FR2194043A1 - - Google Patents
Info
- Publication number
- FR2194043A1 FR2194043A1 FR7326591A FR7326591A FR2194043A1 FR 2194043 A1 FR2194043 A1 FR 2194043A1 FR 7326591 A FR7326591 A FR 7326591A FR 7326591 A FR7326591 A FR 7326591A FR 2194043 A1 FR2194043 A1 FR 2194043A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47072865A JPS4929969A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-07-20 | 1972-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2194043A1 true FR2194043A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-02-22 |
Family
ID=13501645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7326591A Withdrawn FR2194043A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-07-20 | 1973-07-19 |
Country Status (4)
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2459665A1 (de) * | 1974-12-17 | 1976-07-01 | Siemens Ag | Verfahren zum herstellen eines koerperschnittbildes und anordnung zur durchfuehrung des verfahrens |
| FR2471666A1 (fr) * | 1979-12-14 | 1981-06-19 | Labo Electronique Physique | Canon electronique a courant de faisceau ajustable et de densite uniforme |
| EP0045932A3 (en) * | 1980-08-07 | 1982-06-09 | International Standard Electric Corporation | Indirectly heated cathode associated with a wehnelt cylinder |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4020318A (en) * | 1975-01-24 | 1977-04-26 | The Welding Institute | Electron beam generators |
| JPS6023455B2 (ja) * | 1978-10-17 | 1985-06-07 | 株式会社東芝 | 直熱形陰極構体 |
| NL7906958A (nl) * | 1979-09-19 | 1981-03-23 | Philips Nv | Metaaldraadkathode voor elektronenstraalapparaat. |
| DE3332549A1 (de) * | 1983-09-09 | 1985-03-28 | Fa. Carl Zeiss, 7920 Heidenheim | Verfahren und vorrichtung zur vermeidung von kathodenschaeden beim einschalten von feldemissionsstrahlern |
| DE59010590D1 (de) * | 1989-09-09 | 1997-01-16 | Ptr Praezisionstech Gmbh | Katodenhalter für einen Elektronenstrahlerzeuger |
| DE3930201A1 (de) * | 1989-09-09 | 1991-03-14 | Ptr Praezisionstech Gmbh | Kontakt zur uebertragung eines elektrischen stroms, insbesondere fuer eine elektronenstrahlkanone |
| US5182488A (en) * | 1991-08-27 | 1993-01-26 | The Boc Group, Inc. | Electron beam gun for use in an electron beam evaporation source |
| JP6741879B2 (ja) | 2017-04-11 | 2020-08-19 | エーエスエムエル ネザーランズ ビー．ブイ． | 荷電粒子源モジュール、荷電粒子源モジュールを備えた露光システム、荷電粒子源配置、半導体デバイスを製造する方法、及びターゲットを検査する方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2522259A (en) * | 1948-05-06 | 1950-09-12 | Bell Telephone Labor Inc | Electrode temperature regulation |
| US3005123A (en) * | 1959-07-16 | 1961-10-17 | Griffiths Electronics Inc | Electron gun construction |
| US3389290A (en) * | 1965-04-06 | 1968-06-18 | Sony Corp | Electron gun device |
| US3500106A (en) * | 1965-09-10 | 1970-03-10 | Bell & Howell Co | Cathode |
| GB1191191A (en) * | 1968-05-08 | 1970-05-06 | Hitachi Ltd | Improvements in Electron Microscopes |
| US3610988A (en) * | 1968-12-12 | 1971-10-05 | Telefunken Patent | Cathode arrangement and cathode-ray tube having such a cathode arrangement |
| US3763388A (en) * | 1971-10-19 | 1973-10-02 | Gte Sylvania Inc | Cathode ray tube electron gun |
| US3792263A (en) * | 1972-09-13 | 1974-02-12 | Jeol Ltd | Scanning electron microscope with means to remove low energy electrons from the primary electron beam |
-
1972
- 1972-07-20 JP JP47072865A patent/JPS4929969A/ja active Pending
-
1973
- 1973-07-17 US US380100A patent/US3878424A/en not_active Expired - Lifetime
- 1973-07-19 FR FR7326591A patent/FR2194043A1/fr not_active Withdrawn
- 1973-07-20 DE DE19732337142 patent/DE2337142A1/de active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2459665A1 (de) * | 1974-12-17 | 1976-07-01 | Siemens Ag | Verfahren zum herstellen eines koerperschnittbildes und anordnung zur durchfuehrung des verfahrens |
| FR2471666A1 (fr) * | 1979-12-14 | 1981-06-19 | Labo Electronique Physique | Canon electronique a courant de faisceau ajustable et de densite uniforme |
| EP0045932A3 (en) * | 1980-08-07 | 1982-06-09 | International Standard Electric Corporation | Indirectly heated cathode associated with a wehnelt cylinder |
Also Published As
| Publication number | Publication date |
|---|---|
| US3878424A (en) | 1975-04-15 |
| DE2337142A1 (de) | 1974-02-14 |
| JPS4929969A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-03-16 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |