DE3013770A1 - Sensor - Google Patents
SensorInfo
- Publication number
- DE3013770A1 DE3013770A1 DE19803013770 DE3013770A DE3013770A1 DE 3013770 A1 DE3013770 A1 DE 3013770A1 DE 19803013770 DE19803013770 DE 19803013770 DE 3013770 A DE3013770 A DE 3013770A DE 3013770 A1 DE3013770 A1 DE 3013770A1
- Authority
- DE
- Germany
- Prior art keywords
- tongue
- fet
- resonance element
- damping
- externally attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/124—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by semiconductor devices comprising at least one PN junction, e.g. transistors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
- G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19803013770 DE3013770A1 (de) | 1980-04-10 | 1980-04-10 | Sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19803013770 DE3013770A1 (de) | 1980-04-10 | 1980-04-10 | Sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3013770A1 true DE3013770A1 (de) | 1981-10-29 |
DE3013770C2 DE3013770C2 (fr) | 1989-11-30 |
Family
ID=6099656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19803013770 Granted DE3013770A1 (de) | 1980-04-10 | 1980-04-10 | Sensor |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3013770A1 (fr) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2578323A1 (fr) * | 1985-03-01 | 1986-09-05 | Metravib Sa | Capteur integre de grandeurs mecaniques a effet capacitif et procede de fabrication. |
DE3515349A1 (de) * | 1985-04-27 | 1986-10-30 | Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn | Elektrischer geber zur messung mechanischer groessen |
FR2599833A1 (fr) * | 1986-06-10 | 1987-12-11 | Metravib Sa | Capteur de grandeurs mecaniques integre sur silicium et procede de fabrication |
DE4015038A1 (de) * | 1989-05-15 | 1990-11-22 | Mitsubishi Electric Corp | Vorrichtung zum ueberwachen des zuendzeitpunkts einer brennkraftmaschine |
EP0826967A1 (fr) * | 1996-09-02 | 1998-03-04 | STMicroelectronics S.r.l. | Capteur d'accélération à semi-conducteur |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3413573A (en) * | 1965-06-18 | 1968-11-26 | Westinghouse Electric Corp | Microelectronic frequency selective apparatus with vibratory member and means responsive thereto |
DE2801969A1 (de) * | 1978-01-18 | 1979-07-19 | Bosch Gmbh Robert | Sensor fuer schwingungen |
DE2829246A1 (de) * | 1978-07-04 | 1980-01-17 | Bosch Gmbh Robert | Einrichtung zur erfassung der beim klopfen einer brennkraftmaschine auftretenden schwingungen |
-
1980
- 1980-04-10 DE DE19803013770 patent/DE3013770A1/de active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3413573A (en) * | 1965-06-18 | 1968-11-26 | Westinghouse Electric Corp | Microelectronic frequency selective apparatus with vibratory member and means responsive thereto |
DE2801969A1 (de) * | 1978-01-18 | 1979-07-19 | Bosch Gmbh Robert | Sensor fuer schwingungen |
DE2829246A1 (de) * | 1978-07-04 | 1980-01-17 | Bosch Gmbh Robert | Einrichtung zur erfassung der beim klopfen einer brennkraftmaschine auftretenden schwingungen |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2578323A1 (fr) * | 1985-03-01 | 1986-09-05 | Metravib Sa | Capteur integre de grandeurs mecaniques a effet capacitif et procede de fabrication. |
EP0194953A1 (fr) * | 1985-03-01 | 1986-09-17 | Metravib S.A. | Capteur intégré de grandeurs mécaniques à effet capacitif et procédé de fabrication |
DE3515349A1 (de) * | 1985-04-27 | 1986-10-30 | Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn | Elektrischer geber zur messung mechanischer groessen |
FR2581178A1 (fr) * | 1985-04-27 | 1986-10-31 | Messerschmitt Boelkow Blohm | Capteur electrique pour mesurer des grandeurs mecaniques |
FR2599833A1 (fr) * | 1986-06-10 | 1987-12-11 | Metravib Sa | Capteur de grandeurs mecaniques integre sur silicium et procede de fabrication |
WO1987007729A1 (fr) * | 1986-06-10 | 1987-12-17 | Metravib R.D.S. | Capteur de grandeurs mecaniques integre sur silicium et procede de fabrication |
DE4015038A1 (de) * | 1989-05-15 | 1990-11-22 | Mitsubishi Electric Corp | Vorrichtung zum ueberwachen des zuendzeitpunkts einer brennkraftmaschine |
EP0826967A1 (fr) * | 1996-09-02 | 1998-03-04 | STMicroelectronics S.r.l. | Capteur d'accélération à semi-conducteur |
Also Published As
Publication number | Publication date |
---|---|
DE3013770C2 (fr) | 1989-11-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |