DE2929911A1 - Augerelektronenspektroskop mit einem augeranalysator mit magnetischer linse - Google Patents
Augerelektronenspektroskop mit einem augeranalysator mit magnetischer linseInfo
- Publication number
- DE2929911A1 DE2929911A1 DE19792929911 DE2929911A DE2929911A1 DE 2929911 A1 DE2929911 A1 DE 2929911A1 DE 19792929911 DE19792929911 DE 19792929911 DE 2929911 A DE2929911 A DE 2929911A DE 2929911 A1 DE2929911 A1 DE 2929911A1
- Authority
- DE
- Germany
- Prior art keywords
- charged particles
- housing
- electron spectroscope
- auger electron
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims description 70
- 230000005855 radiation Effects 0.000 claims description 8
- 230000005684 electric field Effects 0.000 claims description 5
- 238000001941 electron spectroscopy Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000000682 scanning probe acoustic microscopy Methods 0.000 claims description 2
- 238000003825 pressing Methods 0.000 claims 2
- 101100064676 Mus musculus Edem1 gene Proteins 0.000 claims 1
- 238000004458 analytical method Methods 0.000 claims 1
- 238000003306 harvesting Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 239000000523 sample Substances 0.000 description 14
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000004611 spectroscopical analysis Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000002784 hot electron Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- FAYUQEZUGGXARF-UHFFFAOYSA-N lanthanum tungsten Chemical compound [La].[W] FAYUQEZUGGXARF-UHFFFAOYSA-N 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/025—Detectors specially adapted to particle spectrometers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/938,842 US4205226A (en) | 1978-09-01 | 1978-09-01 | Auger electron spectroscopy |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2929911A1 true DE2929911A1 (de) | 1980-03-13 |
| DE2929911C2 DE2929911C2 (enrdf_load_stackoverflow) | 1992-10-29 |
Family
ID=25472052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19792929911 Granted DE2929911A1 (de) | 1978-09-01 | 1979-07-24 | Augerelektronenspektroskop mit einem augeranalysator mit magnetischer linse |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US4205226A (enrdf_load_stackoverflow) |
| JP (1) | JPS5535291A (enrdf_load_stackoverflow) |
| DE (1) | DE2929911A1 (enrdf_load_stackoverflow) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4345152A (en) * | 1980-08-11 | 1982-08-17 | The Perkin-Elmer Corporation | Magnetic lens |
| JPS59112707U (ja) * | 1982-08-25 | 1984-07-30 | 山田機械工業株式会社 | 結束機械の結び目形成用ビ−ク |
| JPS6037644A (ja) * | 1983-08-10 | 1985-02-27 | Anelva Corp | 表面分析装置 |
| JPS6091544A (ja) * | 1983-10-24 | 1985-05-22 | Anelva Corp | オ−ジエ分析装置 |
| GB8527438D0 (en) * | 1985-11-07 | 1985-12-11 | Vg Instr Group | Charged particle energy analyser |
| NL8801163A (nl) * | 1988-05-04 | 1989-12-01 | Philips Nv | Auger spectrometrie. |
| US5032724A (en) * | 1990-08-09 | 1991-07-16 | The Perkin-Elmer Corporation | Multichannel charged-particle analyzer |
| US5506413A (en) * | 1994-07-08 | 1996-04-09 | The United States Of America As Represented By The Secretary Of The Air Force | Spatial-focus energy analyzer |
| US5541410A (en) * | 1995-07-11 | 1996-07-30 | Board Of Regents, University Of Nebraska-Lincoln | Reduced diameter retractable cylindrical mirror analyzer |
| US6184523B1 (en) | 1998-07-14 | 2001-02-06 | Board Of Regents Of The University Of Nebraska | High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use |
| US6797951B1 (en) | 2002-11-12 | 2004-09-28 | The United States Of America As Represented By The Secretary Of The Air Force | Laminated electrostatic analyzer |
| JP4789260B2 (ja) * | 2006-08-23 | 2011-10-12 | エスアイアイ・ナノテクノロジー株式会社 | 荷電粒子ビーム装置及びアパーチャの軸調整方法 |
| US8071942B2 (en) | 2009-03-20 | 2011-12-06 | Physical Electronics USA, Inc. | Sample holder apparatus to reduce energy of electrons in an analyzer system and method |
| DE102013006535A1 (de) * | 2013-04-15 | 2014-10-30 | Carl Zeiss Microscopy Gmbh | Raster-Partikelstrahlmikroskop mit energiefilterndem Detektorsystem |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3920990A (en) * | 1973-05-08 | 1975-11-18 | Philips Corp | Device for analysing a surface layer by means of ion scattering |
| DE2705430A1 (de) * | 1976-02-09 | 1977-08-18 | Hitachi Ltd | Elektrostatischer analysator fuer geladene teilchen |
| US4048498A (en) * | 1976-09-01 | 1977-09-13 | Physical Electronics Industries, Inc. | Scanning auger microprobe with variable axial aperture |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL99154C (enrdf_load_stackoverflow) * | 1958-09-13 | |||
| DE1925330B1 (de) * | 1969-05-16 | 1970-10-22 | Siemens Ag | Korpuskularstrahlgeraet mit Informationsspeicherung |
| DE2223367C3 (de) * | 1972-05-12 | 1978-11-30 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen | Mikrostrahlsonde zur quantitativen Erfassung von geladenen Sekundärteilchen |
| US4100409A (en) * | 1973-02-02 | 1978-07-11 | U.S. Phillips Corporation | Device for analyzing a surface layer by means of ion scattering |
| US4107526A (en) * | 1976-03-22 | 1978-08-15 | Minnesota Mining And Manufacturing Company | Ion scattering spectrometer with modified bias |
| JPS5350794A (en) * | 1976-10-19 | 1978-05-09 | Hitachi Ltd | Analytical apparatus of secondary electron energy |
-
1978
- 1978-09-01 US US05/938,842 patent/US4205226A/en not_active Expired - Lifetime
-
1979
- 1979-05-04 JP JP5517479A patent/JPS5535291A/ja active Granted
- 1979-07-24 DE DE19792929911 patent/DE2929911A1/de active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3920990A (en) * | 1973-05-08 | 1975-11-18 | Philips Corp | Device for analysing a surface layer by means of ion scattering |
| DE2705430A1 (de) * | 1976-02-09 | 1977-08-18 | Hitachi Ltd | Elektrostatischer analysator fuer geladene teilchen |
| US4048498A (en) * | 1976-09-01 | 1977-09-13 | Physical Electronics Industries, Inc. | Scanning auger microprobe with variable axial aperture |
Non-Patent Citations (2)
| Title |
|---|
| JP 53-64093 (Übersetzung des Abstracts der JP-Patentanmeldung) * |
| Meßtechnik 7/70, 78 Jg., S. 133-137 * |
Also Published As
| Publication number | Publication date |
|---|---|
| US4205226A (en) | 1980-05-27 |
| JPH0226183B2 (enrdf_load_stackoverflow) | 1990-06-07 |
| JPS5535291A (en) | 1980-03-12 |
| DE2929911C2 (enrdf_load_stackoverflow) | 1992-10-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8128 | New person/name/address of the agent |
Representative=s name: GRUENECKER, A., DIPL.-ING. KINKELDEY, H., DIPL.-IN |
|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: PHYSICAL ELECTRONICS, INC., EDEN PRAIRIE, MINN., U |
|
| 8339 | Ceased/non-payment of the annual fee |