DE2309181A1 - Mit elektronenstrahlabtastung arbeitende analysevorrichtung - Google Patents

Mit elektronenstrahlabtastung arbeitende analysevorrichtung

Info

Publication number
DE2309181A1
DE2309181A1 DE19732309181 DE2309181A DE2309181A1 DE 2309181 A1 DE2309181 A1 DE 2309181A1 DE 19732309181 DE19732309181 DE 19732309181 DE 2309181 A DE2309181 A DE 2309181A DE 2309181 A1 DE2309181 A1 DE 2309181A1
Authority
DE
Germany
Prior art keywords
electron beam
deflection
mirror
analysis device
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19732309181
Other languages
German (de)
English (en)
Inventor
Claude Conty
Jacques Guernet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cameca SAS
Original Assignee
Cameca SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cameca SAS filed Critical Cameca SAS
Publication of DE2309181A1 publication Critical patent/DE2309181A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination or light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2808—Cathodoluminescence

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE19732309181 1972-02-24 1973-02-23 Mit elektronenstrahlabtastung arbeitende analysevorrichtung Pending DE2309181A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7206290A FR2173436A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-02-24 1972-02-24

Publications (1)

Publication Number Publication Date
DE2309181A1 true DE2309181A1 (de) 1973-10-11

Family

ID=9094061

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19732309181 Pending DE2309181A1 (de) 1972-02-24 1973-02-23 Mit elektronenstrahlabtastung arbeitende analysevorrichtung

Country Status (3)

Country Link
JP (1) JPS4898891A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2309181A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2173436A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020225453A3 (en) * 2019-05-09 2020-12-30 Attolight AG Cathodoluminescence electron microscope

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2498767A1 (fr) * 1981-01-23 1982-07-30 Cameca Micro-analyseur a sonde electronique comportant un systeme d'observation a double grandissement
US4810077A (en) * 1986-02-13 1989-03-07 Spectra-Tech, Inc. Grazing angle microscope
FR2596863B1 (fr) * 1986-04-07 1988-06-17 Centre Nat Rech Scient Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique
EP0254128A3 (de) * 1986-07-25 1990-01-03 Siemens Aktiengesellschaft Verfahren und Anordnung zur aufladungsfreien Untersuchung einer Probe
JPS6354057U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-09-27 1988-04-11
GB8707516D0 (en) * 1987-03-30 1987-05-07 Vg Instr Group Surface analysis
DE102009015341A1 (de) * 2009-03-27 2010-10-07 Carl Zeiss Ag Verfahren und Vorrichtungen zur optischen Untersuchung von Proben
US11227743B2 (en) 2019-08-20 2022-01-18 Attolight AG Accurate wavelength calibration in cathodoluminescence SEM
US11782001B2 (en) 2020-12-04 2023-10-10 Attolight AG Dislocation type and density discrimination in semiconductor materials using cathodoluminescence measurements
TWI808554B (zh) 2020-12-04 2023-07-11 亞光股份有限公司 使用陰極發光測量判別半導體材料中的位錯類型和密度的裝置與方法
EP4281989A1 (en) 2021-01-19 2023-11-29 Attolight AG COST EFFECTIVE PROBING IN HIGH VOLUME MANUFACTURE OF µLEDS

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020225453A3 (en) * 2019-05-09 2020-12-30 Attolight AG Cathodoluminescence electron microscope
CN114730684A (zh) * 2019-05-09 2022-07-08 阿托莱特股份公司 阴极射线发光电子显微镜

Also Published As

Publication number Publication date
FR2173436A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-10-05
JPS4898891A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-12-14

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