BE780366A - PLASMA GENERATOR, ESPECIALLY FOR PLASMA CHEMISTRY AND GAS HEATING - Google Patents

PLASMA GENERATOR, ESPECIALLY FOR PLASMA CHEMISTRY AND GAS HEATING

Info

Publication number
BE780366A
BE780366A BE780366A BE780366A BE780366A BE 780366 A BE780366 A BE 780366A BE 780366 A BE780366 A BE 780366A BE 780366 A BE780366 A BE 780366A BE 780366 A BE780366 A BE 780366A
Authority
BE
Belgium
Prior art keywords
plasma
gas heating
chemistry
generator
plasma generator
Prior art date
Application number
BE780366A
Other languages
French (fr)
Inventor
W Rother
E Kranz
Original Assignee
Petrolchemisches Kombinat
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Petrolchemisches Kombinat filed Critical Petrolchemisches Kombinat
Publication of BE780366A publication Critical patent/BE780366A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H01J37/32064—Circuits specially adapted for controlling the arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/18—Heating by arc discharge
    • H05B7/185—Heating gases for arc discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
BE780366A 1971-04-15 1972-03-08 PLASMA GENERATOR, ESPECIALLY FOR PLASMA CHEMISTRY AND GAS HEATING BE780366A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD154481A DD95058A1 (en) 1971-04-15 1971-04-15

Publications (1)

Publication Number Publication Date
BE780366A true BE780366A (en) 1972-07-03

Family

ID=5483715

Family Applications (1)

Application Number Title Priority Date Filing Date
BE780366A BE780366A (en) 1971-04-15 1972-03-08 PLASMA GENERATOR, ESPECIALLY FOR PLASMA CHEMISTRY AND GAS HEATING

Country Status (4)

Country Link
BE (1) BE780366A (en)
CS (1) CS152411B2 (en)
DD (1) DD95058A1 (en)
DE (1) DE2212977A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982004519A1 (en) * 1981-06-10 1982-12-23 Ponghis Nikolas Gerassimos Electric arc control device

Also Published As

Publication number Publication date
DE2212977A1 (en) 1972-10-19
DD95058A1 (en) 1973-01-12
CS152411B2 (en) 1973-12-19

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