DE2556780A1 - Einrichtung zur pneumatischen lagebestimmung oder identifizierung von werkstuecken - Google Patents
Einrichtung zur pneumatischen lagebestimmung oder identifizierung von werkstueckenInfo
- Publication number
- DE2556780A1 DE2556780A1 DE19752556780 DE2556780A DE2556780A1 DE 2556780 A1 DE2556780 A1 DE 2556780A1 DE 19752556780 DE19752556780 DE 19752556780 DE 2556780 A DE2556780 A DE 2556780A DE 2556780 A1 DE2556780 A1 DE 2556780A1
- Authority
- DE
- Germany
- Prior art keywords
- pressure
- nozzles
- workpiece
- nozzle
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000011156 evaluation Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 3
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 33
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002372 labelling Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000012549 training Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67282—Marking devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B13/00—Measuring arrangements characterised by the use of fluids
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2278—Pressure modulating relays or followers
- Y10T137/2322—Jet control type
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Measuring Fluid Pressure (AREA)
- Coating Apparatus (AREA)
- Electronic Switches (AREA)
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/535,263 US3962903A (en) | 1974-12-23 | 1974-12-23 | Method and system for sensing an identifying means |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2556780A1 true DE2556780A1 (de) | 1976-06-24 |
Family
ID=24133493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752556780 Withdrawn DE2556780A1 (de) | 1974-12-23 | 1975-12-17 | Einrichtung zur pneumatischen lagebestimmung oder identifizierung von werkstuecken |
Country Status (6)
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4775961A (en) * | 1985-06-24 | 1988-10-04 | Vysoka Skola Dopravy A Spojov V Ziline | Tactile sensor |
| DE4344264A1 (de) * | 1992-12-28 | 1994-06-30 | Smc Kk | Positionsdetektor |
| DE19734374A1 (de) * | 1997-08-08 | 1999-02-18 | Audi Ag | Einrichtung zur pneumatischen Lagebestimmung von Werkstücken |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4055983A (en) * | 1976-12-28 | 1977-11-01 | The United States Of America As Represented By The Secretary Of The Army | Fluidic gap gauge |
| JPS58706A (ja) * | 1981-06-25 | 1983-01-05 | Fujitsu Ltd | 円形マスク基板の位置検出方法 |
| US6280291B1 (en) * | 1999-02-16 | 2001-08-28 | Speedfam-Ipec Corporation | Wafer sensor utilizing hydrodynamic pressure differential |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2897670A (en) * | 1956-08-31 | 1959-08-04 | Gen Motors Corp | Single indicator air gage circuit |
| US3115037A (en) * | 1960-12-09 | 1963-12-24 | Warren S D Co | Pneumatic void detector |
| GB946342A (en) * | 1961-06-07 | 1964-01-08 | British Cellophane Ltd | Improvements in or relating to web tension measuring devices |
| US3496744A (en) * | 1966-02-05 | 1970-02-24 | Sumitomo Light Metal Ind | Method and apparatus for controlling the contours of rolling mill rolls to obtain metal sheet or strip of superior flatness |
| US3470733A (en) * | 1967-10-09 | 1969-10-07 | Rockford Servo Corp | Fluidic sensing apparatus |
| GB1166178A (en) * | 1967-10-20 | 1969-10-08 | Marconii Company Ltd | Improvements in or relating to Fluid Operated Position Sensing Devices |
| GB1358524A (en) * | 1973-01-05 | 1974-07-03 | Werkzeugmasch Heckert Veb | Circuit arrangement for positioning workpiece carriers moved on a guideway |
-
1974
- 1974-12-23 US US05/535,263 patent/US3962903A/en not_active Expired - Lifetime
-
1975
- 1975-09-05 GB GB36722/75A patent/GB1491775A/en not_active Expired
- 1975-10-20 CA CA238,130A patent/CA1047127A/en not_active Expired
- 1975-11-05 FR FR7534719A patent/FR2296161A1/fr active Granted
- 1975-11-19 JP JP50138289A patent/JPS5178356A/ja active Pending
- 1975-12-17 DE DE19752556780 patent/DE2556780A1/de not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4775961A (en) * | 1985-06-24 | 1988-10-04 | Vysoka Skola Dopravy A Spojov V Ziline | Tactile sensor |
| DE4344264A1 (de) * | 1992-12-28 | 1994-06-30 | Smc Kk | Positionsdetektor |
| US5540082A (en) * | 1992-12-28 | 1996-07-30 | Smc Kabushiki Kaisha | Positioning detector |
| DE19734374A1 (de) * | 1997-08-08 | 1999-02-18 | Audi Ag | Einrichtung zur pneumatischen Lagebestimmung von Werkstücken |
| DE19734374C2 (de) * | 1997-08-08 | 2003-01-02 | Audi Ag | Einrichtung zur pneumatischen Lagebestimmung von Werkstücken |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2296161A1 (fr) | 1976-07-23 |
| CA1047127A (en) | 1979-01-23 |
| JPS5178356A (en) | 1976-07-07 |
| US3962903A (en) | 1976-06-15 |
| FR2296161B1 (US06420036-20020716-C00037.png) | 1978-05-12 |
| GB1491775A (en) | 1977-11-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8139 | Disposal/non-payment of the annual fee |