DE2518225A1 - Aetzmaschine - Google Patents
AetzmaschineInfo
- Publication number
- DE2518225A1 DE2518225A1 DE19752518225 DE2518225A DE2518225A1 DE 2518225 A1 DE2518225 A1 DE 2518225A1 DE 19752518225 DE19752518225 DE 19752518225 DE 2518225 A DE2518225 A DE 2518225A DE 2518225 A1 DE2518225 A1 DE 2518225A1
- Authority
- DE
- Germany
- Prior art keywords
- carrier
- spray chamber
- bath
- liquid
- movable part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 title description 25
- 239000007921 spray Substances 0.000 claims description 66
- 239000007788 liquid Substances 0.000 claims description 59
- 238000005507 spraying Methods 0.000 claims description 10
- 239000012530 fluid Substances 0.000 claims description 8
- 239000011800 void material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000013022 venting Methods 0.000 description 2
- 239000003518 caustics Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B16/00—Spray booths
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Spray Control Apparatus (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Weting (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US465441A US3889696A (en) | 1974-04-29 | 1974-04-29 | Etching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2518225A1 true DE2518225A1 (de) | 1975-11-13 |
Family
ID=23847828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752518225 Pending DE2518225A1 (de) | 1974-04-29 | 1975-04-24 | Aetzmaschine |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3889696A (enExample) |
| JP (1) | JPS50140274A (enExample) |
| DE (1) | DE2518225A1 (enExample) |
| FR (1) | FR2268569B1 (enExample) |
| GB (1) | GB1474007A (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2550794C2 (de) * | 1975-11-10 | 1984-08-16 | Schering AG, 1000 Berlin und 4709 Bergkamen | Einrichtung zum Spülen von Gegenständen |
| JP2601831B2 (ja) * | 1987-07-31 | 1997-04-16 | 株式会社日立製作所 | ウェット処理装置 |
| GB2326952B (en) * | 1997-07-03 | 2002-06-12 | Gkn Sheepbridge Stokes Ltd | Method of providing microscopic features |
| US7146991B2 (en) * | 2002-01-23 | 2006-12-12 | Cinetic Automation Corporation | Parts washer system |
| US7353832B2 (en) * | 2003-08-21 | 2008-04-08 | Cinetic Automation Corporation | Housingless washer |
| US7338565B2 (en) * | 2003-08-21 | 2008-03-04 | Cinetic Automation Corporation | Housingless washer |
| CN110252571B (zh) * | 2019-07-15 | 2020-10-23 | 诸暨高宗自动化科技有限公司 | 一种民用船只的螺旋桨除锈上漆装置 |
| CN117711989B (zh) * | 2024-01-02 | 2024-06-28 | 浙江大学 | 一种半导体功率器件制造用刻蚀机 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US17639A (en) * | 1857-06-23 | Hardehsting axes | ||
| US2258562A (en) * | 1938-01-07 | 1941-10-07 | Vulcan Soot Blower Corp | Automatic motor block cleaner |
| US2747590A (en) * | 1951-10-04 | 1956-05-29 | Harold N Ipsen | Washer for workpieces |
| US2703581A (en) * | 1953-10-16 | 1955-03-08 | Vernon C Culhane | Dishwasher |
| US2972352A (en) * | 1957-05-22 | 1961-02-21 | Harold N Ipsen | Washer |
| US3070104A (en) * | 1958-03-26 | 1962-12-25 | R G Wright Company Inc | Glassware washer |
| US3414249A (en) * | 1966-06-10 | 1968-12-03 | Pacific Scientific Co | Fluid treating transfer mechanism |
-
1974
- 1974-04-29 US US465441A patent/US3889696A/en not_active Expired - Lifetime
-
1975
- 1975-03-19 GB GB1146575A patent/GB1474007A/en not_active Expired
- 1975-03-20 JP JP50034206A patent/JPS50140274A/ja active Pending
- 1975-04-24 DE DE19752518225 patent/DE2518225A1/de active Pending
- 1975-04-28 FR FR7513262A patent/FR2268569B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2268569B1 (enExample) | 1979-04-06 |
| GB1474007A (en) | 1977-05-18 |
| US3889696A (en) | 1975-06-17 |
| FR2268569A1 (enExample) | 1975-11-21 |
| JPS50140274A (enExample) | 1975-11-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHJ | Non-payment of the annual fee |