Search tools Text Classification Chemistry Measure Numbers Full documents Title Abstract Claims All Any Exact Not Add AND condition These CPCs and their children These exact CPCs Add AND condition
Exact Exact Batch Similar Substructure Substructure (SMARTS) Full documents Claims only Add AND condition
Add AND condition
Application Numbers Publication Numbers Either Add AND condition

Classifications

H01L21/68764 Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
View 3 more classifications

Landscapes

Show more

CH607836A5

Switzerland

Inventor
Martin Maerk

Worldwide applications
1976 CH 1977 NL GB DE US FR

Application CH1634276A events