DE2212977A1 - Plasmaerzeuger,insbesondere fuer die Zwecke der Plasmachemie und der Gaserhitzung - Google Patents

Plasmaerzeuger,insbesondere fuer die Zwecke der Plasmachemie und der Gaserhitzung

Info

Publication number
DE2212977A1
DE2212977A1 DE19722212977 DE2212977A DE2212977A1 DE 2212977 A1 DE2212977 A1 DE 2212977A1 DE 19722212977 DE19722212977 DE 19722212977 DE 2212977 A DE2212977 A DE 2212977A DE 2212977 A1 DE2212977 A1 DE 2212977A1
Authority
DE
Germany
Prior art keywords
electrodes
electrode
plasma
individual
electrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19722212977
Other languages
German (de)
English (en)
Inventor
Erich Dipl-Phys Dr Kranz
Wolfgang Dipl-Phys Dr Rother
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PETROLCHEMISCHES KOMBINAT
Original Assignee
PETROLCHEMISCHES KOMBINAT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PETROLCHEMISCHES KOMBINAT filed Critical PETROLCHEMISCHES KOMBINAT
Publication of DE2212977A1 publication Critical patent/DE2212977A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H01J37/32064—Circuits specially adapted for controlling the arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/18—Heating by arc discharge
    • H05B7/185—Heating gases for arc discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
DE19722212977 1971-04-15 1972-03-17 Plasmaerzeuger,insbesondere fuer die Zwecke der Plasmachemie und der Gaserhitzung Pending DE2212977A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD154481A DD95058A1 (enrdf_load_stackoverflow) 1971-04-15 1971-04-15

Publications (1)

Publication Number Publication Date
DE2212977A1 true DE2212977A1 (de) 1972-10-19

Family

ID=5483715

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19722212977 Pending DE2212977A1 (de) 1971-04-15 1972-03-17 Plasmaerzeuger,insbesondere fuer die Zwecke der Plasmachemie und der Gaserhitzung

Country Status (4)

Country Link
BE (1) BE780366A (enrdf_load_stackoverflow)
CS (1) CS152411B2 (enrdf_load_stackoverflow)
DD (1) DD95058A1 (enrdf_load_stackoverflow)
DE (1) DE2212977A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982004519A1 (en) * 1981-06-10 1982-12-23 Ponghis Nikolas Gerassimos Electric arc control device
AT389027B (de) * 1983-03-15 1989-10-10 Skf Steel Eng Ab Einrichtung zum elektrischen erhitzen von gasen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982004519A1 (en) * 1981-06-10 1982-12-23 Ponghis Nikolas Gerassimos Electric arc control device
AT389027B (de) * 1983-03-15 1989-10-10 Skf Steel Eng Ab Einrichtung zum elektrischen erhitzen von gasen

Also Published As

Publication number Publication date
DD95058A1 (enrdf_load_stackoverflow) 1973-01-12
CS152411B2 (enrdf_load_stackoverflow) 1973-12-19
BE780366A (fr) 1972-07-03

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