DE2304159A1 - Ionen-mikroanalysator - Google Patents
Ionen-mikroanalysatorInfo
- Publication number
- DE2304159A1 DE2304159A1 DE2304159A DE2304159A DE2304159A1 DE 2304159 A1 DE2304159 A1 DE 2304159A1 DE 2304159 A DE2304159 A DE 2304159A DE 2304159 A DE2304159 A DE 2304159A DE 2304159 A1 DE2304159 A1 DE 2304159A1
- Authority
- DE
- Germany
- Prior art keywords
- ion
- generating
- microanalyser
- lens
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims description 48
- 238000010884 ion-beam technique Methods 0.000 claims description 21
- 230000005684 electric field Effects 0.000 claims description 7
- 230000001360 synchronised effect Effects 0.000 claims description 5
- 230000035945 sensitivity Effects 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims 1
- 238000009826 distribution Methods 0.000 description 18
- 238000005259 measurement Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000002344 surface layer Substances 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000005040 ion trap Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
- H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47009866A JPS5246514B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-01-28 | 1972-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2304159A1 true DE2304159A1 (de) | 1973-08-23 |
Family
ID=11732047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2304159A Pending DE2304159A1 (de) | 1972-01-28 | 1973-01-29 | Ionen-mikroanalysator |
Country Status (3)
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5015594A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1973-06-08 | 1975-02-19 | ||
| US3916190A (en) * | 1974-03-01 | 1975-10-28 | Minnesota Mining & Mfg | Depth profile analysis apparatus |
| US3937958A (en) | 1975-03-31 | 1976-02-10 | Minnesota Mining And Manufacturing Company | Charged particle beam apparatus |
| JPS5728396Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-06-24 | 1982-06-21 | ||
| JPS5836464B2 (ja) * | 1975-09-12 | 1983-08-09 | 株式会社島津製作所 | シツリヨウブンセキソウチ |
| SE440600B (sv) * | 1979-05-17 | 1985-08-12 | Scanditronix Instr | Anordning for bestralning av en materievolym med en strale av laddade partiklar |
| US4874946A (en) * | 1985-04-30 | 1989-10-17 | The United States Of America As Represented By The United States Department Of Energy | Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices |
| US5089699A (en) * | 1989-03-14 | 1992-02-18 | Hitachi, Ltd. | Secondary charged particle analyzing apparatus and secondary charged particle extracting section |
| US5019712A (en) * | 1989-06-08 | 1991-05-28 | Hughes Aircraft Company | Production of focused ion cluster beams |
| EP0523033A1 (de) * | 1991-07-10 | 1993-01-13 | IMS Ionen Mikrofabrikations Systeme Gesellschaft m.b.H. | Ionenoptisches Abbildungssystem |
| JP3396980B2 (ja) * | 1994-12-22 | 2003-04-14 | ソニー株式会社 | 濃度分布の解析方法 |
| US10473599B2 (en) * | 2017-12-01 | 2019-11-12 | Bruker Axs Gmbh | X-ray source using electron impact excitation of high velocity liquid metal beam |
-
1972
- 1972-01-28 JP JP47009866A patent/JPS5246514B2/ja not_active Expired
-
1973
- 1973-01-29 DE DE2304159A patent/DE2304159A1/de active Pending
- 1973-01-29 US US00327683A patent/US3840743A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3840743A (en) | 1974-10-08 |
| JPS4879693A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-10-25 |
| JPS5246514B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-11-25 |
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