DE2337142A1 - Elektronenquelle - Google Patents

Elektronenquelle

Info

Publication number
DE2337142A1
DE2337142A1 DE19732337142 DE2337142A DE2337142A1 DE 2337142 A1 DE2337142 A1 DE 2337142A1 DE 19732337142 DE19732337142 DE 19732337142 DE 2337142 A DE2337142 A DE 2337142A DE 2337142 A1 DE2337142 A1 DE 2337142A1
Authority
DE
Germany
Prior art keywords
cathode
electron beam
beam source
heating
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19732337142
Other languages
German (de)
English (en)
Inventor
Tadao Suganuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Publication of DE2337142A1 publication Critical patent/DE2337142A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electron Sources, Ion Sources (AREA)
DE19732337142 1972-07-20 1973-07-20 Elektronenquelle Pending DE2337142A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47072865A JPS4929969A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-20 1972-07-20

Publications (1)

Publication Number Publication Date
DE2337142A1 true DE2337142A1 (de) 1974-02-14

Family

ID=13501645

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19732337142 Pending DE2337142A1 (de) 1972-07-20 1973-07-20 Elektronenquelle

Country Status (4)

Country Link
US (1) US3878424A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS4929969A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2337142A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2194043A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3930201A1 (de) * 1989-09-09 1991-03-14 Ptr Praezisionstech Gmbh Kontakt zur uebertragung eines elektrischen stroms, insbesondere fuer eine elektronenstrahlkanone

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2459665C2 (de) * 1974-12-17 1982-12-30 Siemens AG, 1000 Berlin und 8000 München Anordnung zum Herstellen eines Körperschnittbildes mit fächerförmigen Bündeln von Röntgenstrahlen
US4020318A (en) * 1975-01-24 1977-04-26 The Welding Institute Electron beam generators
JPS6023455B2 (ja) * 1978-10-17 1985-06-07 株式会社東芝 直熱形陰極構体
NL7906958A (nl) * 1979-09-19 1981-03-23 Philips Nv Metaaldraadkathode voor elektronenstraalapparaat.
FR2471666A1 (fr) * 1979-12-14 1981-06-19 Labo Electronique Physique Canon electronique a courant de faisceau ajustable et de densite uniforme
DE3029853C2 (de) * 1980-08-07 1982-08-26 Standard Elektrik Lorenz Ag, 7000 Stuttgart Indirekt durch Elektronenstoß geheizte Wehneltkathode
DE3332549A1 (de) * 1983-09-09 1985-03-28 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und vorrichtung zur vermeidung von kathodenschaeden beim einschalten von feldemissionsstrahlern
DE59010590D1 (de) * 1989-09-09 1997-01-16 Ptr Praezisionstech Gmbh Katodenhalter für einen Elektronenstrahlerzeuger
US5182488A (en) * 1991-08-27 1993-01-26 The Boc Group, Inc. Electron beam gun for use in an electron beam evaporation source
JP6741879B2 (ja) 2017-04-11 2020-08-19 エーエスエムエル ネザーランズ ビー．ブイ． 荷電粒子源モジュール、荷電粒子源モジュールを備えた露光システム、荷電粒子源配置、半導体デバイスを製造する方法、及びターゲットを検査する方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2522259A (en) * 1948-05-06 1950-09-12 Bell Telephone Labor Inc Electrode temperature regulation
US3005123A (en) * 1959-07-16 1961-10-17 Griffiths Electronics Inc Electron gun construction
US3389290A (en) * 1965-04-06 1968-06-18 Sony Corp Electron gun device
US3500106A (en) * 1965-09-10 1970-03-10 Bell & Howell Co Cathode
GB1191191A (en) * 1968-05-08 1970-05-06 Hitachi Ltd Improvements in Electron Microscopes
US3610988A (en) * 1968-12-12 1971-10-05 Telefunken Patent Cathode arrangement and cathode-ray tube having such a cathode arrangement
US3763388A (en) * 1971-10-19 1973-10-02 Gte Sylvania Inc Cathode ray tube electron gun
US3792263A (en) * 1972-09-13 1974-02-12 Jeol Ltd Scanning electron microscope with means to remove low energy electrons from the primary electron beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3930201A1 (de) * 1989-09-09 1991-03-14 Ptr Praezisionstech Gmbh Kontakt zur uebertragung eines elektrischen stroms, insbesondere fuer eine elektronenstrahlkanone

Also Published As

Publication number Publication date
FR2194043A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-22
US3878424A (en) 1975-04-15
JPS4929969A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-03-16

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