DE2722892A1 - Schutzschaltung fuer mos-bauelemente - Google Patents
Schutzschaltung fuer mos-bauelementeInfo
- Publication number
- DE2722892A1 DE2722892A1 DE19772722892 DE2722892A DE2722892A1 DE 2722892 A1 DE2722892 A1 DE 2722892A1 DE 19772722892 DE19772722892 DE 19772722892 DE 2722892 A DE2722892 A DE 2722892A DE 2722892 A1 DE2722892 A1 DE 2722892A1
- Authority
- DE
- Germany
- Prior art keywords
- trough
- diode
- area
- region
- transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000001681 protective effect Effects 0.000 title claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 19
- 230000015556 catabolic process Effects 0.000 claims description 10
- 239000004020 conductor Substances 0.000 claims description 8
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 230000005669 field effect Effects 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 239000002184 metal Substances 0.000 description 3
- 239000000370 acceptor Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/60—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
- H10D84/611—Combinations of BJTs and one or more of diodes, resistors or capacitors
- H10D84/613—Combinations of vertical BJTs and one or more of diodes, resistors or capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
- H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
- H10D89/601—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Protection Of Static Devices (AREA)
- Amplifiers (AREA)
- Emergency Protection Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/689,269 US4100561A (en) | 1976-05-24 | 1976-05-24 | Protective circuit for MOS devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2722892A1 true DE2722892A1 (de) | 1977-12-08 |
Family
ID=24767729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19772722892 Withdrawn DE2722892A1 (de) | 1976-05-24 | 1977-05-20 | Schutzschaltung fuer mos-bauelemente |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4100561A (enExample) |
| JP (1) | JPS52144282A (enExample) |
| DE (1) | DE2722892A1 (enExample) |
| GB (1) | GB1555155A (enExample) |
| SE (1) | SE7705500L (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0130412A1 (en) * | 1983-06-30 | 1985-01-09 | Fujitsu Limited | Semiconductor device having a protection circuit |
| EP0488340A1 (en) * | 1990-11-30 | 1992-06-03 | Kabushiki Kaisha Toshiba | Semiconductor device having input protection circuit |
| US5684321A (en) * | 1994-11-10 | 1997-11-04 | Kabushiki Kaisha Toshiba | Semiconductor device having an input protection circuit |
| US5936282A (en) * | 1994-04-13 | 1999-08-10 | Kabushiki Kaisha Toshiba | Semiconductor device having input protection circuit |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2374742A1 (fr) * | 1976-12-20 | 1978-07-13 | Radiotechnique Compelec | Transistor multicouche pour tensions elevees et son procede de fabrication |
| JPS574431Y2 (enExample) * | 1977-05-20 | 1982-01-27 | ||
| US4276555A (en) * | 1978-07-13 | 1981-06-30 | International Business Machines Corporation | Controlled avalanche voltage transistor and magnetic sensor |
| US4264941A (en) * | 1979-02-14 | 1981-04-28 | National Semiconductor Corporation | Protective circuit for insulated gate field effect transistor integrated circuits |
| US4295176A (en) * | 1979-09-04 | 1981-10-13 | Bell Telephone Laboratories, Incorporated | Semiconductor integrated circuit protection arrangement |
| SE8105041L (sv) * | 1981-08-25 | 1983-02-26 | Ericsson Telefon Ab L M | Planartransistor med integrerat overspenningsskydd |
| JPS5967670A (ja) * | 1982-10-12 | 1984-04-17 | Toshiba Corp | 半導体装置 |
| JPS6068721A (ja) * | 1983-09-22 | 1985-04-19 | Fujitsu Ltd | Ecl回路 |
| JPS60231356A (ja) * | 1984-04-28 | 1985-11-16 | Mitsubishi Electric Corp | 相補形金属酸化膜半導体集積回路装置 |
| JPS6153761A (ja) * | 1984-08-24 | 1986-03-17 | Hitachi Ltd | 半導体装置 |
| US4757363A (en) * | 1984-09-14 | 1988-07-12 | Harris Corporation | ESD protection network for IGFET circuits with SCR prevention guard rings |
| GB2185621B (en) * | 1985-10-29 | 1988-12-14 | Plessey Co Plc | Protection structures |
| US4990976A (en) * | 1987-11-24 | 1991-02-05 | Nec Corporation | Semiconductor device including a field effect transistor having a protective diode between source and drain thereof |
| US5072273A (en) * | 1990-05-04 | 1991-12-10 | David Sarnoff Research Center, Inc. | Low trigger voltage SCR protection device and structure |
| US5274262A (en) * | 1989-05-17 | 1993-12-28 | David Sarnoff Research Center, Inc. | SCR protection structure and circuit with reduced trigger voltage |
| ES2078343T3 (es) * | 1989-05-17 | 1995-12-16 | Sarnoff David Res Center | Dispositivo de proteccion scr de bajo voltaje de disparo y estructura. |
| US5247201A (en) * | 1990-02-15 | 1993-09-21 | Siemens Aktiengesellschaft | Input protection structure for integrated circuits |
| US5359211A (en) * | 1991-07-18 | 1994-10-25 | Harris Corporation | High voltage protection using SCRs |
| FR2687009B1 (fr) * | 1992-01-31 | 1994-04-29 | Sgs Thomson Microelectronics | Composant de protection pour circuit automobile. |
| US5446302A (en) * | 1993-12-14 | 1995-08-29 | Analog Devices, Incorporated | Integrated circuit with diode-connected transistor for reducing ESD damage |
| US5607867A (en) * | 1994-07-15 | 1997-03-04 | Texas Instruments Incorporated | Method of forming a controlled low collector breakdown voltage transistor for ESD protection circuits |
| US5789785A (en) * | 1995-02-28 | 1998-08-04 | Sgs-Thomson Microelectronics S.R.L. | Device for the protection of an integrated circuit against electrostatic discharges |
| US5629544A (en) * | 1995-04-25 | 1997-05-13 | International Business Machines Corporation | Semiconductor diode with silicide films and trench isolation |
| US5731941A (en) * | 1995-09-08 | 1998-03-24 | International Business Machines Corporation | Electrostatic discharge suppression circuit employing trench capacitor |
| WO1997010615A1 (en) * | 1995-09-11 | 1997-03-20 | Analog Devices, Inc. (Adi) | Electrostatic discharge protection network and method |
| US5663860A (en) * | 1996-06-28 | 1997-09-02 | Harris Corporation | High voltage protection circuits |
| KR100214566B1 (ko) * | 1997-04-22 | 1999-08-02 | 구본준 | 입력 보호회로 |
| TW399337B (en) * | 1998-06-09 | 2000-07-21 | Koninkl Philips Electronics Nv | Semiconductor device |
| US20040028675A1 (en) * | 2001-12-07 | 2004-02-12 | Zarlink Semiconductor Ab | Compositions for the treatment of lupus |
| GB2388259B (en) * | 2002-04-30 | 2006-03-29 | Zarlink Semiconductor Inc | Compact high voltage ESD protection diode |
| DE102004007972B3 (de) * | 2004-02-18 | 2005-09-01 | Infineon Technologies Ag | Halbleiterstruktur zum Schutz von integrierten Schaltungen vor ESD-Pulsen |
| US8557657B1 (en) * | 2012-05-18 | 2013-10-15 | International Business Machines Corporation | Retrograde substrate for deep trench capacitors |
| US10411086B2 (en) * | 2014-04-07 | 2019-09-10 | Semiconductor Components Industries, Llc | High voltage capacitor and method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4632972B1 (enExample) * | 1967-11-13 | 1971-09-27 | ||
| US3739238A (en) * | 1969-09-24 | 1973-06-12 | Tokyo Shibaura Electric Co | Semiconductor device with a field effect transistor |
| US3806773A (en) * | 1971-07-17 | 1974-04-23 | Sony Corp | Field effect transistor having back-to-back diodes connected to the gate electrode and having a protective layer between the source and the diodes to prevent thyristor action |
| US3787717A (en) * | 1971-12-09 | 1974-01-22 | Ibm | Over voltage protection circuit lateral bipolar transistor with gated collector junction |
-
1976
- 1976-05-24 US US05/689,269 patent/US4100561A/en not_active Expired - Lifetime
-
1977
- 1977-05-11 SE SE7705500A patent/SE7705500L/ not_active Application Discontinuation
- 1977-05-12 GB GB19956/77A patent/GB1555155A/en not_active Expired
- 1977-05-20 DE DE19772722892 patent/DE2722892A1/de not_active Withdrawn
- 1977-05-23 JP JP5970577A patent/JPS52144282A/ja active Granted
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0130412A1 (en) * | 1983-06-30 | 1985-01-09 | Fujitsu Limited | Semiconductor device having a protection circuit |
| US4720737A (en) * | 1983-06-30 | 1988-01-19 | Fujitsu Limited | Semiconductor device having a protection circuit with lateral bipolar transistor |
| EP0488340A1 (en) * | 1990-11-30 | 1992-06-03 | Kabushiki Kaisha Toshiba | Semiconductor device having input protection circuit |
| US5594265A (en) * | 1990-11-30 | 1997-01-14 | Kabushiki Kaisha Toshiba | Input protection circuit formed in a semiconductor substrate |
| US5949109A (en) * | 1990-11-30 | 1999-09-07 | Kabushiki Kaisha Toshiba | Semiconductor device having input protection circuit |
| US5936282A (en) * | 1994-04-13 | 1999-08-10 | Kabushiki Kaisha Toshiba | Semiconductor device having input protection circuit |
| US5684321A (en) * | 1994-11-10 | 1997-11-04 | Kabushiki Kaisha Toshiba | Semiconductor device having an input protection circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| US4100561A (en) | 1978-07-11 |
| GB1555155A (en) | 1979-11-07 |
| JPS5519069B2 (enExample) | 1980-05-23 |
| SE7705500L (sv) | 1977-11-25 |
| JPS52144282A (en) | 1977-12-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8130 | Withdrawal |