FR3062770B1 - Source de plasma - Google Patents

Source de plasma Download PDF

Info

Publication number
FR3062770B1
FR3062770B1 FR1750978A FR1750978A FR3062770B1 FR 3062770 B1 FR3062770 B1 FR 3062770B1 FR 1750978 A FR1750978 A FR 1750978A FR 1750978 A FR1750978 A FR 1750978A FR 3062770 B1 FR3062770 B1 FR 3062770B1
Authority
FR
France
Prior art keywords
antenna
plasma
source
diameter
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1750978A
Other languages
English (en)
Other versions
FR3062770A1 (fr
Inventor
Pascal Sortais
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Polygon Physics
Original Assignee
Polygon Physics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1750978A priority Critical patent/FR3062770B1/fr
Application filed by Polygon Physics filed Critical Polygon Physics
Priority to PCT/FR2017/053798 priority patent/WO2018142036A1/fr
Priority to US16/480,063 priority patent/US10798810B2/en
Priority to PL17832280T priority patent/PL3578014T3/pl
Priority to EP17832280.6A priority patent/EP3578014B1/fr
Priority to DK17832280.6T priority patent/DK3578014T3/da
Priority to JP2019563692A priority patent/JP6847267B2/ja
Priority to KR1020197025109A priority patent/KR102526862B1/ko
Priority to CN201780085783.XA priority patent/CN110383957B/zh
Publication of FR3062770A1 publication Critical patent/FR3062770A1/fr
Application granted granted Critical
Publication of FR3062770B1 publication Critical patent/FR3062770B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/463—Microwave discharges using antennas or applicators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0815—Methods of ionisation
    • H01J2237/0817—Microwaves
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/4645—Radiofrequency discharges
    • H05H1/466—Radiofrequency discharges using capacitive coupling means, e.g. electrodes

Abstract

L'invention concerne une source de plasma comprenant une antenne (204) quart d'onde située dans une enceinte cylindrique (202) munie d'une ouverture (208) en face de l'extrémité de l'antenne (204), dans laquelle : le diamètre (d) de l'antenne (204) est compris entre le tiers et le quart du diamètre (d1) interne de l'enceinte (202), la distance (1) entre l'extrémité de l'antenne (204) et l'ouverture (208) est comprise entre 2/3 et 5/3 du diamètre (d) de l'antenne (204).
FR1750978A 2017-02-06 2017-02-06 Source de plasma Expired - Fee Related FR3062770B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR1750978A FR3062770B1 (fr) 2017-02-06 2017-02-06 Source de plasma
US16/480,063 US10798810B2 (en) 2017-02-06 2017-12-21 Plasma source
PL17832280T PL3578014T3 (pl) 2017-02-06 2017-12-21 Źródło plazmy
EP17832280.6A EP3578014B1 (fr) 2017-02-06 2017-12-21 Source de plasma
PCT/FR2017/053798 WO2018142036A1 (fr) 2017-02-06 2017-12-21 Source de plasma
DK17832280.6T DK3578014T3 (da) 2017-02-06 2017-12-21 Plasmakilde
JP2019563692A JP6847267B2 (ja) 2017-02-06 2017-12-21 プラズマ源
KR1020197025109A KR102526862B1 (ko) 2017-02-06 2017-12-21 플라즈마 소스
CN201780085783.XA CN110383957B (zh) 2017-02-06 2017-12-21 等离子体源

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1750978A FR3062770B1 (fr) 2017-02-06 2017-02-06 Source de plasma
FR1750978 2017-02-06

Publications (2)

Publication Number Publication Date
FR3062770A1 FR3062770A1 (fr) 2018-08-10
FR3062770B1 true FR3062770B1 (fr) 2019-03-29

Family

ID=58547698

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1750978A Expired - Fee Related FR3062770B1 (fr) 2017-02-06 2017-02-06 Source de plasma

Country Status (9)

Country Link
US (1) US10798810B2 (fr)
EP (1) EP3578014B1 (fr)
JP (1) JP6847267B2 (fr)
KR (1) KR102526862B1 (fr)
CN (1) CN110383957B (fr)
DK (1) DK3578014T3 (fr)
FR (1) FR3062770B1 (fr)
PL (1) PL3578014T3 (fr)
WO (1) WO2018142036A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3136104A1 (fr) 2022-05-30 2023-12-01 Polygon Physics Dispositif à faisceau d’électrons pour le traitement d’une surface

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3023055A1 (de) * 1979-07-12 1981-02-05 Emi Ltd Antenne
FR2480552A1 (fr) * 1980-04-10 1981-10-16 Anvar Generateur de plasmaŸ
US5361737A (en) * 1992-09-30 1994-11-08 West Virginia University Radio frequency coaxial cavity resonator as an ignition source and associated method
US7103460B1 (en) * 1994-05-09 2006-09-05 Automotive Technologies International, Inc. System and method for vehicle diagnostics
JPH09245658A (ja) 1996-03-12 1997-09-19 Nissin Electric Co Ltd 永久磁石によるｅｃｒ共鳴を利用するプラズマ生成機構
US5961772A (en) * 1997-01-23 1999-10-05 The Regents Of The University Of California Atmospheric-pressure plasma jet
US20070095823A1 (en) * 2005-10-27 2007-05-03 Sedlmayr Steven R Microwave nucleon-electron-bonding spin alignment and alteration of materials
CN100388559C (zh) * 2005-12-29 2008-05-14 上海交通大学 自重构等离子体天线
WO2009060213A1 (fr) * 2007-11-06 2009-05-14 Microoncology Limited Système de stérilisation de plasmas à micro-ondes et applicateurs associés
KR101012345B1 (ko) * 2008-08-26 2011-02-09 포항공과대학교 산학협력단 저 전력 휴대용 마이크로파 플라즈마 발생기
FR2937494B1 (fr) * 2008-10-17 2012-12-07 Centre Nat Rech Scient Source de plasma gazeux basse puissance
US20110248002A1 (en) * 2010-04-13 2011-10-13 General Electric Company Plasma generation apparatus
EP2928011B1 (fr) * 2014-04-02 2020-02-12 Andrew Wireless Systems GmbH Résonateur à cavité micro-ondes

Also Published As

Publication number Publication date
JP6847267B2 (ja) 2021-03-24
FR3062770A1 (fr) 2018-08-10
DK3578014T3 (da) 2020-11-30
PL3578014T3 (pl) 2021-05-31
WO2018142036A1 (fr) 2018-08-09
US20190394866A1 (en) 2019-12-26
KR20190109749A (ko) 2019-09-26
EP3578014B1 (fr) 2020-10-28
KR102526862B1 (ko) 2023-04-27
US10798810B2 (en) 2020-10-06
EP3578014A1 (fr) 2019-12-11
JP2020506526A (ja) 2020-02-27
CN110383957B (zh) 2021-09-17
CN110383957A (zh) 2019-10-25

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