DE2518346A1 - Interferometriegeraet - Google Patents

Interferometriegeraet

Info

Publication number
DE2518346A1
DE2518346A1 DE19752518346 DE2518346A DE2518346A1 DE 2518346 A1 DE2518346 A1 DE 2518346A1 DE 19752518346 DE19752518346 DE 19752518346 DE 2518346 A DE2518346 A DE 2518346A DE 2518346 A1 DE2518346 A1 DE 2518346A1
Authority
DE
Germany
Prior art keywords
interferometer
mirror
radiation detector
radiation
entrance pupil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19752518346
Other languages
German (de)
English (en)
Inventor
Roger Philip Edwin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Industry
Original Assignee
UK Secretary of State for Industry
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Industry filed Critical UK Secretary of State for Industry
Publication of DE2518346A1 publication Critical patent/DE2518346A1/de
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02015Interferometers characterised by the beam path configuration
    • G01B9/02024Measuring in transmission, i.e. light traverses the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/65Spatial scanning object beam

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE19752518346 1974-04-26 1975-04-25 Interferometriegeraet Pending DE2518346A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB18479/74A GB1498944A (en) 1974-04-26 1974-04-26 Interferometer systems

Publications (1)

Publication Number Publication Date
DE2518346A1 true DE2518346A1 (de) 1975-12-18

Family

ID=10113139

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19752518346 Pending DE2518346A1 (de) 1974-04-26 1975-04-25 Interferometriegeraet

Country Status (3)

Country Link
DE (1) DE2518346A1 (enExample)
FR (1) FR2269073A1 (enExample)
GB (1) GB1498944A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113967608A (zh) * 2021-12-22 2022-01-25 南京英田光学工程股份有限公司 星载mems光束控制摆镜的地面筛选测试装置及方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2433205A1 (fr) * 1978-08-08 1980-03-07 Anvar Procede et dispositif d'interpolation des franges d'interference

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113967608A (zh) * 2021-12-22 2022-01-25 南京英田光学工程股份有限公司 星载mems光束控制摆镜的地面筛选测试装置及方法

Also Published As

Publication number Publication date
GB1498944A (en) 1978-01-25
FR2269073A1 (enExample) 1975-11-21

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