DE2659247A1 - Elektronenstrahlenbuendel benutzendes, lithografisches system - Google Patents
Elektronenstrahlenbuendel benutzendes, lithografisches systemInfo
- Publication number
- DE2659247A1 DE2659247A1 DE19762659247 DE2659247A DE2659247A1 DE 2659247 A1 DE2659247 A1 DE 2659247A1 DE 19762659247 DE19762659247 DE 19762659247 DE 2659247 A DE2659247 A DE 2659247A DE 2659247 A1 DE2659247 A1 DE 2659247A1
- Authority
- DE
- Germany
- Prior art keywords
- electron beam
- slot
- electron
- rectangular
- coordinate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15850175A JPS5283177A (en) | 1975-12-31 | 1975-12-31 | Electron beam exposure device |
Publications (1)
Publication Number | Publication Date |
---|---|
DE2659247A1 true DE2659247A1 (de) | 1977-07-14 |
Family
ID=15673104
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19762659247 Granted DE2659247A1 (de) | 1975-12-31 | 1976-12-28 | Elektronenstrahlenbuendel benutzendes, lithografisches system |
Country Status (5)
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2834391A1 (de) * | 1977-08-10 | 1979-02-22 | Ibm | Einrichtung zur erzeugung von zeichenmustern auf einer objektflaeche mittels elektronenstrahlen |
DE2847369A1 (de) * | 1977-11-01 | 1979-05-03 | Fujitsu Ltd | Vorrichtung und verfahren zur abtastung eines elektronenstrahlenbuendels |
EP0002957A2 (en) * | 1977-12-30 | 1979-07-11 | Fujitsu Limited | Electron beam exposure apparatus |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5251871A (en) * | 1975-10-23 | 1977-04-26 | Rikagaku Kenkyusho | Projecting method for charge particle beams |
GB1557924A (en) * | 1976-02-05 | 1979-12-19 | Western Electric Co | Irradiation apparatus and methods |
JPS6051261B2 (ja) * | 1976-05-26 | 1985-11-13 | 株式会社東芝 | 荷電粒子ビ−ム描画装置 |
JPS52151568A (en) * | 1976-06-11 | 1977-12-16 | Jeol Ltd | Electron beam exposure apparatus |
US4056730A (en) * | 1976-07-12 | 1977-11-01 | International Business Machines Corporation | Apparatus for detecting registration marks on a target such as a semiconductor wafer |
JPS5316578A (en) * | 1976-07-30 | 1978-02-15 | Toshiba Corp | Electron beam exposure apparatus |
CA1166766A (en) * | 1977-02-23 | 1984-05-01 | Hans C. Pfeiffer | Method and apparatus for forming a variable size electron beam |
US4182958A (en) * | 1977-05-31 | 1980-01-08 | Rikagaku Kenkyusho | Method and apparatus for projecting a beam of electrically charged particles |
DD134582A1 (de) * | 1978-01-19 | 1979-03-07 | Eberhard Hahn | Verfahren und einrichtung zur justierung einer elektronenstrahlbearbeitungsanlage |
FR2416549A1 (fr) * | 1978-02-03 | 1979-08-31 | Thomson Csf | Diaphragme pour dispositif d'optique electronique |
US4243866A (en) * | 1979-01-11 | 1981-01-06 | International Business Machines Corporation | Method and apparatus for forming a variable size electron beam |
JPS55146931A (en) * | 1979-05-04 | 1980-11-15 | Hitachi Ltd | Depicting method by electronic beam |
JPS55165634A (en) * | 1979-06-11 | 1980-12-24 | Jeol Ltd | Device for exposure to electron beam |
NL7904580A (nl) * | 1979-06-12 | 1980-12-16 | Philips Nv | Inrichting voor het schrijven van patronen in een laag op een substraat met een bundel elektrisch geladen deeltjes. |
US4310743A (en) * | 1979-09-24 | 1982-01-12 | Hughes Aircraft Company | Ion beam lithography process and apparatus using step-and-repeat exposure |
JPS5693318A (en) * | 1979-12-10 | 1981-07-28 | Fujitsu Ltd | Electron beam exposure device |
JPS5753938A (en) * | 1980-09-17 | 1982-03-31 | Toshiba Corp | Electron beam exposure apparatus |
JPS57204125A (en) * | 1981-06-10 | 1982-12-14 | Hitachi Ltd | Electron-ray drawing device |
JPS57209786A (en) * | 1981-06-17 | 1982-12-23 | Hitachi Ltd | Electron beam machining device |
DE3138896A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Elektronenoptisches system mit vario-formstrahl zur erzeugung und messung von mikrostrukturen |
EP0076868B1 (de) * | 1981-10-10 | 1987-01-14 | DR.-ING. RUDOLF HELL GmbH | Elektronenstrahl-Gravierverfahren und Einrichtung zu seiner Durchführung |
GB2109538A (en) * | 1981-11-02 | 1983-06-02 | Philips Electronic Associated | Electron beam alignment |
GB2109539A (en) * | 1981-11-02 | 1983-06-02 | Philips Electronic Associated | Electron beam alignment |
JPS58121625A (ja) * | 1981-12-28 | 1983-07-20 | Fujitsu Ltd | 電子ビ−ム露光装置 |
US4469950A (en) * | 1982-03-04 | 1984-09-04 | Varian Associates, Inc. | Charged particle beam exposure system utilizing variable line scan |
US4698509A (en) * | 1985-02-14 | 1987-10-06 | Varian Associates, Inc. | High speed pattern generator for electron beam lithography |
FR2597259A1 (fr) * | 1986-04-15 | 1987-10-16 | Thomson Csf | Dispositif a faisceau electronique pour projeter l'image d'un objet sur un echantillon |
