178B2 (en) * 2006-02-06 2009-11-17 Peschel William P Directly connected magnetron powered self starting plasma plume igniter
TW200742506A (en) * 2006-02-17 2007-11-01 Noritsu Koki Co Ltd Plasma generation apparatus and work process apparatus
JP5230976B2 (ja) * 2007-07-27 2013-07-10 株式会社プラズマアプリケーションズ 大気中マイクロ波プラズマニードル発生装置
US20100074810A1 (en) * 2008-09-23 2010-03-25 Sang Hun Lee Plasma generating system having tunable plasma nozzle
JP5586137B2 (ja) * 2008-09-30 2014-09-10 長野日本無線株式会社 プラズマ処理装置
US7921804B2 (en) * 2008-12-08 2011-04-12 Amarante Technologies, Inc. Plasma generating nozzle having impedance control mechanism
US20100201272A1 (en) * 2009-02-09 2010-08-12 Sang Hun Lee Plasma generating system having nozzle with electrical biasing
US20100254853A1 (en) * 2009-04-06 2010-10-07 Sang Hun Lee Method of sterilization using plasma generated sterilant gas
FR2952786B1 (fr) * 2009-11-17 2012-06-08 Centre Nat Rech Scient Torche a plasma et procede de stabilisation d'une torche a plasma
JP5868137B2 (ja) * 2011-11-18 2016-02-24 住友理工株式会社 マイクロ波プラズマ処理装置
US10477665B2 (en) * 2012-04-13 2019-11-12 Amastan Technologies Inc. Microwave plasma torch generating laminar flow for materials processing
AU2013290093B2 (en) * 2012-07-13 2017-09-21 Peter Morrisroe Torches and methods of using them
JP6323849B2 (ja) 2012-08-28 2018-05-16 アジレント・テクノロジーズ・インクＡｇｉｌｅｎｔ Ｔｅｃｈｎｏｌｏｇｉｅｓ， Ｉｎｃ． 電磁導波路およびプラズマ源を含む機器、プラズマ生成方法
JP5475902B2 (ja) * 2013-03-21 2014-04-16 株式会社プラズマアプリケーションズ 大気中マイクロ波プラズマニードル発生装置
KR102376982B1 (ko) * 2015-04-14 2022-03-21 삼성전자주식회사 세라믹을 이용하여 파티클 저감 효과를 가지는 원격 플라즈마 발생장치
FR3062770B1 (fr) 2017-02-06 2019-03-29 Polygon Physics Source de plasma

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US29304A (en) * 1860-07-24 Compensating lever-sprincr
NL264188A (de) * 1960-04-29
US3242798A (en) * 1962-01-13 1966-03-29 Hitachi Ltd Plasma light source for spectroscopic analysis
US3903891A (en) * 1968-01-12 1975-09-09 Hogle Kearns Int Method and apparatus for generating plasma
US3588594A (en) * 1968-01-19 1971-06-28 Hitachi Ltd Device for bending a plasma flame
FR2074715A7 (de) * 1970-01-19 1971-10-08 Dupret Christian
US3757518A (en) * 1970-11-03 1973-09-11 Messerschmitt Boelkow Blohm Ion engine
LU65047A1 (de) * 1972-03-27 1973-10-03
GB1356769A (en) * 1973-03-27 1974-06-12 Cit Alcatel Apparatus and method for depositing thin layers on a substrate
FR2290126A1 (fr) * 1974-10-31 1976-05-28 Anvar Perfectionnements apportes aux dispositifs d'excitation, par des ondes hf, d'une colonne de gaz enfermee dans une enveloppe
FR2346939A2 (fr) * 1975-10-31 1977-10-28 Anvar Perfectionnements aux dispositifs d'excitation, par des ondes hyperfrequences, d'une colonne de gaz dans une enveloppe allongee
JPS5939178B2 (ja) * 1977-04-25 1984-09-21 株式会社東芝 活性化ガス発生装置
US4230448A (en) * 1979-05-14 1980-10-28 Combustion Electromagnetics, Inc. Burner combustion improvements

Also Published As

Publication number Publication date
CA1177543A (fr) 1984-11-06
EP0043740A1 (de) 1982-01-13
US4473736A (en) 1984-09-25
EP0043740B1 (de) 1984-03-21
JPH0219600B2 (de) 1990-05-02
JPS575299A (en) 1982-01-12
FR2480552B1 (de) 1983-09-30
US4609808A (en) 1986-09-02
FR2480552A1 (fr) 1981-10-16

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee