DE2659247A1 - Elektronenstrahlenbuendel benutzendes, lithografisches system - Google Patents

Elektronenstrahlenbuendel benutzendes, lithografisches system

Info

Publication number
DE2659247A1
DE2659247A1 DE19762659247 DE2659247A DE2659247A1 DE 2659247 A1 DE2659247 A1 DE 2659247A1 DE 19762659247 DE19762659247 DE 19762659247 DE 2659247 A DE2659247 A DE 2659247A DE 2659247 A1 DE2659247 A1 DE 2659247A1
Authority
DE
Germany
Prior art keywords
electron beam
slot
electron
rectangular
coordinate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19762659247
Other languages
German (de)
English (en)
Inventor
Hiroshi Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of DE2659247A1 publication Critical patent/DE2659247A1/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
DE19762659247 1975-12-31 1976-12-28 Elektronenstrahlenbuendel benutzendes, lithografisches system Granted DE2659247A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15850175A JPS5283177A (en) 1975-12-31 1975-12-31 Electron beam exposure device

Publications (1)

Publication Number Publication Date
DE2659247A1 true DE2659247A1 (de) 1977-07-14

Family

ID=15673104

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19762659247 Granted DE2659247A1 (de) 1975-12-31 1976-12-28 Elektronenstrahlenbuendel benutzendes, lithografisches system

Country Status (5)

Country Link
US (1) US4145597A (US08066781-20111129-C00013.png)
JP (1) JPS5283177A (US08066781-20111129-C00013.png)
DE (1) DE2659247A1 (US08066781-20111129-C00013.png)
FR (1) FR2337420A1 (US08066781-20111129-C00013.png)
GB (1) GB1573920A (US08066781-20111129-C00013.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2834391A1 (de) * 1977-08-10 1979-02-22 Ibm Einrichtung zur erzeugung von zeichenmustern auf einer objektflaeche mittels elektronenstrahlen
DE2847369A1 (de) * 1977-11-01 1979-05-03 Fujitsu Ltd Vorrichtung und verfahren zur abtastung eines elektronenstrahlenbuendels
EP0002957A2 (en) * 1977-12-30 1979-07-11 Fujitsu Limited Electron beam exposure apparatus

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251871A (en) * 1975-10-23 1977-04-26 Rikagaku Kenkyusho Projecting method for charge particle beams
GB1557924A (en) * 1976-02-05 1979-12-19 Western Electric Co Irradiation apparatus and methods
JPS6051261B2 (ja) * 1976-05-26 1985-11-13 株式会社東芝 荷電粒子ビ−ム描画装置
JPS52151568A (en) * 1976-06-11 1977-12-16 Jeol Ltd Electron beam exposure apparatus
US4056730A (en) * 1976-07-12 1977-11-01 International Business Machines Corporation Apparatus for detecting registration marks on a target such as a semiconductor wafer
JPS5316578A (en) * 1976-07-30 1978-02-15 Toshiba Corp Electron beam exposure apparatus
CA1166766A (en) * 1977-02-23 1984-05-01 Hans C. Pfeiffer Method and apparatus for forming a variable size electron beam
US4182958A (en) * 1977-05-31 1980-01-08 Rikagaku Kenkyusho Method and apparatus for projecting a beam of electrically charged particles
DD134582A1 (de) * 1978-01-19 1979-03-07 Eberhard Hahn Verfahren und einrichtung zur justierung einer elektronenstrahlbearbeitungsanlage
FR2416549A1 (fr) * 1978-02-03 1979-08-31 Thomson Csf Diaphragme pour dispositif d'optique electronique
US4243866A (en) * 1979-01-11 1981-01-06 International Business Machines Corporation Method and apparatus for forming a variable size electron beam
JPS55146931A (en) * 1979-05-04 1980-11-15 Hitachi Ltd Depicting method by electronic beam
JPS55165634A (en) * 1979-06-11 1980-12-24 Jeol Ltd Device for exposure to electron beam
NL7904580A (nl) * 1979-06-12 1980-12-16 Philips Nv Inrichting voor het schrijven van patronen in een laag op een substraat met een bundel elektrisch geladen deeltjes.
US4310743A (en) * 1979-09-24 1982-01-12 Hughes Aircraft Company Ion beam lithography process and apparatus using step-and-repeat exposure
JPS5693318A (en) * 1979-12-10 1981-07-28 Fujitsu Ltd Electron beam exposure device
JPS5753938A (en) * 1980-09-17 1982-03-31 Toshiba Corp Electron beam exposure apparatus
JPS57204125A (en) * 1981-06-10 1982-12-14 Hitachi Ltd Electron-ray drawing device
JPS57209786A (en) * 1981-06-17 1982-12-23 Hitachi Ltd Electron beam machining device
DE3138896A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Elektronenoptisches system mit vario-formstrahl zur erzeugung und messung von mikrostrukturen
EP0076868B1 (de) * 1981-10-10 1987-01-14 DR.-ING. RUDOLF HELL GmbH Elektronenstrahl-Gravierverfahren und Einrichtung zu seiner Durchführung
GB2109538A (en) * 1981-11-02 1983-06-02 Philips Electronic Associated Electron beam alignment
GB2109539A (en) * 1981-11-02 1983-06-02 Philips Electronic Associated Electron beam alignment
JPS58121625A (ja) * 1981-12-28 1983-07-20 Fujitsu Ltd 電子ビ−ム露光装置
US4469950A (en) * 1982-03-04 1984-09-04 Varian Associates, Inc. Charged particle beam exposure system utilizing variable line scan
US4698509A (en) * 1985-02-14 1987-10-06 Varian Associates, Inc. High speed pattern generator for electron beam lithography
FR2597259A1 (fr) * 1986-04-15 1987-10-16 Thomson Csf Dispositif a faisceau electronique pour projeter l'image d'un objet sur un echantillon
US4837447A (en) * 1986-05-06 1989-06-06 Research Triangle Institute, Inc. Rasterization system for converting polygonal pattern data into a bit-map
US4818885A (en) * 1987-06-30 1989-04-04 International Business Machines Corporation Electron beam writing method and system using large range deflection in combination with a continuously moving table
US5173582A (en) * 1988-10-31 1992-12-22 Fujitsu Limited Charged particle beam lithography system and method
JP2625219B2 (ja) * 1989-10-23 1997-07-02 株式会社日立製作所 電子線描画装置
GB2238630B (en) * 1989-11-29 1993-12-22 Sundstrand Corp Control systems
JPH03270215A (ja) * 1990-03-20 1991-12-02 Fujitsu Ltd 荷電粒子ビーム露光方法及び露光装置
JP2837515B2 (ja) * 1990-06-20 1998-12-16 富士通株式会社 電子ビーム露光装置
US5223719A (en) * 1990-07-06 1993-06-29 Fujitsu Limited Mask for use in a charged particle beam apparatus including beam passing sections
DE4208484C2 (de) * 1992-03-14 1998-09-17 Ald Vacuum Techn Gmbh Magnetisches Ablenksystem für einen Hochleistungs-Elektronenstrahl
DE10147133A1 (de) * 2000-10-03 2002-06-13 Advantest Corp Elektronenstrahl-Belichtungsvorrichtung
US6619903B2 (en) * 2001-08-10 2003-09-16 Glenn M. Friedman System and method for reticle protection and transport
JP4220209B2 (ja) * 2002-09-27 2009-02-04 株式会社アドバンテスト 電子ビーム露光装置、偏向装置、及び電子ビーム露光方法
IL156719A0 (en) * 2003-06-30 2004-01-04 Axiomic Technologies Inc A multi-stage open ion system in various topologies
US7244953B2 (en) * 2005-10-03 2007-07-17 Applied Materials, Inc. Beam exposure writing strategy system and method
JP6087154B2 (ja) 2013-01-18 2017-03-01 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置、試料面へのビーム入射角調整方法、および荷電粒子ビーム描画方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3638231A (en) * 1968-05-27 1972-01-25 Tno Device for recording with electron rays

