DE2862132D1 - Device for implanting strong-current ions, comprising electrostatic deflection plates and magnetic refocussing means - Google Patents

Device for implanting strong-current ions, comprising electrostatic deflection plates and magnetic refocussing means

Info

Publication number
DE2862132D1
DE2862132D1 DE7878400255T DE2862132T DE2862132D1 DE 2862132 D1 DE2862132 D1 DE 2862132D1 DE 7878400255 T DE7878400255 T DE 7878400255T DE 2862132 T DE2862132 T DE 2862132T DE 2862132 D1 DE2862132 D1 DE 2862132D1
Authority
DE
Germany
Prior art keywords
implanting
strong
magnetic
deflection plates
electrostatic deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE7878400255T
Other languages
English (en)
Inventor
Jean Camplan
Jacques Chaumont
Robert Meunier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bpifrance Financement SA
Original Assignee
Agence National de Valorisation de la Recherche ANVAR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agence National de Valorisation de la Recherche ANVAR filed Critical Agence National de Valorisation de la Recherche ANVAR
Application granted granted Critical
Publication of DE2862132D1 publication Critical patent/DE2862132D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
DE7878400255T 1977-12-23 1978-12-21 Device for implanting strong-current ions, comprising electrostatic deflection plates and magnetic refocussing means Expired DE2862132D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7739059A FR2412939A1 (fr) 1977-12-23 1977-12-23 Implanteur d'ions a fort courant

Publications (1)

Publication Number Publication Date
DE2862132D1 true DE2862132D1 (en) 1983-01-20

Family

ID=9199298

Family Applications (1)

Application Number Title Priority Date Filing Date
DE7878400255T Expired DE2862132D1 (en) 1977-12-23 1978-12-21 Device for implanting strong-current ions, comprising electrostatic deflection plates and magnetic refocussing means

Country Status (5)

Country Link
US (1) US4254340A (de)
EP (1) EP0002990B1 (de)
JP (1) JPS54100665A (de)
DE (1) DE2862132D1 (de)
FR (1) FR2412939A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4283631A (en) * 1980-02-22 1981-08-11 Varian Associates, Inc. Bean scanning and method of use for ion implantation
JPS58106823A (ja) * 1981-12-18 1983-06-25 Toshiba Corp イオン注入方法
FR2532112A1 (fr) * 1982-08-17 1984-02-24 Commissariat Energie Atomique Procede pour faire varier en fonction du temps la trajectoire d'un faisceau de particules chargees
JPH0724209B2 (ja) * 1985-03-08 1995-03-15 日新電機株式会社 イオン注入装置
AU578707B2 (en) * 1985-05-17 1988-11-03 Air Products And Chemicals Inc. Ion implant using alkali or alkaline earth metal tetrafluoroborate as boron ion source
US4672210A (en) * 1985-09-03 1987-06-09 Eaton Corporation Ion implanter target chamber
US5311028A (en) * 1990-08-29 1994-05-10 Nissin Electric Co., Ltd. System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions
JPH08212965A (ja) * 1995-01-31 1996-08-20 Ulvac Japan Ltd イオン注入装置
US6423976B1 (en) * 1999-05-28 2002-07-23 Applied Materials, Inc. Ion implanter and a method of implanting ions
US6881966B2 (en) * 2003-05-15 2005-04-19 Axcelis Technologies, Inc. Hybrid magnetic/electrostatic deflector for ion implantation systems
US20080073559A1 (en) * 2003-12-12 2008-03-27 Horsky Thomas N Controlling the flow of vapors sublimated from solids
US20080223409A1 (en) * 2003-12-12 2008-09-18 Horsky Thomas N Method and apparatus for extending equipment uptime in ion implantation
KR101160642B1 (ko) * 2003-12-12 2012-06-28 세미이큅, 인코포레이티드 고체로부터 승화된 증기의 유동제어
JP5214090B2 (ja) * 2004-11-30 2013-06-19 株式会社Ｓｅｎ ビーム偏向走査方法及びビーム偏向走査装置並びにイオン注入方法及びイオン注入装置
US7358510B2 (en) * 2006-03-27 2008-04-15 Varian Semiconductor Equipment Associates, Inc. Ion implanter with variable scan frequency
JP4946256B2 (ja) * 2006-08-11 2012-06-06 日新イオン機器株式会社 電界レンズおよびそれを備えるイオン注入装置
JP5329050B2 (ja) * 2007-04-20 2013-10-30 株式会社Ｓｅｎ ビーム処理装置
WO2009039382A1 (en) * 2007-09-21 2009-03-26 Semequip. Inc. Method for extending equipment uptime in ion implantation
JP6161571B2 (ja) * 2014-05-26 2017-07-12 住友重機械イオンテクノロジー株式会社 イオン注入装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3202817A (en) * 1962-12-18 1965-08-24 Roger L Belbeoch Polyenergetic particle deflecting system
NL6807439A (de) * 1968-05-27 1969-12-01
US3786359A (en) * 1969-03-28 1974-01-15 Alpha Ind Inc Ion accelerator and ion species selector
US3588717A (en) * 1969-06-23 1971-06-28 Kev Electronics Corp Beam scanner with deflection plate capacitance feedback for producing linear deflection
FR2133315A5 (de) * 1971-04-16 1972-11-24 Thomson Csf
DE2326279A1 (de) * 1973-05-23 1974-12-19 Siemens Ag Ionenstrahlschnellschaltung zur erzielung definierter festkoerperdotierungen durch ionenimplantation
US4075488A (en) * 1974-09-06 1978-02-21 Agency Of Industrial Science & Technology Pattern forming apparatus using quadrupole lenses
JPS5129091A (ja) * 1974-09-06 1976-03-11 Kogyo Gijutsuin Pataankeiseisochi
FR2298880A1 (fr) * 1975-01-22 1976-08-20 Commissariat Energie Atomique Procede et dispositif d'implantation ionique
US3997846A (en) * 1975-06-30 1976-12-14 International Business Machines Corporation Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus
US4013891A (en) * 1975-12-15 1977-03-22 Ibm Corporation Method for varying the diameter of a beam of charged particles
US4063098A (en) * 1976-10-07 1977-12-13 Industrial Coils, Inc. Beam scanning system
CH607836A5 (de) * 1976-12-27 1978-11-15 Balzers Hochvakuum

Also Published As

Publication number Publication date
EP0002990B1 (de) 1982-12-15
JPS54100665A (en) 1979-08-08
US4254340A (en) 1981-03-03
FR2412939B1 (de) 1980-08-22
FR2412939A1 (fr) 1979-07-20
EP0002990A1 (de) 1979-07-11
JPS6231781B2 (de) 1987-07-10

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee