DE3013770A1 - Sensor - Google Patents

Sensor

Info

Publication number
DE3013770A1
DE3013770A1 DE19803013770 DE3013770A DE3013770A1 DE 3013770 A1 DE3013770 A1 DE 3013770A1 DE 19803013770 DE19803013770 DE 19803013770 DE 3013770 A DE3013770 A DE 3013770A DE 3013770 A1 DE3013770 A1 DE 3013770A1
Authority
DE
Germany
Prior art keywords
tongue
fet
resonance element
damping
externally attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19803013770
Other languages
German (de)
English (en)
Other versions
DE3013770C2 (fr
Inventor
Kurt Dr.-Ing. 7000 Stuttgart Binder
Theodor Prof. Dr.-Ing. 1000 Berlin Gast
Günter Dipl.-Ing. 7257 Ditzingen Hönig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE19803013770 priority Critical patent/DE3013770A1/de
Publication of DE3013770A1 publication Critical patent/DE3013770A1/de
Application granted granted Critical
Publication of DE3013770C2 publication Critical patent/DE3013770C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/124—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by semiconductor devices comprising at least one PN junction, e.g. transistors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
    • G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measuring Fluid Pressure (AREA)
DE19803013770 1980-04-10 1980-04-10 Sensor Granted DE3013770A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19803013770 DE3013770A1 (de) 1980-04-10 1980-04-10 Sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803013770 DE3013770A1 (de) 1980-04-10 1980-04-10 Sensor

Publications (2)

Publication Number Publication Date
DE3013770A1 true DE3013770A1 (de) 1981-10-29
DE3013770C2 DE3013770C2 (fr) 1989-11-30

Family

ID=6099656

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19803013770 Granted DE3013770A1 (de) 1980-04-10 1980-04-10 Sensor

Country Status (1)

Country Link
DE (1) DE3013770A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2578323A1 (fr) * 1985-03-01 1986-09-05 Metravib Sa Capteur integre de grandeurs mecaniques a effet capacitif et procede de fabrication.
DE3515349A1 (de) * 1985-04-27 1986-10-30 Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn Elektrischer geber zur messung mechanischer groessen
FR2599833A1 (fr) * 1986-06-10 1987-12-11 Metravib Sa Capteur de grandeurs mecaniques integre sur silicium et procede de fabrication
DE4015038A1 (de) * 1989-05-15 1990-11-22 Mitsubishi Electric Corp Vorrichtung zum ueberwachen des zuendzeitpunkts einer brennkraftmaschine
EP0826967A1 (fr) * 1996-09-02 1998-03-04 STMicroelectronics S.r.l. Capteur d'accélération à semi-conducteur

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3413573A (en) * 1965-06-18 1968-11-26 Westinghouse Electric Corp Microelectronic frequency selective apparatus with vibratory member and means responsive thereto
DE2801969A1 (de) * 1978-01-18 1979-07-19 Bosch Gmbh Robert Sensor fuer schwingungen
DE2829246A1 (de) * 1978-07-04 1980-01-17 Bosch Gmbh Robert Einrichtung zur erfassung der beim klopfen einer brennkraftmaschine auftretenden schwingungen

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3413573A (en) * 1965-06-18 1968-11-26 Westinghouse Electric Corp Microelectronic frequency selective apparatus with vibratory member and means responsive thereto
DE2801969A1 (de) * 1978-01-18 1979-07-19 Bosch Gmbh Robert Sensor fuer schwingungen
DE2829246A1 (de) * 1978-07-04 1980-01-17 Bosch Gmbh Robert Einrichtung zur erfassung der beim klopfen einer brennkraftmaschine auftretenden schwingungen

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2578323A1 (fr) * 1985-03-01 1986-09-05 Metravib Sa Capteur integre de grandeurs mecaniques a effet capacitif et procede de fabrication.
EP0194953A1 (fr) * 1985-03-01 1986-09-17 Metravib S.A. Capteur intégré de grandeurs mécaniques à effet capacitif et procédé de fabrication
DE3515349A1 (de) * 1985-04-27 1986-10-30 Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn Elektrischer geber zur messung mechanischer groessen
FR2581178A1 (fr) * 1985-04-27 1986-10-31 Messerschmitt Boelkow Blohm Capteur electrique pour mesurer des grandeurs mecaniques
FR2599833A1 (fr) * 1986-06-10 1987-12-11 Metravib Sa Capteur de grandeurs mecaniques integre sur silicium et procede de fabrication
WO1987007729A1 (fr) * 1986-06-10 1987-12-17 Metravib R.D.S. Capteur de grandeurs mecaniques integre sur silicium et procede de fabrication
DE4015038A1 (de) * 1989-05-15 1990-11-22 Mitsubishi Electric Corp Vorrichtung zum ueberwachen des zuendzeitpunkts einer brennkraftmaschine
EP0826967A1 (fr) * 1996-09-02 1998-03-04 STMicroelectronics S.r.l. Capteur d'accélération à semi-conducteur

Also Published As

Publication number Publication date
DE3013770C2 (fr) 1989-11-30

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee