BE780366A - Generateur de plasma, notamment pour la chimie du plasma et le chauffage de gaz - Google Patents
Generateur de plasma, notamment pour la chimie du plasma et le chauffage de gazInfo
- Publication number
- BE780366A BE780366A BE780366A BE780366A BE780366A BE 780366 A BE780366 A BE 780366A BE 780366 A BE780366 A BE 780366A BE 780366 A BE780366 A BE 780366A BE 780366 A BE780366 A BE 780366A
- Authority
- BE
- Belgium
- Prior art keywords
- plasma
- gas heating
- chemistry
- generator
- plasma generator
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/48—Generating plasma using an arc
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
- H01J37/32064—Circuits specially adapted for controlling the arc discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B7/00—Heating by electric discharge
- H05B7/18—Heating by arc discharge
- H05B7/185—Heating gases for arc discharge
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/36—Circuit arrangements
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD154481A DD95058A1 (fr) | 1971-04-15 | 1971-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE780366A true BE780366A (fr) | 1972-07-03 |
Family
ID=5483715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE780366A BE780366A (fr) | 1971-04-15 | 1972-03-08 | Generateur de plasma, notamment pour la chimie du plasma et le chauffage de gaz |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE780366A (fr) |
| CS (1) | CS152411B2 (fr) |
| DD (1) | DD95058A1 (fr) |
| DE (1) | DE2212977A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1982004519A1 (fr) * | 1981-06-10 | 1982-12-23 | Ponghis Nikolas Gerassimos | Dispositif de controle d'un arc electrique |
-
1971
- 1971-04-15 DD DD154481A patent/DD95058A1/xx unknown
-
1972
- 1972-03-08 BE BE780366A patent/BE780366A/fr unknown
- 1972-03-17 DE DE19722212977 patent/DE2212977A1/de active Pending
- 1972-04-12 CS CS2456A patent/CS152411B2/cs unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE2212977A1 (de) | 1972-10-19 |
| DD95058A1 (fr) | 1973-01-12 |
| CS152411B2 (fr) | 1973-12-19 |
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