DE2521618B1 - Vorrichtung zum Messen oder Einstellen von zweidimensionalen Lagekoordinaten - Google Patents

Vorrichtung zum Messen oder Einstellen von zweidimensionalen Lagekoordinaten

Info

Publication number
DE2521618B1
DE2521618B1 DE19752521618 DE2521618A DE2521618B1 DE 2521618 B1 DE2521618 B1 DE 2521618B1 DE 19752521618 DE19752521618 DE 19752521618 DE 2521618 A DE2521618 A DE 2521618A DE 2521618 B1 DE2521618 B1 DE 2521618B1
Authority
DE
Germany
Prior art keywords
measuring
slide
scanning
grid
raster
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19752521618
Other languages
German (de)
English (en)
Inventor
Reiner Dr-Ing Schwebel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Priority to DE19752521618 priority Critical patent/DE2521618B1/de
Publication of DE2521618B1 publication Critical patent/DE2521618B1/de
Priority to CH513376A priority patent/CH601769A5/xx
Priority to US05/682,504 priority patent/US4074131A/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE19752521618 1975-05-15 1975-05-15 Vorrichtung zum Messen oder Einstellen von zweidimensionalen Lagekoordinaten Ceased DE2521618B1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE19752521618 DE2521618B1 (de) 1975-05-15 1975-05-15 Vorrichtung zum Messen oder Einstellen von zweidimensionalen Lagekoordinaten
CH513376A CH601769A5 (enExample) 1975-05-15 1976-04-26
US05/682,504 US4074131A (en) 1975-05-15 1976-05-03 Apparatus for measuring or setting two-dimensional position coordinates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752521618 DE2521618B1 (de) 1975-05-15 1975-05-15 Vorrichtung zum Messen oder Einstellen von zweidimensionalen Lagekoordinaten

Publications (1)

Publication Number Publication Date
DE2521618B1 true DE2521618B1 (de) 1976-03-11

Family

ID=5946624

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19752521618 Ceased DE2521618B1 (de) 1975-05-15 1975-05-15 Vorrichtung zum Messen oder Einstellen von zweidimensionalen Lagekoordinaten

Country Status (3)

Country Link
US (1) US4074131A (enExample)
CH (1) CH601769A5 (enExample)
DE (1) DE2521618B1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3909855A1 (de) * 1989-03-25 1990-09-27 Ems Technik Gmbh Verfahren zur lagerbestimmung einer positionierbaren flaeche sowie lagegeber
DE4206544A1 (de) * 1992-03-02 1993-09-09 Lpkf Cad Cam Systeme In Thueri Zweikoordinaten-wegmesssystem
WO2008138501A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4200395A (en) * 1977-05-03 1980-04-29 Massachusetts Institute Of Technology Alignment of diffraction gratings
US4193687A (en) * 1978-06-05 1980-03-18 Rockwell International Corporation High resolution alignment technique and apparatus
US4207002A (en) * 1978-12-18 1980-06-10 General Motors Corporation Apparatus for detecting an output image of an optical correlation
US4273448A (en) * 1979-06-04 1981-06-16 Schiler Frederick S Measuring method and apparatus
US4385838A (en) * 1980-01-19 1983-05-31 Nippon Kogaku K. K. Alignment device
US4529314A (en) * 1980-04-18 1985-07-16 Harris Corporation Method of measuring misalignment between levels on a substrate
US4546347A (en) * 1981-05-18 1985-10-08 Mouse Systems Corporation Detector for electro-optical mouse
JPS5877606A (ja) * 1981-09-04 1983-05-11 エム・ア−・エヌ−ロ−ラント・ドルツクマシ−ネン・アクチエンゲゼルシヤフト 支持体上の印刷用紙の位置検出装置
DE3334398C1 (de) * 1983-09-23 1984-11-22 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Messeinrichtung
US4840490A (en) * 1984-12-10 1989-06-20 Lasercheck Limited Laser position measurement and alignment
US4782327A (en) * 1985-01-02 1988-11-01 Victor B. Kley Computer control
US4924505A (en) * 1987-08-03 1990-05-08 Vexcel Corporation Method of mensuration of an image on an object
US5040059A (en) * 1987-08-03 1991-08-13 Vexcel Corporation Method and apparatus of image mensuration with selectively visible and invisible reseau grid marks
US4942621A (en) * 1988-11-15 1990-07-17 Msc Technologies, Inc. Method for mapping scanned pixel data
US4984287A (en) * 1988-11-15 1991-01-08 Msc Technologies, Inc. Method for orienting a dual mouse optical scanner
US5204524A (en) * 1991-03-22 1993-04-20 Mitutoyo Corporation Two-dimensional optical encoder with three gratings in each dimension
DE19517842C2 (de) * 1995-05-18 2000-09-14 Saechsisches Inst Fuer Die Dru Vorrichtung zur Messung von Lösungs- und Querpassermarken auf einem Druckprodukt
US7512452B2 (en) 2005-06-13 2009-03-31 Mauro George E Positioning system for eliminating lost motion effect
US20060288795A1 (en) * 2005-06-27 2006-12-28 Vishay Measurements Group, Inc. Strain gage with off axis creep compensation feature
US7636165B2 (en) * 2006-03-21 2009-12-22 Asml Netherlands B.V. Displacement measurement systems lithographic apparatus and device manufacturing method
NL2009197A (en) 2011-08-25 2013-02-27 Asml Netherlands Bv System for detection motion, lithographic apparatus and device manufacturing method.
JP6560490B2 (ja) * 2014-12-10 2019-08-14 キヤノン株式会社 顕微鏡システム
JP6643071B2 (ja) * 2015-12-10 2020-02-12 キヤノン株式会社 顕微鏡システム
CN107328366B (zh) * 2017-06-16 2020-08-21 清华大学 二维纳米柔性运动平台及其光栅测量方法
CN111623710A (zh) * 2020-04-21 2020-09-04 广州市信诺光栅数显有限公司 一种基于高强度高模量纤维材料的光栅尺读数头滑车

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3533702A (en) * 1965-04-24 1970-10-13 Leitz Ernst Gmbh Multipurpose optical measuring device for determining the position of an object in two coordinates
US3633038A (en) * 1970-05-01 1972-01-04 Newell Ind Transducer-positioning system using radiation-sensitive means
US3867038A (en) * 1972-11-27 1975-02-18 Baird Atomic Inc Optical alignment system
GB1443220A (en) * 1972-12-19 1976-07-21 Leitz Ernst Gmbh Photo-electric incremental transducer

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3909855A1 (de) * 1989-03-25 1990-09-27 Ems Technik Gmbh Verfahren zur lagerbestimmung einer positionierbaren flaeche sowie lagegeber
DE4206544A1 (de) * 1992-03-02 1993-09-09 Lpkf Cad Cam Systeme In Thueri Zweikoordinaten-wegmesssystem
WO2008138501A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102007023300A1 (de) 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
US7796272B2 (en) 2007-05-16 2010-09-14 Dr. Johannes Heidenhain Gmbh Position-measuring device for measuring a position of an object relative to a tool having a tool centerpoint
US7907286B2 (en) 2007-05-16 2011-03-15 Dr. Johannes Heidenhain Gmbh Optical position-measuring device

Also Published As

Publication number Publication date
US4074131A (en) 1978-02-14
CH601769A5 (enExample) 1978-07-14

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