DE2431415C3 - Elektrodenanordnung für elektrische Felder und Verfahren zu ihrer Herstellung - Google Patents
Elektrodenanordnung für elektrische Felder und Verfahren zu ihrer HerstellungInfo
- Publication number
- DE2431415C3 DE2431415C3 DE2431415A DE2431415A DE2431415C3 DE 2431415 C3 DE2431415 C3 DE 2431415C3 DE 2431415 A DE2431415 A DE 2431415A DE 2431415 A DE2431415 A DE 2431415A DE 2431415 C3 DE2431415 C3 DE 2431415C3
- Authority
- DE
- Germany
- Prior art keywords
- layer
- resistance
- strips
- segment
- electric field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005684 electric field Effects 0.000 title claims description 14
- 238000000034 method Methods 0.000 title claims description 9
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000000576 coating method Methods 0.000 claims description 16
- 239000011248 coating agent Substances 0.000 claims description 14
- 238000003486 chemical etching Methods 0.000 claims description 4
- 238000005488 sandblasting Methods 0.000 claims description 4
- 230000000873 masking effect Effects 0.000 claims description 3
- 238000009966 trimming Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 description 20
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009304 pastoral farming Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
- H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
- H01J49/4215—Quadrupole mass filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/22—Electrostatic deflection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
- H01J49/4255—Device types with particular constructional features
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US00389329A US3818228A (en) | 1973-08-17 | 1973-08-17 | Field termination plates for charged particle analyzers |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2431415A1 DE2431415A1 (de) | 1975-03-20 |
| DE2431415B2 DE2431415B2 (de) | 1977-07-28 |
| DE2431415C3 true DE2431415C3 (de) | 1978-03-23 |
Family
ID=23537798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2431415A Expired DE2431415C3 (de) | 1973-08-17 | 1974-06-29 | Elektrodenanordnung für elektrische Felder und Verfahren zu ihrer Herstellung |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3818228A (enrdf_load_stackoverflow) |
| JP (1) | JPS5423278B2 (enrdf_load_stackoverflow) |
| DE (1) | DE2431415C3 (enrdf_load_stackoverflow) |
| FR (1) | FR2241158B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1427906A (enrdf_load_stackoverflow) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4079254A (en) * | 1975-09-11 | 1978-03-14 | Analog Technology Corporation | Mass spectrometer filter |
| JPS5320995A (en) * | 1976-08-09 | 1978-02-25 | Minnesota Mining & Mfg | Apparatus for surface layer analysis |
| US4146787A (en) * | 1977-02-17 | 1979-03-27 | Extranuclear Laboratories, Inc. | Methods and apparatus for energy analysis and energy filtering of secondary ions and electrons |
| JPS597736Y2 (ja) * | 1977-02-25 | 1984-03-09 | 日本電子株式会社 | 電子分光装置 |
| JPS6037644A (ja) * | 1983-08-10 | 1985-02-27 | Anelva Corp | 表面分析装置 |
| US4714831A (en) * | 1986-05-01 | 1987-12-22 | International Business Machines | Spherical retarding grid analyzer |
| US5097125A (en) * | 1986-06-04 | 1992-03-17 | Arch Development Corporation | Photo ion spectrometer |
| US5008535A (en) * | 1988-09-02 | 1991-04-16 | U.S. Philips Corporation | Energy analyzer and spectrometer for low-energy electrons |
| GB2244369A (en) * | 1990-05-22 | 1991-11-27 | Kratos Analytical Ltd | Charged particle energy analysers |
| SE9702053D0 (sv) * | 1997-05-29 | 1997-05-29 | Staffan Jonsson | Gasdetektor av kvadrupoltyp |
| US7902502B2 (en) * | 2005-11-01 | 2011-03-08 | The Regents Of The University Of Colorado, A Body Corporate | Multichannel energy analyzer for charged particles |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2945124A (en) * | 1955-08-04 | 1960-07-12 | Bell & Howell Co | Formation of electrical fields |
| US3670162A (en) * | 1970-09-23 | 1972-06-13 | Avco Corp | Charged particle analyzer |
| US3735128A (en) * | 1971-08-27 | 1973-05-22 | Physical Electronics Ind Inc | Field termination plate |
| US3739170A (en) * | 1971-12-20 | 1973-06-12 | Physical Electronics Ind Inc | Auger electron spectroscopy |
-
1973
- 1973-08-17 US US00389329A patent/US3818228A/en not_active Expired - Lifetime
-
1974
- 1974-04-11 GB GB1629874A patent/GB1427906A/en not_active Expired
- 1974-05-15 FR FR7416904A patent/FR2241158B1/fr not_active Expired
- 1974-06-29 DE DE2431415A patent/DE2431415C3/de not_active Expired
- 1974-08-02 JP JP8896074A patent/JPS5423278B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1427906A (en) | 1976-03-10 |
| JPS5423278B2 (enrdf_load_stackoverflow) | 1979-08-13 |
| DE2431415A1 (de) | 1975-03-20 |
| FR2241158A1 (enrdf_load_stackoverflow) | 1975-03-14 |
| DE2431415B2 (de) | 1977-07-28 |
| FR2241158B1 (enrdf_load_stackoverflow) | 1980-04-11 |
| JPS5051386A (enrdf_load_stackoverflow) | 1975-05-08 |
| US3818228A (en) | 1974-06-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) |