DE2651976C2 - Bedampfungsvorrichtung und ihre Anwendung - Google Patents

Bedampfungsvorrichtung und ihre Anwendung

Info

Publication number
DE2651976C2
DE2651976C2 DE2651976A DE2651976A DE2651976C2 DE 2651976 C2 DE2651976 C2 DE 2651976C2 DE 2651976 A DE2651976 A DE 2651976A DE 2651976 A DE2651976 A DE 2651976A DE 2651976 C2 DE2651976 C2 DE 2651976C2
Authority
DE
Germany
Prior art keywords
pallets
steam
objects
axis
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2651976A
Other languages
German (de)
English (en)
Other versions
DE2651976A1 (de
Inventor
Richard Gilbert Wingdale N.Y. Christensen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE2651976A1 publication Critical patent/DE2651976A1/de
Application granted granted Critical
Publication of DE2651976C2 publication Critical patent/DE2651976C2/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
DE2651976A 1975-12-31 1976-11-15 Bedampfungsvorrichtung und ihre Anwendung Expired DE2651976C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/645,768 US3983838A (en) 1975-12-31 1975-12-31 Planetary evaporator

Publications (2)

Publication Number Publication Date
DE2651976A1 DE2651976A1 (de) 1977-07-14
DE2651976C2 true DE2651976C2 (de) 1983-12-01

Family

ID=24590411

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2651976A Expired DE2651976C2 (de) 1975-12-31 1976-11-15 Bedampfungsvorrichtung und ihre Anwendung

Country Status (7)

Country Link
US (1) US3983838A (cg-RX-API-DMAC10.html)
JP (1) JPS5285083A (cg-RX-API-DMAC10.html)
CA (1) CA1093811A (cg-RX-API-DMAC10.html)
DE (1) DE2651976C2 (cg-RX-API-DMAC10.html)
FR (1) FR2337207A1 (cg-RX-API-DMAC10.html)
GB (1) GB1546388A (cg-RX-API-DMAC10.html)
IT (1) IT1068486B (cg-RX-API-DMAC10.html)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4085699A (en) * 1977-03-30 1978-04-25 Cha Industries Mounting for arms of a thin-film apparatus
US4187801A (en) * 1977-12-12 1980-02-12 Commonwealth Scientific Corporation Method and apparatus for transporting workpieces
US4284033A (en) * 1979-10-31 1981-08-18 Rca Corporation Means to orbit and rotate target wafers supported on planet member
US5024747A (en) * 1979-12-21 1991-06-18 Varian Associates, Inc. Wafer coating system
US4756815A (en) * 1979-12-21 1988-07-12 Varian Associates, Inc. Wafer coating system
US4473455A (en) * 1981-12-21 1984-09-25 At&T Bell Laboratories Wafer holding apparatus and method
US4485759A (en) * 1983-01-19 1984-12-04 Multi-Arc Vacuum Systems Inc. Planetary substrate support apparatus for vapor vacuum deposition coating
US4650064A (en) * 1985-09-13 1987-03-17 Comptech, Incorporated Substrate rotation method and apparatus
US4662310A (en) * 1986-07-09 1987-05-05 Deco Tools, Inc. Robotic paint masking machine
US5040484A (en) * 1987-05-04 1991-08-20 Varian Associates, Inc. Apparatus for retaining wafers
US4817556A (en) * 1987-05-04 1989-04-04 Varian Associates, Inc. Apparatus for retaining wafers
US4919076A (en) * 1988-10-03 1990-04-24 International Business Machines Corporation Reusable evaporation fixture
CH681308A5 (cg-RX-API-DMAC10.html) * 1990-05-22 1993-02-26 Satis Vacuum Ag
AU7403694A (en) * 1994-07-19 1996-02-16 American Plating Systems, Inc. Electrolytic plating apparatus and method
US5830272A (en) * 1995-11-07 1998-11-03 Sputtered Films, Inc. System for and method of providing a controlled deposition on wafers
DE10337732B4 (de) * 2003-08-11 2009-11-19 Carl Zeiss Smt Ag Verfahren und Beschichtungsanlage zum Beschichten von Substraten für optische Komponenten
US9230846B2 (en) * 2010-06-07 2016-01-05 Veeco Instruments, Inc. Multi-wafer rotating disc reactor with inertial planetary drive
TW201202454A (en) * 2010-07-07 2012-01-16 Hon Hai Prec Ind Co Ltd Processing apparatus for smoothing film material and evaporation deposition device with same
US11114329B2 (en) * 2019-04-08 2021-09-07 Semiconductor Components Industries, Llc Methods for loading or unloading substrate with evaporator planet

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3046157A (en) * 1958-05-07 1962-07-24 Philips Corp Method for coating the inner wall of a tube intended for electric discharge lamps with a uniform liquid layer as well as an arrangement for the application of the method
AT246807B (de) * 1963-09-23 1966-05-10 Siegfried Ing Gessner Einrichtung zur Einstellung der Raumlage eines Präparatetellers
US3486237A (en) * 1967-09-29 1969-12-30 Bausch & Lomb Positioning tool for vacuum chamber workholder
US3534707A (en) * 1969-02-27 1970-10-20 American Micro Syst Apparatus for manipulating articles in a vapor stream to achieve uniform deposition layer
US3598083A (en) * 1969-10-27 1971-08-10 Varian Associates Complex motion mechanism for thin film coating apparatuses
US3853091A (en) * 1973-12-03 1974-12-10 Ibm Thin film coating apparatus
US3858547A (en) * 1973-12-14 1975-01-07 Nils H Bergfelt Coating machine having an adjustable rotation system
US3889632A (en) * 1974-05-31 1975-06-17 Ibm Variable incidence drive for deposition tooling

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NICHTS-ERMITTELT

Also Published As

Publication number Publication date
CA1093811A (en) 1981-01-20
JPS5285083A (en) 1977-07-15
IT1068486B (it) 1985-03-21
FR2337207A1 (fr) 1977-07-29
DE2651976A1 (de) 1977-07-14
US3983838A (en) 1976-10-05
FR2337207B1 (cg-RX-API-DMAC10.html) 1980-10-17
GB1546388A (en) 1979-05-23
JPS5440474B2 (cg-RX-API-DMAC10.html) 1979-12-04

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8128 New person/name/address of the agent

Representative=s name: OECHSSLER, D., DIPL.-CHEM. DR.RER.NAT., PAT.-ASS.,

D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee