DE3138161A1 - Verfahren zur bestimmung von geometrischen parametern der oberflaeche eines objektes und einrichtung zu dessen durchfuehrung - Google Patents
Verfahren zur bestimmung von geometrischen parametern der oberflaeche eines objektes und einrichtung zu dessen durchfuehrungInfo
- Publication number
- DE3138161A1 DE3138161A1 DE19813138161 DE3138161A DE3138161A1 DE 3138161 A1 DE3138161 A1 DE 3138161A1 DE 19813138161 DE19813138161 DE 19813138161 DE 3138161 A DE3138161 A DE 3138161A DE 3138161 A1 DE3138161 A1 DE 3138161A1
- Authority
- DE
- Germany
- Prior art keywords
- interference
- coordinate
- image
- recorded image
- coordinates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims description 48
- 238000001454 recorded image Methods 0.000 claims description 49
- 230000001427 coherent effect Effects 0.000 claims description 21
- 230000008569 process Effects 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 14
- 230000005855 radiation Effects 0.000 claims description 11
- 230000008859 change Effects 0.000 claims description 9
- 230000003993 interaction Effects 0.000 claims description 4
- 230000001617 migratory effect Effects 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000011081 inoculation Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 22
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000010287 polarization Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 241000208202 Linaceae Species 0.000 description 1
- 235000004431 Linum usitatissimum Nutrition 0.000 description 1
- AZFKQCNGMSSWDS-UHFFFAOYSA-N MCPA-thioethyl Chemical compound CCSC(=O)COC1=CC=C(Cl)C=C1C AZFKQCNGMSSWDS-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 235000013601 eggs Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 238000009304 pastoral farming Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005375 photometry Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000007873 sieving Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/167—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by projecting a pattern on the object
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/298,479 US4452534A (en) | 1981-09-01 | 1981-09-01 | Method of determining geometric parameters of object's surface and device therefor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE3138161A1 true DE3138161A1 (de) | 1983-04-14 |
Family
ID=23150702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19813138161 Withdrawn DE3138161A1 (de) | 1981-09-01 | 1981-09-25 | Verfahren zur bestimmung von geometrischen parametern der oberflaeche eines objektes und einrichtung zu dessen durchfuehrung |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US4452534A (https=) |
| DE (1) | DE3138161A1 (https=) |
| FR (1) | FR2513371A1 (https=) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4846576A (en) * | 1985-05-20 | 1989-07-11 | Fujitsu Limited | Method for measuring a three-dimensional position of an object |
| JPH0615968B2 (ja) * | 1986-08-11 | 1994-03-02 | 伍良 松本 | 立体形状測定装置 |
| US4794550A (en) * | 1986-10-15 | 1988-12-27 | Eastman Kodak Company | Extended-range moire contouring |
| US5085502A (en) * | 1987-04-30 | 1992-02-04 | Eastman Kodak Company | Method and apparatus for digital morie profilometry calibrated for accurate conversion of phase information into distance measurements in a plurality of directions |
| US4876455A (en) * | 1988-02-25 | 1989-10-24 | Westinghouse Electric Corp. | Fiber optic solder joint inspection system |
| US4981360A (en) * | 1989-05-10 | 1991-01-01 | Grumman Aerospace Corporation | Apparatus and method for projection moire mapping |
| US5025285A (en) * | 1989-05-10 | 1991-06-18 | Grumman Aerospace Corporation | Apparatus and method for shadow moire mapping |
| US5168412A (en) * | 1989-06-28 | 1992-12-01 | Toan Doan | Surface interference detector |
| US4988202A (en) * | 1989-06-28 | 1991-01-29 | Westinghouse Electric Corp. | Solder joint inspection system and method |
