DE3124205C2 - - Google Patents

Info

Publication number
DE3124205C2
DE3124205C2 DE19813124205 DE3124205A DE3124205C2 DE 3124205 C2 DE3124205 C2 DE 3124205C2 DE 19813124205 DE19813124205 DE 19813124205 DE 3124205 A DE3124205 A DE 3124205A DE 3124205 C2 DE3124205 C2 DE 3124205C2
Authority
DE
Germany
Prior art keywords
pump
test gas
turbovacuum
detector
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19813124205
Other languages
German (de)
English (en)
Other versions
DE3124205A1 (de
Inventor
Hermann Balzers Li Mennenga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers Hochvakuum 6200 Wiesbaden De GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum 6200 Wiesbaden De GmbH filed Critical Balzers Hochvakuum 6200 Wiesbaden De GmbH
Priority to DE19813124205 priority Critical patent/DE3124205A1/de
Publication of DE3124205A1 publication Critical patent/DE3124205A1/de
Application granted granted Critical
Publication of DE3124205C2 publication Critical patent/DE3124205C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE19813124205 1981-06-19 1981-06-19 Lecksuchanordnung Granted DE3124205A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19813124205 DE3124205A1 (de) 1981-06-19 1981-06-19 Lecksuchanordnung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19813124205 DE3124205A1 (de) 1981-06-19 1981-06-19 Lecksuchanordnung

Publications (2)

Publication Number Publication Date
DE3124205A1 DE3124205A1 (de) 1982-12-30
DE3124205C2 true DE3124205C2 (fr) 1989-12-21

Family

ID=6134973

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19813124205 Granted DE3124205A1 (de) 1981-06-19 1981-06-19 Lecksuchanordnung

Country Status (1)

Country Link
DE (1) DE3124205A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4228148A1 (de) * 1992-08-25 1994-03-03 Leybold Ag Vakuum-Lecksuchgerät für die Testgaslecksuche mit leichten Gasen

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
JP2606568B2 (ja) * 1993-10-29 1997-05-07 株式会社島津製作所 リークデテクタ
DE4343912A1 (de) * 1993-12-22 1995-06-29 Leybold Ag Verfahren zum Betrieb eines mit einer Schnüffelleitung ausgerüsteten Testgaslecksuchers sowie für die Durchführung dieses Verfahrens geeigneter Testgaslecksucher
EP0718613B1 (fr) * 1994-12-23 2003-03-05 Unaxis Balzers Aktiengesellschaft Méthode pour l'analyse de gaz et analyseur de gaz
DE19504278A1 (de) * 1995-02-09 1996-08-14 Leybold Ag Testgas-Lecksuchgerät
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
DE10302987A1 (de) * 2003-01-25 2004-08-05 Inficon Gmbh Lecksuchgerät mit einem Einlass
DE10308420A1 (de) 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Testgaslecksuchgerät
DE10334455B4 (de) * 2003-07-29 2013-01-31 Pfeiffer Vacuum Gmbh Lecksuchverfahren und Lecksuchanordnung zur Durchführung des Verfahrens

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1648648C3 (de) * 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4228148A1 (de) * 1992-08-25 1994-03-03 Leybold Ag Vakuum-Lecksuchgerät für die Testgaslecksuche mit leichten Gasen

Also Published As

Publication number Publication date
DE3124205A1 (de) 1982-12-30

Similar Documents

Publication Publication Date Title
DE1648648C3 (de) Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
DE2049117A1 (de) Gasleckanzeigesystem
DE3124205C2 (fr)
EP0072892B1 (fr) Pompe turbomoléculaire permettant la recherche de fuites à contre-courant
DE69817650T2 (de) Spürgas-Leckdetektor
DE3227631A1 (de) Verfahren und vorrichtung zum messen von gaskomponenten im oel in einer mit oel gefuellten einrichtung
EP1205741A2 (fr) Pompe de détection de fuite
DE10319633A1 (de) Lecksuchgerät
DE3001868A1 (de) Kreiselpumpe mit doppelspiralgehaeuse
DE102016210701A1 (de) Massenspektrometrischer Lecksucher mit Turbomolekularpumpe und Boosterpumpe auf gemeinsamer Welle
DE4339060A1 (de) Getriebeverdichter für die Verdichtung von Sauerstoff
DE2536047A1 (de) Vorrichtung zur simulation unterschiedlicher luftdruecke
DE4228149A1 (de) Vakuum-Meßgerät für die integrale Dichtigkeitskontrolle mit leichten Gasen
DE646436C (de) Labyrinthdichtung fuer die Treibmittel umlaufender Maschinen
DE2933904C2 (de) Einlaufkrümmer
DE2807645A1 (de) Tauchpumpe mit einer verbesserten dichtungseinrichtung zur vermeidung unerwuenschter leckagen der gefoerderten fluessigkeit
DE4136950A1 (de) Mehrstufiges vakuumpumpsystem
DE1211003B (de) Einlasssystem fuer Massenspektrometer mit Probezufuehrung ueber eine Kapillare mit Drosselstelle und ein Einlassventil, mit Mitteln zur Vermeidung eines Druckstosses beim OEffnen des Ventils
DE4331779A1 (de) Verfahren und Vorrichtung zur Reduktion der Spaltstrommischverluste und der Spaltanregung von rotierenden thermischen Maschinen
DE3416562A1 (de) Wellendichtung
EP1249614B1 (fr) Pompe à effet visqueux avec une entrée de gaz additionnelle
DE2543502A1 (de) Verfahren zur feststellung eines lecks an brennstoffkassetten eines reaktors nebst anordnung zur durchfuehrung des verfahrens
DE3423917C2 (de) Abpumpkammer
DE10334455B4 (de) Lecksuchverfahren und Lecksuchanordnung zur Durchführung des Verfahrens
DE1167966C2 (de) Abdichtungsvorrichtung zwischen einer Gasumwaelzpumpe und dem fluessigkeitsgefuellten elektrischen Antriebsmotor

Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8363 Opposition against the patent
8327 Change in the person/name/address of the patent owner

Owner name: BALZERS AG, BALZERS, LI

8365 Fully valid after opposition proceedings