DE2460207A1 - Verfahren zum herstellen eines akustooptischen bauelementes oder eines breitbandigen ultraschall-bauelementes - Google Patents
Verfahren zum herstellen eines akustooptischen bauelementes oder eines breitbandigen ultraschall-bauelementesInfo
- Publication number
- DE2460207A1 DE2460207A1 DE19742460207 DE2460207A DE2460207A1 DE 2460207 A1 DE2460207 A1 DE 2460207A1 DE 19742460207 DE19742460207 DE 19742460207 DE 2460207 A DE2460207 A DE 2460207A DE 2460207 A1 DE2460207 A1 DE 2460207A1
- Authority
- DE
- Germany
- Prior art keywords
- layer
- transducer
- thickness
- acousto
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 10
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 239000010931 gold Substances 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 7
- 238000005422 blasting Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- XJUNRGGMKUAPAP-UHFFFAOYSA-N dioxido(dioxo)molybdenum;lead(2+) Chemical compound [Pb+2].[O-][Mo]([O-])(=O)=O XJUNRGGMKUAPAP-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- QFWPJPIVLCBXFJ-UHFFFAOYSA-N glymidine Chemical compound N1=CC(OCCOC)=CN=C1NS(=O)(=O)C1=CC=CC=C1 QFWPJPIVLCBXFJ-UHFFFAOYSA-N 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000035784 germination Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/18—Methods or devices for transmitting, conducting or directing sound
- G10K11/26—Sound-focusing or directing, e.g. scanning
- G10K11/32—Sound-focusing or directing, e.g. scanning characterised by the shape of the source
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19742460207 DE2460207A1 (de) | 1974-12-19 | 1974-12-19 | Verfahren zum herstellen eines akustooptischen bauelementes oder eines breitbandigen ultraschall-bauelementes |
| GB51228/75A GB1503769A (en) | 1974-12-19 | 1975-12-15 | Acoustooptical components |
| FR7538459A FR2295576A1 (fr) | 1974-12-19 | 1975-12-16 | Procede pour realiser un composant acoustico-optique ou un composant ultrasonore a large bande |
| US05/641,382 US4051582A (en) | 1974-12-19 | 1975-12-16 | Techniques for producing an acousto-optical component or a wide-band ultrasonic component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19742460207 DE2460207A1 (de) | 1974-12-19 | 1974-12-19 | Verfahren zum herstellen eines akustooptischen bauelementes oder eines breitbandigen ultraschall-bauelementes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2460207A1 true DE2460207A1 (de) | 1976-09-02 |
Family
ID=5933896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19742460207 Pending DE2460207A1 (de) | 1974-12-19 | 1974-12-19 | Verfahren zum herstellen eines akustooptischen bauelementes oder eines breitbandigen ultraschall-bauelementes |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4051582A (enExample) |
| DE (1) | DE2460207A1 (enExample) |
| FR (1) | FR2295576A1 (enExample) |
| GB (1) | GB1503769A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0001219A1 (de) * | 1977-09-23 | 1979-04-04 | Siemens Aktiengesellschaft | Verfahren zum mittelbaren Verbinden zweier Teile durch Verschweissung zweier Metallauflagen |
| EP0001220A1 (de) * | 1977-09-23 | 1979-04-04 | Siemens Aktiengesellschaft | Verfahren zum mittelbaren Verbinden zweier Teile |
| DE102008003283A1 (de) * | 2008-01-05 | 2009-07-09 | Marquardt Gmbh | Füllstandssensor |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5527865A (en) * | 1978-08-18 | 1980-02-28 | Toyota Motor Co Ltd | Joint of ceramic member and manufacture of oxygen senser element |
| US4895290A (en) * | 1980-12-08 | 1990-01-23 | Raytheon Company | Method for bonding materials |
| US5465897A (en) * | 1994-03-29 | 1995-11-14 | The Regents Of The University Of California, Office Of Technology Transfer | Bonded ultrasonic transducer and method for making |
| US20020074897A1 (en) * | 2000-12-15 | 2002-06-20 | Qing Ma | Micro-electromechanical structure resonator frequency adjustment using radient energy trimming and laser/focused ion beam assisted deposition |
| US7052117B2 (en) | 2002-07-03 | 2006-05-30 | Dimatix, Inc. | Printhead having a thin pre-fired piezoelectric layer |
| US7281778B2 (en) | 2004-03-15 | 2007-10-16 | Fujifilm Dimatix, Inc. | High frequency droplet ejection device and method |
