DE2253769C3 - Kathodenzerstäubungsanlage mit kontinuierlichem Substratdurchlauf - Google Patents

Kathodenzerstäubungsanlage mit kontinuierlichem Substratdurchlauf

Info

Publication number
DE2253769C3
DE2253769C3 DE2253769A DE2253769A DE2253769C3 DE 2253769 C3 DE2253769 C3 DE 2253769C3 DE 2253769 A DE2253769 A DE 2253769A DE 2253769 A DE2253769 A DE 2253769A DE 2253769 C3 DE2253769 C3 DE 2253769C3
Authority
DE
Germany
Prior art keywords
chamber
cathode
sputtering system
atomizing
dusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2253769A
Other languages
German (de)
English (en)
Other versions
DE2253769A1 (de
DE2253769B2 (de
Inventor
Werner Dr.Zkausche Helmold Dipl.-Phys. Cirkler
Alois Dipl.-Phys. Dr. 8022 Gruenwald Schauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE2253769A priority Critical patent/DE2253769C3/de
Priority to GB4857773A priority patent/GB1402820A/en
Priority to CH1502773A priority patent/CH589725A5/xx
Priority to FR7338442A priority patent/FR2205584B1/fr
Priority to US00411088A priority patent/US3852181A/en
Priority to JP48123912A priority patent/JPS4977839A/ja
Publication of DE2253769A1 publication Critical patent/DE2253769A1/de
Publication of DE2253769B2 publication Critical patent/DE2253769B2/de
Application granted granted Critical
Publication of DE2253769C3 publication Critical patent/DE2253769C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE2253769A 1972-11-02 1972-11-02 Kathodenzerstäubungsanlage mit kontinuierlichem Substratdurchlauf Expired DE2253769C3 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE2253769A DE2253769C3 (de) 1972-11-02 1972-11-02 Kathodenzerstäubungsanlage mit kontinuierlichem Substratdurchlauf
GB4857773A GB1402820A (en) 1972-11-02 1973-10-18 Cathode-sputtering apparatus
CH1502773A CH589725A5 (enExample) 1972-11-02 1973-10-25
FR7338442A FR2205584B1 (enExample) 1972-11-02 1973-10-29
US00411088A US3852181A (en) 1972-11-02 1973-10-30 Continuous cathode sputtering system
JP48123912A JPS4977839A (enExample) 1972-11-02 1973-11-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2253769A DE2253769C3 (de) 1972-11-02 1972-11-02 Kathodenzerstäubungsanlage mit kontinuierlichem Substratdurchlauf

Publications (3)

Publication Number Publication Date
DE2253769A1 DE2253769A1 (de) 1974-05-09
DE2253769B2 DE2253769B2 (de) 1978-11-02
DE2253769C3 true DE2253769C3 (de) 1979-07-12

Family

ID=5860714

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2253769A Expired DE2253769C3 (de) 1972-11-02 1972-11-02 Kathodenzerstäubungsanlage mit kontinuierlichem Substratdurchlauf

Country Status (6)

Country Link
US (1) US3852181A (enExample)
JP (1) JPS4977839A (enExample)
CH (1) CH589725A5 (enExample)
DE (1) DE2253769C3 (enExample)
FR (1) FR2205584B1 (enExample)
GB (1) GB1402820A (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4175030A (en) * 1977-12-08 1979-11-20 Battelle Development Corporation Two-sided planar magnetron sputtering apparatus
US4116806A (en) * 1977-12-08 1978-09-26 Battelle Development Corporation Two-sided planar magnetron sputtering apparatus
US4274936A (en) * 1979-04-30 1981-06-23 Advanced Coating Technology, Inc. Vacuum deposition system and method
DE2950997C2 (de) * 1979-12-18 1986-10-09 Nihon Shinku Gijutsu K.K., Chigasaki, Kanagawa Vorrichtung zum Beschichten
US4423701A (en) * 1982-03-29 1984-01-03 Energy Conversion Devices, Inc. Glow discharge deposition apparatus including a non-horizontally disposed cathode
JPS62230977A (ja) * 1986-04-01 1987-10-09 Seiko Epson Corp 薄膜製造装置
US4812217A (en) * 1987-04-27 1989-03-14 American Telephone And Telegraph Company, At&T Bell Laboratories Method and apparatus for feeding and coating articles in a controlled atmosphere
JP3416910B2 (ja) * 1991-04-04 2003-06-16 シーゲイト テクノロジィ リミテッド ライアビリティ カンパニー スループットの高いスパッタリング装置及び方法
US6193853B1 (en) 1999-02-25 2001-02-27 Cametoid Limited Magnetron sputtering method and apparatus
US6290821B1 (en) 1999-07-15 2001-09-18 Seagate Technology Llc Sputter deposition utilizing pulsed cathode and substrate bias power
US6833031B2 (en) 2000-03-21 2004-12-21 Wavezero, Inc. Method and device for coating a substrate
DE10320985B4 (de) * 2003-05-09 2005-03-24 Interpane Entwicklungs- Und Beratungsgesellschaft Mbh & Co.Kg Vorrichtung zum Beschichten eines Substrats mit von der Vakuumkammer getrenntem Saugraum
TWI337517B (en) * 2008-03-04 2011-02-11 Inventec Corp Trace carrier
CZ2015837A3 (cs) * 2015-11-27 2017-03-01 Shm, S. R. O. Cylindrická katoda pro nanášení vrstev metodou PVD

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3294670A (en) * 1963-10-07 1966-12-27 Western Electric Co Apparatus for processing materials in a controlled atmosphere
US3521765A (en) * 1967-10-31 1970-07-28 Western Electric Co Closed-end machine for processing articles in a controlled atmosphere
US3616402A (en) * 1968-05-31 1971-10-26 Western Electric Co Sputtering method and apparatus
US3793167A (en) * 1972-06-01 1974-02-19 Globe Amerada Glass Co Apparatus for manufacturing metal-coated glass

Also Published As

Publication number Publication date
GB1402820A (en) 1975-08-13
FR2205584A1 (enExample) 1974-05-31
CH589725A5 (enExample) 1977-07-15
JPS4977839A (enExample) 1974-07-26
DE2253769A1 (de) 1974-05-09
DE2253769B2 (de) 1978-11-02
US3852181A (en) 1974-12-03
FR2205584B1 (enExample) 1977-03-11

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
EHJ Ceased/non-payment of the annual fee