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1533755A (fr) * 1966-08-16 1968-07-19 Jeol Ltd Dispositif pour le réglage du point de traitement dans un appareil à faisceau électrique ou analogue
US3648048A (en) * 1969-10-15 1972-03-07 Thomson Houston Comp Francaise System and method for positioning a wafer coated with photoresist and for controlling the displacements of said wafer in a scanning electron apparatus
US3644700A (en) * 1969-12-15 1972-02-22 Ibm Method and apparatus for controlling an electron beam
US3875416A (en) * 1970-06-30 1975-04-01 Texas Instruments Inc Methods and apparatus for the production of semiconductor devices by electron-beam patterning and devices produced thereby
US3875415A (en) * 1974-01-28 1975-04-01 Ibm Method and apparatus for detecting a registration mark on a target such as a semiconductor wafer
US3900737A (en) * 1974-04-18 1975-08-19 Bell Telephone Labor Inc Electron beam exposure system
US3956635A (en) * 1975-06-13 1976-05-11 International Business Machines Corporation Combined multiple beam size and spiral scan method for electron beam writing of microcircuit patterns

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3638231A (en) * 1968-05-27 1972-01-25 Tno Device for recording with electron rays

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
In Betracht gezogenes älteres Patent: DE-PS 26 47 855 *
L.A. Fontijn "An Electron Exposure System for Recording and Printing", Dissertation, Delft, 1972 *
Philips Technische Rundschau, 28. Jhrg., 1967, Nr. 8/9/10, S. 275-278 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2834391A1 (de) * 1977-08-10 1979-02-22 Ibm Einrichtung zur erzeugung von zeichenmustern auf einer objektflaeche mittels elektronenstrahlen
DE2847369A1 (de) * 1977-11-01 1979-05-03 Fujitsu Ltd Vorrichtung und verfahren zur abtastung eines elektronenstrahlenbuendels
EP0002957A2 (en) * 1977-12-30 1979-07-11 Fujitsu Limited Electron beam exposure apparatus
EP0002957A3 (en) * 1977-12-30 1979-07-25 Fujitsu Limited Electron beam exposure apparatus

Also Published As

Publication number Publication date
US4145597A (en) 1979-03-20
FR2337420B1 (US08066781-20111129-C00013.png) 1981-09-11
GB1573920A (en) 1980-08-28
FR2337420A1 (fr) 1977-07-29
JPS5283177A (en) 1977-07-11

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Legal Events

Date Code Title Description
8178 Suspension cancelled
D2 Grant after examination
8364 No opposition during term of opposition