| US8491076B2 (en) | 2004-03-15 | 2013-07-23 | Fujifilm Dimatix, Inc. | Fluid droplet ejection devices and methods |
| KR20070087223A (ko) | 2004-12-30 | 2007-08-27 | 후지필름 디마틱스, 인크. | 잉크 분사 프린팅 |
| US7988247B2 (en) | 2007-01-11 | 2011-08-02 | Fujifilm Dimatix, Inc. | Ejection of drops having variable drop size from an ink jet printer |
| CN101939910B (zh) * | 2007-12-04 | 2013-12-25 | 精工电子有限公司 | 电压振动器的制造方法、压电振动器、振荡器、电子设备及电波钟 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1541523B1 (de) * | 1965-12-21 | 1970-07-09 | Nippon Electric Co | Piezoelektrisches elektroakustisches Wandlerelement und Verfahren zu seiner Herstellung |
| US3590467A (en) * | 1968-11-15 | 1971-07-06 | Corning Glass Works | Method for bonding a crystal to a solid delay medium |
| US3798746A (en) * | 1972-10-10 | 1974-03-26 | Rca Corp | Process of making acousto-optic devices |
| US3921885A (en) * | 1973-06-28 | 1975-11-25 | Rca Corp | Method of bonding two bodies together |
| US3897628A (en) * | 1973-11-19 | 1975-08-05 | Rca Corp | Method of forming a thin piezoelectric body metallically bonded to a propagation medium crystal |
-
1974
- 1974-12-19 DE DE19742460207 patent/DE2460207A1/de active Pending
-
1975
- 1975-12-15 GB GB51228/75A patent/GB1503769A/en not_active Expired
- 1975-12-16 US US05/641,382 patent/US4051582A/en not_active Expired - Lifetime
- 1975-12-16 FR FR7538459A patent/FR2295576A1/fr active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0001219A1 (de) * | 1977-09-23 | 1979-04-04 | Siemens Aktiengesellschaft | Verfahren zum mittelbaren Verbinden zweier Teile durch Verschweissung zweier Metallauflagen |
| EP0001220A1 (de) * | 1977-09-23 | 1979-04-04 | Siemens Aktiengesellschaft | Verfahren zum mittelbaren Verbinden zweier Teile |
| DE102008003283A1 (de) * | 2008-01-05 | 2009-07-09 | Marquardt Gmbh | Füllstandssensor |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2295576B1 (enExample) | 1979-02-02 |
| US4051582A (en) | 1977-10-04 |
| FR2295576A1 (fr) | 1976-07-16 |
| GB1503769A (en) | 1978-03-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69330499T2 (de) | Piezoelektrischer Resonator und Herstellungsverfahren derselben | |
| DE2701200C2 (enExample) | ||
| DE68928421T2 (de) | Sputtertarget mit verschiedenen Target-Elementen | |
| DE2742922C2 (de) | Verfahren zum mittelbaren Verbinden zweier Teile | |
| DE10132788B4 (de) | Qualitativ hochwertige optische Oberfläche und Verfahren zu ihrer Herstellung | |
| DE2432809A1 (de) | Gehaeuse fuer fluessigkristallzellen | |
| DE68918372T2 (de) | Piezoelektrischer Wandler zur Volumenwellenerregung. | |
| EP0001219B1 (de) | Verfahren zum mittelbaren Verbinden zweier Teile durch Verschweissung zweier Metallauflagen | |
| EP4056960B1 (de) | Ultraschallwandler zum senden und/oder empfangen von ultraschallwellen | |
| DE2239696B2 (de) | Piezoelektrischer Hochfrequenz-Dickenresonator und Verfahren zu seiner Herstellung | |
| DE102022105707A1 (de) | Stromschiene | |
| DE2827725A1 (de) | Druckmessgeraet | |
| DE4420347C2 (de) | Verfahren zum Abgleich von elektronischen Bauelementen | |
| EP1042794A1 (de) | Verfahren zur herstellung einer porösen schicht mit hilfe eines elektrochemischen ätzprozesses | |
| DE3910460C2 (de) | Verfahren zur Herstellung eines Dickenscherungs-Kristallresonators | |
| DE19704389A1 (de) | Aktor aus Einzelelementen | |
| DE2517384C3 (de) | Verfahren zum Beschichten der Innenfläche eines Rundhohlleiters | |
| DE3413142C1 (de) | Verfahren zur Herstellung eines supraleitenden Hohlraumresonators | |
| DE4140404C2 (de) | Bondverfahren für die Aufbau- und Verbindungstechnik | |
| DE19935907C2 (de) | Kalibrierkörper für Ultraschallmikroskope | |
| DE4202039C2 (de) | Verfahren zur Herstellung optoelektronischer Bauelemente | |
| DE102024125574A1 (de) | Elektrische Durchführung und Verfahren zu deren Herstellung | |
| DE1237653B (de) | Verfahren zur Herstellung eines Wellenleiters mit einem vakuumdicht darin festgeklemmten Glimmerfenster und durch dieses Verfahren hergestellte Wellenleiter | |
| DE10135872A1 (de) | Verfahren zur Herstellung einer Linse | |
| DE2000247C (de) | Piezoelektrischer keramischer Ringresonator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHJ | Non-payment of the annual fee |