DE2420275C3 - Vorrichtung zum Analysieren einer Oberflächenschicht durch Ionenzerstreuung - Google Patents
Vorrichtung zum Analysieren einer Oberflächenschicht durch IonenzerstreuungInfo
- Publication number
- DE2420275C3 DE2420275C3 DE2420275A DE2420275A DE2420275C3 DE 2420275 C3 DE2420275 C3 DE 2420275C3 DE 2420275 A DE2420275 A DE 2420275A DE 2420275 A DE2420275 A DE 2420275A DE 2420275 C3 DE2420275 C3 DE 2420275C3
- Authority
- DE
- Germany
- Prior art keywords
- ions
- analyzer
- axis
- ion beam
- surface layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002344 surface layer Substances 0.000 title claims description 13
- 238000004969 ion scattering spectroscopy Methods 0.000 title claims description 5
- 150000002500 ions Chemical class 0.000 claims description 46
- 238000010884 ion-beam technique Methods 0.000 claims description 18
- 239000006185 dispersion Substances 0.000 claims description 2
- 230000005684 electric field Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- -1 helium or neon ions Chemical class 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000013598 vector Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7306378A NL7306378A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-05-08 | 1973-05-08 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2420275A1 DE2420275A1 (de) | 1974-11-28 |
| DE2420275B2 DE2420275B2 (de) | 1980-09-25 |
| DE2420275C3 true DE2420275C3 (de) | 1981-07-09 |
Family
ID=19818814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2420275A Expired DE2420275C3 (de) | 1973-05-08 | 1974-04-26 | Vorrichtung zum Analysieren einer Oberflächenschicht durch Ionenzerstreuung |
Country Status (6)
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4205226A (en) * | 1978-09-01 | 1980-05-27 | The Perkin-Elmer Corporation | Auger electron spectroscopy |
| US4224518A (en) * | 1978-12-21 | 1980-09-23 | Varian Associates, Inc. | Multistage cylindrical mirror analyzer incorporating a coaxial electron gun |
| JPS57194446A (en) * | 1981-05-22 | 1982-11-30 | Shimadzu Corp | Charged particle energy analyzer |
| US4588890A (en) * | 1984-12-31 | 1986-05-13 | International Business Machines Corporation | Apparatus and method for composite image formation by scanning electron beam |
| US4633084A (en) * | 1985-01-16 | 1986-12-30 | The United States Of America As Represented By The United States Department Of Energy | High efficiency direct detection of ions from resonance ionization of sputtered atoms |
| DE3803424C2 (de) * | 1988-02-05 | 1995-05-18 | Gsf Forschungszentrum Umwelt | Verfahren zur quantitativen, tiefendifferentiellen Analyse fester Proben |
| US5095208A (en) * | 1988-06-24 | 1992-03-10 | Hitachi, Ltd. | Charged particle generating device and focusing lens therefor |
| JPH0299828A (ja) * | 1988-10-06 | 1990-04-11 | Iseki & Co Ltd | 流量測定器 |
| US4941980A (en) * | 1989-02-17 | 1990-07-17 | Opal, Inc. | System for measuring a topographical feature on a specimen |
| US5032724A (en) * | 1990-08-09 | 1991-07-16 | The Perkin-Elmer Corporation | Multichannel charged-particle analyzer |
| AU712743B2 (en) * | 1994-12-08 | 1999-11-18 | Regents Of The University Of California, The | Method and device for enhancing the recognition of speech among speech-impaired individuals |
| DE102004014582B4 (de) * | 2004-03-25 | 2009-08-20 | Bruker Daltonik Gmbh | Ionenoptische Phasenvolumenkomprimierung |
| GB201011716D0 (en) * | 2010-07-13 | 2010-08-25 | Shimadzu Corp | Charged particle energy analysers and methods of operating charged particle energy analysers |
| US20240159919A1 (en) * | 2021-02-01 | 2024-05-16 | Rensselaer Polytechnic Institute | Programmable and tunable cylindrical deflector analyzers |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3480774A (en) * | 1967-05-26 | 1969-11-25 | Minnesota Mining & Mfg | Low-energy ion scattering apparatus and method for analyzing the surface of a solid |
| GB1327572A (en) * | 1971-03-23 | 1973-08-22 | Ass Elect Ind | Apparatus for use in charged particle spectroscopy |
| US3735128A (en) * | 1971-08-27 | 1973-05-22 | Physical Electronics Ind Inc | Field termination plate |
-
1973
- 1973-05-08 NL NL7306378A patent/NL7306378A/xx not_active Application Discontinuation
-
1974
- 1974-04-26 DE DE2420275A patent/DE2420275C3/de not_active Expired
- 1974-05-02 US US466220A patent/US3920990A/en not_active Expired - Lifetime
- 1974-05-03 GB GB1958774A patent/GB1470847A/en not_active Expired
- 1974-05-04 JP JP4930274A patent/JPS5514504B2/ja not_active Expired
- 1974-05-07 FR FR7415712A patent/FR2229064B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5514504B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-04-16 |
| DE2420275B2 (de) | 1980-09-25 |
| US3920990A (en) | 1975-11-18 |
| DE2420275A1 (de) | 1974-11-28 |
| FR2229064A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-12-06 |
| FR2229064B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-06-24 |
| JPS5028393A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1975-03-22 |
| GB1470847A (en) | 1977-04-21 |
| NL7306378A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-11-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |