DE2854693A1 - Geraet und verfahren fuer die roentgenlithographie - Google Patents

Geraet und verfahren fuer die roentgenlithographie

Info

Publication number
DE2854693A1
DE2854693A1 DE19782854693 DE2854693A DE2854693A1 DE 2854693 A1 DE2854693 A1 DE 2854693A1 DE 19782854693 DE19782854693 DE 19782854693 DE 2854693 A DE2854693 A DE 2854693A DE 2854693 A1 DE2854693 A1 DE 2854693A1
Authority
DE
Germany
Prior art keywords
resist
development
tungsten
developer
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19782854693
Other languages
German (de)
English (en)
Inventor
William Derek Buckley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Biosystems Inc
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Publication of DE2854693A1 publication Critical patent/DE2854693A1/de
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2037—Exposure with X-ray radiation or corpuscular radiation, through a mask with a pattern opaque to that radiation
    • G03F7/2039—X-ray radiation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/167—X-ray
    • Y10S430/168—X-ray exposure process

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Radiography Using Non-Light Waves (AREA)
  • Silver Salt Photography Or Processing Solution Therefor (AREA)
  • X-Ray Techniques (AREA)
DE19782854693 1978-01-16 1978-12-18 Geraet und verfahren fuer die roentgenlithographie Ceased DE2854693A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/869,541 US4215192A (en) 1978-01-16 1978-01-16 X-ray lithography apparatus and method of use

Publications (1)

Publication Number Publication Date
DE2854693A1 true DE2854693A1 (de) 1979-07-19

Family

ID=25353753

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19782854693 Ceased DE2854693A1 (de) 1978-01-16 1978-12-18 Geraet und verfahren fuer die roentgenlithographie

Country Status (8)

Country Link
US (1) US4215192A (US20100012521A1-20100121-C00001.png)
JP (1) JPS54103346A (US20100012521A1-20100121-C00001.png)
CA (1) CA1118914A (US20100012521A1-20100121-C00001.png)
CH (1) CH652236A5 (US20100012521A1-20100121-C00001.png)
DE (1) DE2854693A1 (US20100012521A1-20100121-C00001.png)
FR (1) FR2414791A1 (US20100012521A1-20100121-C00001.png)
GB (2) GB2012452B (US20100012521A1-20100121-C00001.png)
IT (1) IT1114336B (US20100012521A1-20100121-C00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3330806A1 (de) * 1983-08-26 1985-03-14 Feinfocus Röntgensysteme GmbH, 3050 Wunstorf Roentgenlithographiegeraet

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4342917A (en) * 1978-01-16 1982-08-03 The Perkin-Elmer Corporation X-ray lithography apparatus and method of use
US4388728A (en) * 1978-11-20 1983-06-14 The Machlett Laboratories, Incorporated Soft X-ray lithography system
US4357364A (en) * 1981-04-27 1982-11-02 Rockwell International Corporation High rate resist polymerization method
US4477921A (en) * 1981-11-27 1984-10-16 Spire Corporation X-Ray lithography source tube
JPS58111318A (ja) * 1981-12-25 1983-07-02 Hitachi Ltd 現像方法
US4439870A (en) * 1981-12-28 1984-03-27 Bell Telephone Laboratories, Incorporated X-Ray source and method of making same
US4493097A (en) * 1982-08-30 1985-01-08 The Perkin-Elmer Corporation Electron gun assembly
US4665541A (en) * 1983-06-06 1987-05-12 The University Of Rochester X-ray lithography
EP0141041B1 (de) * 1983-08-26 1990-01-03 feinfocus Verwaltungs GmbH & Co. KG Röntgenlithographiegerät
US4534047A (en) * 1984-01-06 1985-08-06 The Perkin-Elmer Corporation Mask ring assembly for X-ray lithography
US4610020A (en) * 1984-01-06 1986-09-02 The Perkin-Elmer Corporation X-ray mask ring and apparatus for making same
US4539695A (en) * 1984-01-06 1985-09-03 The Perkin-Elmer Corporation X-Ray lithography system
GB2155201B (en) * 1984-02-24 1988-07-13 Canon Kk An x-ray exposure apparatus
US5821035A (en) * 1996-03-06 1998-10-13 Sony Corporation Resist developing apparatus and resist developing method
JP3702108B2 (ja) * 1998-10-07 2005-10-05 株式会社東芝 レジストパターン形成方法
EP3696845A1 (en) * 2019-02-12 2020-08-19 Malvern Panalytical B.V. X-ray tube and x-ray analysis system

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3743842A (en) * 1972-01-14 1973-07-03 Massachusetts Inst Technology Soft x-ray lithographic apparatus and process
US3742229A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask alignment system
US3742230A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask support substrate
CA984887A (en) * 1973-01-03 1976-03-02 Machlett Laboratories X-ray tube anode target
DE2346719C3 (de) * 1973-09-17 1980-01-24 Siemens Ag, 1000 Berlin Und 8000 Muenchen Mehrschichtige Bestrahlungsmaske für die Röntgenstrahl-Fotolithografie
US4035522A (en) * 1974-07-19 1977-07-12 International Business Machines Corporation X-ray lithography mask
US4061829A (en) * 1976-04-26 1977-12-06 Bell Telephone Laboratories, Incorporated Negative resist for X-ray and electron beam lithography and method of using same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3330806A1 (de) * 1983-08-26 1985-03-14 Feinfocus Röntgensysteme GmbH, 3050 Wunstorf Roentgenlithographiegeraet
JP2548108B2 (ja) 1983-08-26 1996-10-30 ファインフォークス・レントゲンジュステーメ・ゲーエムベーハー Ｘ線露光装置

Also Published As

Publication number Publication date
CA1118914A (en) 1982-02-23
CH652236A5 (de) 1985-10-31
GB2012452B (en) 1983-01-06
US4215192A (en) 1980-07-29
IT1114336B (it) 1986-01-27
GB2012452A (en) 1979-07-25
FR2414791B1 (US20100012521A1-20100121-C00001.png) 1984-11-09
GB2073901A (en) 1981-10-21
JPS54103346A (en) 1979-08-14
IT7947655A0 (it) 1979-01-16
FR2414791A1 (fr) 1979-08-10

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8131 Rejection