| WO1996002806A1 (en) * | 1994-07-20 | 1996-02-01 | Gudmunn Slettemoen | Optical two- and three-dimensional measuring of protrusions and convex surfaces |
| US7436524B2 (en) * | 2004-11-26 | 2008-10-14 | Olympus Corporation | Apparatus and method for three-dimensional measurement and program for allowing computer to execute method for three-dimensional measurement |
| US7492450B2 (en) * | 2005-10-24 | 2009-02-17 | General Electric Company | Methods and apparatus for inspecting an object |
| US20130278925A1 (en) * | 2012-04-19 | 2013-10-24 | Wen-Da Cheng | Detecting device and method for substrate |
| JP6112807B2 (ja) * | 2012-09-11 | 2017-04-12 | 株式会社キーエンス | 形状測定装置、形状測定方法および形状測定プログラム |
| JP6324114B2 (ja) | 2014-02-28 | 2018-05-16 | キヤノン株式会社 | 光学系および光沢計 |
| JP6324113B2 (ja) * | 2014-02-28 | 2018-05-16 | キヤノン株式会社 | 光学系および光沢計 |
| US10283419B2 (en) * | 2014-07-30 | 2019-05-07 | Ysystems, Ltd. | Method and apparatus for measuring surface profile |
| US20180023943A1 (en) * | 2016-07-21 | 2018-01-25 | Sony Corporation | Optical apparatuses and method of collecting three dimensional information of an object |
| TWI624643B (zh) * | 2016-08-19 | 2018-05-21 | 財團法人工業技術研究院 | 一種薄膜曲率量測裝置及其方法 |
| US11415409B1 (en) * | 2019-08-22 | 2022-08-16 | Charles S. Powers | Apparatuses and methods for measuring parameters of an object |
| CN118418034B (zh) * | 2024-07-05 | 2024-10-29 | 江苏元夫半导体科技有限公司 | 化学机械抛光的光学终点检测方法及相关设备 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2412359A1 (de) * | 1974-03-14 | 1975-09-25 | Dornier System Gmbh | Verfahren und geraet zur beruehrungslosen vermessung von objektkonturen |
| DE2620330A1 (de) * | 1975-05-09 | 1976-11-18 | Rolls Royce 1971 Ltd | Verfahren und vorrichtung zur bestimmung einer oberflaechengestalt |
| DE2528209A1 (de) * | 1975-06-25 | 1976-12-30 | Siegfried Dipl Ing Raith | Optischer profilabtaster |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3619064A (en) * | 1968-09-18 | 1971-11-09 | Trw Inc | Moire gauging systems |
| US3592548A (en) * | 1969-01-22 | 1971-07-13 | Gen Motors Corp | Holographic method of dimensional inspection |
| US3907438A (en) * | 1973-06-22 | 1975-09-23 | Gen Electric | Contour measuring system for cylinders |
| US3911733A (en) * | 1974-04-01 | 1975-10-14 | Trw Inc | Optical signature method and apparatus for structural integrity verification |
| US4030830A (en) * | 1976-01-05 | 1977-06-21 | Atlantic Research Corporation | Process and apparatus for sensing defects on a smooth surface |
| US4070683A (en) * | 1976-03-04 | 1978-01-24 | Altschuler Bruce R | Optical surface topography mapping system |
| US4139304A (en) * | 1977-02-10 | 1979-02-13 | National Research Development Corporation | Methods and apparatus for measuring variations in distance to a surface |
| US4272196A (en) * | 1979-01-12 | 1981-06-09 | Lasag S.A. | Optical sizing mask and process |
-
1981
- 1981-09-01 US US06/298,479 patent/US4452534A/en not_active Expired - Fee Related
- 1981-09-21 FR FR8117801A patent/FR2513371A1/fr active Granted
- 1981-09-25 DE DE19813138161 patent/DE3138161A1/de not_active Withdrawn
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2412359A1 (de) * | 1974-03-14 | 1975-09-25 | Dornier System Gmbh | Verfahren und geraet zur beruehrungslosen vermessung von objektkonturen |
| DE2620330A1 (de) * | 1975-05-09 | 1976-11-18 | Rolls Royce 1971 Ltd | Verfahren und vorrichtung zur bestimmung einer oberflaechengestalt |
| DE2528209A1 (de) * | 1975-06-25 | 1976-12-30 | Siegfried Dipl Ing Raith | Optischer profilabtaster |
Non-Patent Citations (1)
| Title |
|---|
| Born & Wolf, Principles of Optics, Aufl. 4, Oxford 1979, Pergamon Press * |
Also Published As
| Publication number | Publication date |
|---|---|
| US4452534A (en) | 1984-06-05 |
| FR2513371A1 (fr) | 1983-03-25 |
| FR2513371B1 (https=) | 1984-01-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8101 | Request for examination as to novelty | ||
| 8110 | Request for examination paragraph 44 | ||
| 8139 | Disposal/non-payment of the annual fee |