DE3013770C2 - - Google Patents

Info

Publication number
DE3013770C2
DE3013770C2 DE3013770A DE3013770A DE3013770C2 DE 3013770 C2 DE3013770 C2 DE 3013770C2 DE 3013770 A DE3013770 A DE 3013770A DE 3013770 A DE3013770 A DE 3013770A DE 3013770 C2 DE3013770 C2 DE 3013770C2
Authority
DE
Germany
Prior art keywords
tongue
fet structure
resonant
output signal
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3013770A
Other languages
German (de)
English (en)
Other versions
DE3013770A1 (de
Inventor
Guenter Dipl.-Ing. 7257 Ditzingen De Hoenig
Kurt Dr.-Ing. 7000 Stuttgart De Binder
Theodor Prof. Dr.-Ing. 1000 Berlin De Gast
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE19803013770 priority Critical patent/DE3013770A1/de
Publication of DE3013770A1 publication Critical patent/DE3013770A1/de
Application granted granted Critical
Publication of DE3013770C2 publication Critical patent/DE3013770C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/124—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by semiconductor devices comprising at least one PN junction, e.g. transistors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
    • G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measuring Fluid Pressure (AREA)
DE19803013770 1980-04-10 1980-04-10 Sensor Granted DE3013770A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19803013770 DE3013770A1 (de) 1980-04-10 1980-04-10 Sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803013770 DE3013770A1 (de) 1980-04-10 1980-04-10 Sensor

Publications (2)

Publication Number Publication Date
DE3013770A1 DE3013770A1 (de) 1981-10-29
DE3013770C2 true DE3013770C2 (fr) 1989-11-30

Family

ID=6099656

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19803013770 Granted DE3013770A1 (de) 1980-04-10 1980-04-10 Sensor

Country Status (1)

Country Link
DE (1) DE3013770A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2578323B1 (fr) * 1985-03-01 1987-11-20 Metravib Sa Capteur integre de grandeurs mecaniques a effet capacitif et procede de fabrication.
DE3515349A1 (de) * 1985-04-27 1986-10-30 Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn Elektrischer geber zur messung mechanischer groessen
FR2599833B1 (fr) * 1986-06-10 1992-02-14 Metravib Sa Capteur de grandeurs mecaniques integre sur silicium et procede de fabrication
US5070843A (en) * 1989-05-15 1991-12-10 Mitsubishi Denki Kabushiki Kaisha Ignition timing control apparatus of internal-combustion engine
EP0826967A1 (fr) * 1996-09-02 1998-03-04 STMicroelectronics S.r.l. Capteur d'accélération à semi-conducteur

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3413573A (en) * 1965-06-18 1968-11-26 Westinghouse Electric Corp Microelectronic frequency selective apparatus with vibratory member and means responsive thereto
DE2801969C2 (de) * 1978-01-18 1982-11-04 Robert Bosch Gmbh, 7000 Stuttgart Sensor für Schwingungen
DE2829246A1 (de) * 1978-07-04 1980-01-17 Bosch Gmbh Robert Einrichtung zur erfassung der beim klopfen einer brennkraftmaschine auftretenden schwingungen

Also Published As

Publication number Publication date
DE3013770A1 (de) 1981-10-29

Similar Documents

Publication Publication Date Title
DE4118793C2 (de) Vorrichtung zur Feststellung und/oder Überwachung eines vorbestimmten Füllstandes in einem Behälter
EP0449023B1 (fr) Dispositif pour détecter et/ou surveiller un niveau prédéterminé dans un récipient
DE2801969C2 (de) Sensor für Schwingungen
EP0925617B1 (fr) Jonction d'un guide d'ondes sur une ligne triplaque
DE3878473T2 (de) Wandler fuer fluessigkeiten.
EP0734532B1 (fr) Capteur de vitesse de rotation
DE69327224T2 (de) Koordinateneingabegerät
DE3828591C2 (de) Einspritzventil für Brennkraftmaschinen
DE2906407C2 (de) Piezoelektrisches Wandlerelement zum Einbau in Druck-, Kraft- oder Beschleunigungsaufnehmer
EP0238942B1 (fr) Système hydraulique à fluides électrovisqueux commandé par capteur
DE2424326C2 (de) Flüssigkeitspegeldetektor
DE112004002297T5 (de) Drucksensoreinrichtung
DE3026114A1 (de) Vorrichtung zur schwingungsisolierung der fahrerkabine eines schleppers
EP0140066A1 (fr) Dispositif pour la détection de forces, tensions resp. des accélérations de machines, appareils ou similaires
DE3013770C2 (fr)
DE3844354A1 (de) Messvorrichtung zur messung der masse eines stroemenden mediums
DE69930652T2 (de) Monolithischer miniatur-beschleunigungssensor
EP0769683A2 (fr) Système de surveillance d'un niveau prédéterminé d'un fluide dans un récipient
DE3026394A1 (de) Schwingungssensor
DE3201755C2 (de) Piezoelektrischer Klopfsensor für Brennkraftmaschinen
DE4201360C2 (de) Einrichtung zur Füllstandsmessung
DE10058986A1 (de) Körperschallsensorvorrichtung für ein Fahrzeug
DE4401313B4 (de) Piezoelektrischer, in Resonanz schwingender Klopfsensor für eine Verbrennungskraftmaschine
DE2952580A1 (de) Klopfsensor zum nachweis des klopfens von kraftfahrzeugmotoren
WO2007054397A1 (fr) Capteur d'acceleration et garniture de pare-chocs

Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee