DD95058A1 - - Google Patents

Info

Publication number
DD95058A1
DD95058A1 DD154481A DD15448171A DD95058A1 DD 95058 A1 DD95058 A1 DD 95058A1 DD 154481 A DD154481 A DD 154481A DD 15448171 A DD15448171 A DD 15448171A DD 95058 A1 DD95058 A1 DD 95058A1
Authority
DD
German Democratic Republic
Application number
DD154481A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD154481A priority Critical patent/DD95058A1/xx
Priority to BE780366A priority patent/BE780366A/xx
Priority to DE19722212977 priority patent/DE2212977A1/de
Priority to CS2456A priority patent/CS152411B2/cs
Publication of DD95058A1 publication Critical patent/DD95058A1/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055Arc discharge
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/48Generating plasma using an arc
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055Arc discharge
    • H01J37/32064Circuits specially adapted for controlling the arc discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • H01J37/32623Mechanical discharge control means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00Heating by electric discharge
    • H05B7/18Heating by arc discharge
    • H05B7/185Heating gases for arc discharge
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • H05H1/36Circuit arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
DD154481A 1971-04-15 1971-04-15 DD95058A1 (xx)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DD154481A DD95058A1 (xx) 1971-04-15 1971-04-15
BE780366A BE780366A (fr) 1971-04-15 1972-03-08 Generateur de plasma, notamment pour la chimie du plasma et le chauffage de gaz
DE19722212977 DE2212977A1 (de) 1971-04-15 1972-03-17 Plasmaerzeuger,insbesondere fuer die Zwecke der Plasmachemie und der Gaserhitzung
CS2456A CS152411B2 (xx) 1971-04-15 1972-04-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD154481A DD95058A1 (xx) 1971-04-15 1971-04-15

Publications (1)

Publication Number Publication Date
DD95058A1 true DD95058A1 (xx) 1973-01-12

Family

ID=5483715

Family Applications (1)

Application Number Title Priority Date Filing Date
DD154481A DD95058A1 (xx) 1971-04-15 1971-04-15

Country Status (4)

Country Link
BE (1) BE780366A (xx)
CS (1) CS152411B2 (xx)
DD (1) DD95058A1 (xx)
DE (1) DE2212977A1 (xx)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982004519A1 (en) * 1981-06-10 1982-12-23 Ponghis Nikolas Gerassimos Electric arc control device

Also Published As

Publication number Publication date
CS152411B2 (xx) 1973-12-19
DE2212977A1 (de) 1972-10-19
BE780366A (fr) 1972-07-03

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