DE2602257C2 - Düseneinheit - Google Patents
DüseneinheitInfo
- Publication number
- DE2602257C2 DE2602257C2 DE19762602257 DE2602257A DE2602257C2 DE 2602257 C2 DE2602257 C2 DE 2602257C2 DE 19762602257 DE19762602257 DE 19762602257 DE 2602257 A DE2602257 A DE 2602257A DE 2602257 C2 DE2602257 C2 DE 2602257C2
- Authority
- DE
- Germany
- Prior art keywords
- nozzle
- ink
- electrode
- silicon
- synchronization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052710 silicon Inorganic materials 0.000 claims description 44
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 43
- 239000010703 silicon Substances 0.000 claims description 43
- 230000005684 electric field Effects 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 16
- 239000012528 membrane Substances 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- 238000003486 chemical etching Methods 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 4
- 230000002123 temporal effect Effects 0.000 claims description 4
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- 238000007641 inkjet printing Methods 0.000 claims description 3
- 238000007639 printing Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims description 2
- 239000000654 additive Substances 0.000 claims 1
- 230000010355 oscillation Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 25
- 230000005669 field effect Effects 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- 239000002019 doping agent Substances 0.000 description 6
- 230000033001 locomotion Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000001360 synchronised effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910003930 SiCb Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 230000037007 arousal Effects 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/02—Ink jet characterised by the jet generation process generating a continuous ink jet
- B41J2/035—Ink jet characterised by the jet generation process generating a continuous ink jet by electric or magnetic field
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D15/00—Component parts of recorders for measuring arrangements not specially adapted for a specific variable
- G01D15/16—Recording elements transferring recording material, e.g. ink, to the recording surface
- G01D15/18—Nozzles emitting recording material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/13—Heads having an integrated circuit
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Facsimile Heads (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/543,569 US3949410A (en) | 1975-01-23 | 1975-01-23 | Jet nozzle structure for electrohydrodynamic droplet formation and ink jet printing system therewith |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2602257A1 DE2602257A1 (de) | 1976-07-29 |
| DE2602257C2 true DE2602257C2 (de) | 1983-06-23 |
Family
ID=24168583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19762602257 Expired DE2602257C2 (de) | 1975-01-23 | 1976-01-22 | Düseneinheit |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5427256B2 (enrdf_load_stackoverflow) |
| CA (1) | CA1037541A (enrdf_load_stackoverflow) |
| DE (1) | DE2602257C2 (enrdf_load_stackoverflow) |
| FR (1) | FR2298374A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1492123A (enrdf_load_stackoverflow) |
| IT (1) | IT1051786B (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1129356B (it) * | 1980-10-31 | 1986-06-04 | Olivetti Ing C Spa | Dispositivo di stampa a getto selettivo di inchiostro |
| US4184925A (en) * | 1977-12-19 | 1980-01-22 | The Mead Corporation | Solid metal orifice plate for a jet drop recorder |
| US4555062A (en) * | 1983-04-05 | 1985-11-26 | Hewlett-Packard Company | Anti-wetting in fluid nozzles |
| US20070126799A1 (en) * | 2005-12-01 | 2007-06-07 | Eastman Kodak Company | Apparatus and method for synchronously stimulating a plurality of fluid jets |
| JP2010143004A (ja) * | 2008-12-17 | 2010-07-01 | Seiko Epson Corp | ノズル基板、液滴吐出ヘッド及び液滴吐出装置 |
| JP5315975B2 (ja) * | 2008-12-19 | 2013-10-16 | セイコーエプソン株式会社 | ノズル基板、液滴吐出ヘッド及び液滴吐出装置並びにこれらの製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1123587A (en) * | 1964-09-23 | 1968-08-14 | Xerox Corp | Facsimile printing with electrically induced uniform droplets |
-
1975
- 1975-10-27 GB GB4399975A patent/GB1492123A/en not_active Expired
- 1975-12-02 IT IT2989475A patent/IT1051786B/it active
- 1975-12-17 FR FR7539613A patent/FR2298374A1/fr active Granted
- 1975-12-23 JP JP15296875A patent/JPS5427256B2/ja not_active Expired
- 1975-12-24 CA CA242,603A patent/CA1037541A/en not_active Expired
-
1976
- 1976-01-22 DE DE19762602257 patent/DE2602257C2/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2298374A1 (fr) | 1976-08-20 |
| CA1037541A (en) | 1978-08-29 |
| JPS5427256B2 (enrdf_load_stackoverflow) | 1979-09-08 |
| FR2298374B1 (enrdf_load_stackoverflow) | 1978-05-19 |
| IT1051786B (it) | 1981-05-20 |
| JPS5193822A (enrdf_load_stackoverflow) | 1976-08-17 |
| DE2602257A1 (de) | 1976-07-29 |
| GB1492123A (en) | 1977-11-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: LEXMARK INTERNATIONAL, INC. (N.D.GES.D.STAATES DEL |
|
| 8328 | Change in the person/name/address of the agent |
Free format text: ABITZ, W., DIPL.-ING.DR.-ING. MORF, D., DR. GRITSCHNEDER, M., DIPL.-PHYS. FRHR. VON WITTGENSTEIN, A., DIPL.-CHEM. DR.PHIL.NAT., PAT.-ANWAELTE, 8000 MUENCHEN |
|
| 8339 | Ceased/non-payment of the annual fee |