US4837447A (en) * | 1986-05-06 | 1989-06-06 | Research Triangle Institute, Inc. | Rasterization system for converting polygonal pattern data into a bit-map |
US4818885A (en) * | 1987-06-30 | 1989-04-04 | International Business Machines Corporation | Electron beam writing method and system using large range deflection in combination with a continuously moving table |
US5173582A (en) * | 1988-10-31 | 1992-12-22 | Fujitsu Limited | Charged particle beam lithography system and method |
JP2625219B2 (ja) * | 1989-10-23 | 1997-07-02 | 株式会社日立製作所 | 電子線描画装置 |
GB2238630B (en) * | 1989-11-29 | 1993-12-22 | Sundstrand Corp | Control systems |
JPH03270215A (ja) * | 1990-03-20 | 1991-12-02 | Fujitsu Ltd | 荷電粒子ビーム露光方法及び露光装置 |
JP2837515B2 (ja) * | 1990-06-20 | 1998-12-16 | 富士通株式会社 | 電子ビーム露光装置 |
US5223719A (en) * | 1990-07-06 | 1993-06-29 | Fujitsu Limited | Mask for use in a charged particle beam apparatus including beam passing sections |
DE4208484C2 (de) * | 1992-03-14 | 1998-09-17 | Ald Vacuum Techn Gmbh | Magnetisches Ablenksystem für einen Hochleistungs-Elektronenstrahl |
DE10147133A1 (de) * | 2000-10-03 | 2002-06-13 | Advantest Corp | Elektronenstrahl-Belichtungsvorrichtung |
US6619903B2 (en) * | 2001-08-10 | 2003-09-16 | Glenn M. Friedman | System and method for reticle protection and transport |
JP4220209B2 (ja) * | 2002-09-27 | 2009-02-04 | 株式会社アドバンテスト | 電子ビーム露光装置、偏向装置、及び電子ビーム露光方法 |
IL156719A0 (en) * | 2003-06-30 | 2004-01-04 | Axiomic Technologies Inc | A multi-stage open ion system in various topologies |
US7244953B2 (en) * | 2005-10-03 | 2007-07-17 | Applied Materials, Inc. | Beam exposure writing strategy system and method |
JP6087154B2 (ja) | 2013-01-18 | 2017-03-01 | 株式会社ニューフレアテクノロジー | 荷電粒子ビーム描画装置、試料面へのビーム入射角調整方法、および荷電粒子ビーム描画方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3638231A (en) * | 1968-05-27 | 1972-01-25 | Tno | Device for recording with electron rays |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1533755A (fr) * | 1966-08-16 | 1968-07-19 | Jeol Ltd | Dispositif pour le réglage du point de traitement dans un appareil à faisceau électrique ou analogue |
US3648048A (en) * | 1969-10-15 | 1972-03-07 | Thomson Houston Comp Francaise | System and method for positioning a wafer coated with photoresist and for controlling the displacements of said wafer in a scanning electron apparatus |
US3644700A (en) * | 1969-12-15 | 1972-02-22 | Ibm | Method and apparatus for controlling an electron beam |
US3875416A (en) * | 1970-06-30 | 1975-04-01 | Texas Instruments Inc | Methods and apparatus for the production of semiconductor devices by electron-beam patterning and devices produced thereby |
US3875415A (en) * | 1974-01-28 | 1975-04-01 | Ibm | Method and apparatus for detecting a registration mark on a target such as a semiconductor wafer |
US3900737A (en) * | 1974-04-18 | 1975-08-19 | Bell Telephone Labor Inc | Electron beam exposure system |
US3956635A (en) * | 1975-06-13 | 1976-05-11 | International Business Machines Corporation | Combined multiple beam size and spiral scan method for electron beam writing of microcircuit patterns |
-
1975
- 1975-12-31 JP JP15850175A patent/JPS5283177A/ja active Pending
-
1976
- 1976-12-21 US US05/752,989 patent/US4145597A/en not_active Expired - Lifetime
- 1976-12-22 GB GB54561/76A patent/GB1573920A/en not_active Expired
- 1976-12-28 DE DE19762659247 patent/DE2659247A1/de active Granted
- 1976-12-30 FR FR7639649A patent/FR2337420A1/fr active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3638231A (en) * | 1968-05-27 | 1972-01-25 | Tno | Device for recording with electron rays |
Non-Patent Citations (3)
Title |
---|
In Betracht gezogenes älteres Patent: DE-PS 26 47 855 * |
L.A. Fontijn "An Electron Exposure System for Recording and Printing", Dissertation, Delft, 1972 * |
Philips Technische Rundschau, 28. Jhrg., 1967, Nr. 8/9/10, S. 275-278 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2834391A1 (de) * | 1977-08-10 | 1979-02-22 | Ibm | Einrichtung zur erzeugung von zeichenmustern auf einer objektflaeche mittels elektronenstrahlen |
DE2847369A1 (de) * | 1977-11-01 | 1979-05-03 | Fujitsu Ltd | Vorrichtung und verfahren zur abtastung eines elektronenstrahlenbuendels |
EP0002957A2 (en) * | 1977-12-30 | 1979-07-11 | Fujitsu Limited | Electron beam exposure apparatus |
EP0002957A3 (en) * | 1977-12-30 | 1979-07-25 | Fujitsu Limited | Electron beam exposure apparatus |
Also Published As
Publication number | Publication date |
---|---|
US4145597A (en) | 1979-03-20 |
FR2337420B1 (US20080094685A1-20080424-C00004.png) | 1981-09-11 |
GB1573920A (en) | 1980-08-28 |
FR2337420A1 (fr) | 1977-07-29 |
JPS5283177A (en) | 1977-07-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8178 | Suspension cancelled | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition |